Abstract: A lithographic projection apparatus includes a projection system having a last element from which an exposure light is projected onto a wafer through liquid in a space under the last element. A light incident surface of the last element has a convex shape. A liquid retaining member is disposed adjacent to a surface of the last element through which the exposure light does not pass. The liquid retaining member has an undersurface under which liquid is retained. A gap is formed between the liquid retaining member and the surface of the last element, the gap being in fluidic communication with the space. The liquid is retained between the last element and the undersurface of the liquid retaining member on one side and an upper surface of the wafer on the other side. The liquid locally covers a portion of the upper surface of the wafer.

Abstract: An exemplary piezoelectric actuator includes a piezoelectric transducer that exhibits displacements when energized with corresponding voltages. A control system is electrically connected to the piezoelectric transducer so as to provide the transducer with the voltages. The control system includes feedback of displacements of the transducer as functions of respective voltage commands and feed-forward of electrical currents passing through the transducer as functions of the respective voltages applied to the transducer. The control system further has a feedback controller connected to receive transducer-displacement data corresponding to the voltages applied to the transducer. The control system further can include a current-feed-forward amplifier connected to receive transducer-current data corresponding to the voltages applied to the transducer. Such a control system facilitates reduction of hysteresis in controlled actuation of the actuator.

Abstract: So as to provide this problem, provided is an image processing apparatus including: an image data obtaining section that obtains at least two pieces of parallax image data from an image capturing element that includes color filters and opening masks so that one color filter and one opening mask correspond to one of at least a part of photoelectric conversion elements and outputs the at least two pieces of parallax image data; and a correcting section that corrects color imbalance of a corresponding pixel caused between the at least two pieces of parallax image data, based on at least one of a position of the at least a part of photoelectric conversion elements in the image capturing element and an opening displacement of the opening mask.

Abstract: In order to realize a high-speed switching of structured pattern, a structured illuminating microscopy includes a driving unit generating a sonic standing wave in a sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to a light modulator, an illuminating optical system making at least three diffracted components of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes on an observational object, an image-forming optical system forming an image by an observational light flux from the observational object on a detector, and a controlling unit controlling a contrast of an image by modulating at least one of an intensity of the exit light flux, an intensity of the observational light flux, and the detector with a modulating signal of 1/N frequency of the driving signal.

Abstract: An exposure apparatus exposes a substrate by irradiating exposure light on the substrate through liquid. The exposure apparatus has a substrate holder for holding the substrate, a substrate stage capable of moving the substrate held by the substrate holder, and a temperature adjusting system for adjusting the temperature of the substrate holder. The temperature of the substrate is controlled so that there is no difference in temperature between the substrate and the liquid, thereby preventing a reduction in exposure accuracy resulting from variation in temperature of the liquid.

Abstract: Provided is a zoom lens, including, in order from an object: a first lens group (G1) having positive refractive power; a second lens group (G2) having negative refractive power; a third lens group (G3) having positive refractive power; and a fourth lens group (G4) having positive refractive power. The first lens group (G1 includes only, in order from the object, a cemented lens of a negative lens (L11) and a positive lens (L12), and a positive meniscus lens (L13) having a convex surface facing the object, an aperture stop (S) for determining brightness is disposed to the object side of the third lens group (G3), and upon zooming, all of the four groups (G1 to G4) move and the aperture stop (S) moves together with the third lens group (G3), and the conditional expression ?dp1>85.0 is satisfied, where ?dp1 denotes an Abbe number of the positive lens (L12), which is disposed closest to the object in the first lens group (G1), at the d-line as a standard.

Abstract: An electronic camera comprises a wireless communication unit that performs wireless communication with a computer or a printer, and a power save mode changeover unit that changes over a power save mode to either an ON or an OFF state according to the operational state of the electronic camera, if the power save mode is changed over to ON by the power save mode changeover unit, the wireless communication unit stops its operation when radio waves are not being transmitted, and if the power save mode is changed over to OFF, the wireless communication unit operates in a standby state when radio waves are not being transmitted.

Abstract: A projector apparatus includes: a projection unit that projects an image onto a projection surface; a reflectance distribution detection unit that detects a reflectance distribution at the projection surface; a density distribution detection unit that detects a density distribution of a base pattern at the projection surface; a smoothing unit that smooths the reflectance distribution and the density distribution; an input unit that inputs image data; a correction unit that corrects the input image data based upon the smoothed reflectance distribution, the smoothed density distribution and input/output characteristics of the projection unit; and a control unit that controls the projection unit so as to project the image based upon the image data having been corrected.

Abstract: In a liquid crystal exposure apparatus, base pads are respectively placed on two surface plates, and one step board is supported by the base pads. A device main body of an empty-weight cancelling device moves from above one of the surface plates to above the other by moving on the step board, and therefore, a boundary section between the two adjacent surface plates that are separately placed does not function as a guide surface used when the empty-weight cancelling device moves. Accordingly, a fine movement stage that holds a substrate can be guided along an XY plane with high accuracy although the two surface plates are placed apart.

Abstract: A digital camera comprises an imaging device; an internal memory; an attachment device that attaches a storage medium; a medium detector that detects whether the storage medium attached to the attachment device is a storage medium limiting overwrite; and a record control device that controls so as to store image data taken by the imaging device in the storage medium attached to the attachment device. When the medium detector detects that the storage medium attached to the attachment device is the storage medium limiting overwrite, the record control device controls so as to store data management information of the image data recorded in the storage medium limiting overwrite in the internal memory.

Abstract: An exposure apparatus is equipped with a coarse movement stage which can move along an XY plane and includes a first section and a second section that can come close to and separate from each other, a fine movement stage which holds wafer W and is supported relatively movable at least within the XY plane by the coarse movement stage, and a drive system which drives the fine movement stage supported by the coarse movement stage independently or integrally with the coarse movement stage. Further, the exposure apparatus is equipped with a relay stage which can deliver the fine movement stage to/from the coarse movement stage.

Abstract: A holding apparatus includes a holding portion that includes a first member which contacts a portion of an object, a second member which at least a portion thereof is fixed to a base, and a connection member which is configured to connect the first and second members, and a driving unit which drives the holding portion to change at least a posture of the first member, wherein a relative positional relationship between the first member and the second member is changed via the connection member.

Abstract: During the drive of a stage, positional information in a movement plane of a stage is measured by three encoders that include at least one each of an X encoder and a Y encoder of an encoder system, and a controller switches an encoder used for a measurement of positional information of a stage in the movement plane from an encoder to an encoder so that the position of the stage in the movement plane is maintained before and after the switching. Therefore, although the switching of the encoder used for controlling the position of the stage is performed, the position of the stage in the movement plane is maintained before and after the switching, and a correct linkage becomes possible.

Abstract: During the drive of a stage, positional information in a movement plane of a stage is measured by three encoders that include at least one each of an X encoder and a Y encoder of an encoder system, and a controller switches an encoder used for a measurement of positional information of a stage in the movement plane from an encoder to an encoder so that the position of the stage in the movement plane is maintained before and after the switching. Therefore, although the switching of the encoder used for controlling the position of the stage is performed, the position of the stage in the movement plane is maintained before and after the switching, and a correct linkage becomes possible.

Abstract: Provided is a lens unit comprising an actuator that is self-supporting when at a stopped position. The lens unit comprises a holding frame that holds a lens; a movement actuator that moves the holding frame, which is connected to a moving member that moves linearly relative to a stator, when drive force is generated, and does not prevent the moving member from moving relative to the stator when the moving member is stopped; and a braking actuator that stops the moving member from moving relative to the stator, using frictional force, when the movement actuator is not generating the drive force, and decreases the frictional force when the movement actuator generates the drive force.

Abstract: Fringe projection autofocus systems are provided with variable pitch diffraction gratings or multiple diffraction gratings so that a reference beam and a measurement beam propagate along a common path. Alternatively, an input beam can be directed to a diffraction grating so that the selected diffraction orders propagate along a common path. In some examples, distinct spectral bands are used for reference and measurement beams.

Abstract: An exposure apparatus exposes a substrate with exposure light that passes through an exposure liquid. The exposure apparatus comprises: an optical member, which has an emergent surface wherefrom the exposure light emerges; a first supply port, which supplies the exposure liquid; a liquid immersion member, which is capable of forming an immersion space so that an optical path of the exposure light that emerges from the optical member is filled with the exposure liquid; a second supply port, which supplies a cleaning liquid so that it contacts the liquid immersion member; and a preventive apparatus, which prevents the cleaning liquid and the optical member from contacting one another.

Abstract: An image-capturing device including an image-capturing element, a data extraction device, a recording device, a reproduction device, and a display control device is provided. The image-capturing element captures an image of a photographic subject and outputs image data. The data extraction device extracts data corresponding to a region designated in advance within the image data outputted from the image-capturing element. The recording device records the extracted data and the image data into a recording medium individually. The reproduction device reads out the extracted data from the recording medium. The display control device outputs an image signal to a display device, so as to display an image according to the extracted data read out by the reproduction device.

Abstract: A system and method for detecting dust (18) on an image sensor (20) from a single captured image (14) of an actual scene (12) includes a control system (22) that evaluates at least one of a hue channel (466), a value channel (470), and a saturation channel (468) of the captured image (14) to determine if there is dust (18) on the image sensor (20). For example, the control system (22) can evaluate the hue channel (466) and the value channel (470) of the captured image (14) to determine if there is dust (18) on the image sensor (20). With information from the hue channel (466) and the value channel (470), the control system (22) can compute a computed probability (572) of dust (18) for a plurality of pixels (362) of the captured image (14).

Abstract: A piezoelectric actuator includes: a plurality of first piezoelectric elements; a first member that is interposed between opposing faces of the plurality of the first piezoelectric elements and that is driven in a first direction by the plurality of the first piezoelectric elements; a second piezoelectric element that is disposed in the first member; a second member that is disposed in contact with the second piezoelectric element and that is driven in a second direction intersecting the first direction by the second piezoelectric element; and a third member that comes in contact with the second member and that is moved relative to the first member by driving the second member.

Abstract: An imaging device comprising an image pickup sensor that captures an image of a subject, a storage unit that temporarily stores a plurality of frames of image data captured by the image pickup sensor, a detection unit that detects identity or non-identity between at least two image data consecutively captured by the image pickup sensor adjacent in time based on a predetermined image characteristic quantity, and a control unit that controls the device to write the later captured image data in the storage unit when the detection unit detects the non-identity and to not write the later captured image data in the storage unit when it detects the identity.

Abstract: Pattern images are projected under various conditions of liquid prior to exposing a substrate, and exposure conditions for exposing a pattern image on the substrate is determined based on each projection condition of the pattern images. When a pattern image is projected through liquid, a substrate can be excellently exposed in a desired exposure condition according to the condition of the liquid.

Abstract: A data recording/reproducing device includes: a position detection unit that detects information (hereafter referred to as position information) indicating a position at which data are acquired and reproduced; a determining unit that determines which specific set of geographical information, among a plurality of sets of geographical information defined in advance, the position information detected by the position detection unit at the time of data acquisition and data reproduction corresponds to; a recording control unit that records the acquired data into a recording medium based upon determining results provided by the determining unit; a selection unit that selects reproduction-permitted data from the recording medium based upon the geographical information determined by the determining unit at the time of data reproduction; and a reproducing unit that outputs and reproduces at least one set of data among the reproduction-permitted data having been selected.

Abstract: It is disclosed a mask on which a pattern for transfer is formed. The mask comprising a first row pattern part and a second row pattern part which are arranged along a first direction on the mask. The whole region of the first row pattern part and the whole region of the second row pattern part region are arranged to deviate from each other by a predetermined amount in a second direction perpendicular to the first direction.

Abstract: There is disclosed an exposure method is a method of projecting patterns (M1, M2) of a mask (M) onto a substrate to effect exposure thereof, through a plurality of projection optical units each having an enlargement magnification, and the exposure method comprises: placing the mask (M) having first pattern regions (M1) arranged discontinuously in a positional relation corresponding to the enlargement magnification, and second pattern regions (M2) provided at least in part between the first pattern regions (M1), on the object plane side of the projection optical units; projecting enlarged images of either of the first pattern regions (M1) and the second pattern regions (M2) onto the substrate disposed on the image plane side of the projection optical units to effect exposure thereof; and then projecting enlarged images of the other pattern regions onto the substrate to effect exposure thereof.

Abstract: Provided are: an imaging sensor that captures subject light via a photographic optical system provided with a zoom lens and a focus lens; a display unit that displays a through image based upon an imaging signal from the imaging sensor; a predetermined area setting unit that sets a predetermined area on the through image displayed on a display surface of the display unit in a state which is set to a first angle of view or a second angle of view different from the first angle of view by driving the zoom lens; a movement control unit that moves positions of the zoom lens and the focus lens by controlling drive of the zoom lens and the focus lens, so as to change from a first state, which is set to the first angle of view and serves as an in-focus state focused on the predetermined area set by the predetermined area setting unit to a second state, which is set to the second angle of view and serves as an out-of-focus state defocused on the predetermined area, or from the second state to the first state over a pr

Abstract: A storage medium storing an image processing program in which the image processing program obtains a plurality of images and displacement information indicating a positional displacement between the plurality of images, calculates weighting information for performing weighting processing on the displacement information for each of a plurality of color components, performs the weighting processing on the displacement information for each of the plurality of color components, calculates a pixel value of a color component of a calculation target based on local inflection information of a color component other than the color component of the calculation target and the weighting information after conducting the weighting processing, and generates a composite image based on a calculation result. Accordingly, it is possible to reduce a processing time in image processing which generates, from the plurality of images having the positional displacement, the composite image having a higher resolution than those images.

Abstract: A marker corresponding to an editing state at an arbitrary point in time of image data being edited is stored in memory. The image of an arbitrary editing state can be displayed by a user selecting the displayed marker. The original image data is not updated. When saving the image data file, the saved editing state at an arbitrary point of time can be saved as a single file together with the original image data. By selecting a plurality of markers, images corresponding to a plurality of processing states can be displayed simultaneously. A marker can be used to create a new image data file of a desired processing state, or a plurality of markers can be selected to create a plurality of new image data files. Image data can be displayed as thumbnail images, and thumbnail images and ordinary images can be concurrently displayed.

Abstract: A digital still camera includes an image-capturing device, a recording device that records a subject image captured by the image-capturing device into an image recording medium, a first monitor device and a second monitor device. The images repeatedly captured by the image-capturing device are displayed in real time at the first monitor device and, at the same time, a photographic support image having been captured by the image-capturing device is displayed at the second monitor device. A single image or a plurality of images recorded in the image recording medium, for instance, may be displayed at the second monitor device as the photographic support image. Alternatively, an image obtained by partially enlarging the image displayed at the first monitor device may be displayed at the second monitor device.

Abstract: An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.

Abstract: A liquid immersion exposure apparatus includes a nozzle member having a recovery port and an opening via which an exposure beam passes. A projection system includes a first element closest to an image surface and a second element which is second closest to the image surface. The first element has a first surface facing the image surface, a second surface facing a lower surface of the second element, an inclined outer surface extending upwardly and radially outwardly from the first surface and facing an inner surface of the nozzle member, and a flange portion provided above the inclined outer surface. A support member supports the flange portion of the first element. A substrate stage has a holder for holding a substrate to be exposed and moves the substrate below and relative to the nozzle member and the projection system.

Abstract: An illumination optical apparatus is arranged to illuminate a surface to be illuminated, with light in a desired polarization state, without substantive influence of manufacturing error of an optical member functioning as a wave plate. The illumination optical apparatus illuminates the surface to be illuminated on the basis of light from a light source. The illumination optical apparatus is provided with a polarization converting element disposed on or near an illumination pupil plane and adapted for converting a polarization state of incident light into a predetermined polarization state. The polarization converting element has a plurality of variable optical rotating members for variably yielding an angle of rotation to incident linearly polarized light. Each variable optical rotating member has two deviation prisms which are made of an optical material with an optical rotatory power and which are movable relative to each other along a direction intersecting with the optical axis.

Abstract: The disclosure relates to a system for measuring the position of an object in a measurement volume, including: an optical angular measurement device, disposed with static optics, configured for measurement of the an azimuth and elevation angle of the object in the measurement volume with respect to the optical angular measurement device, a range measurement device, disposed with static component, configured for measurement of the range of the object in the measurement volume. It further relates to a use of the system and a measurement method.

Abstract: An image processing apparatus includes a plurality of image processing module parts, a module arbiter part, and a DMAC (Direct Memory Access Controller) part. Each of the image processing module parts includes a module core for executing a predetermined image processing. The plurality of image processing module parts is connected to the module arbiter part. The module arbiter part arbitrates memory access which is given by the plurality of image processing module parts through a bus. The DMAC part is connected between the module arbiter part and the bus, and executes memory access related to the arbitration result obtained by the module arbiter part.

Abstract: A subject designating device includes: a representative value calculation unit that calculates a representative value for each image of a brightness image and chrominance images based upon pixel values indicated at pixels present within a first subject area; a second image generation unit that creates a differential image by subtracting the representative value from pixel values indicated at pixels present within a second subject area; a binarizing unit that binarizes the differential image; a synthesizing unit that creates a synthetic image by combining binary images in correspondence to the brightness image and the chrominance images; a mask extraction unit that extracts a mask constituted with a white pixel cluster from the synthetic image; an evaluation value calculation unit that calculates an evaluation value indicating a likelihood of the mask representing the subject; and a subject designating unit that designates the subject in the target image based upon the evaluation value.

Abstract: An exchangeable lens includes: a camera lens mount unit; a holding portion where twelve lens connector terminals, each connected to one of the twelve body connector terminals and each including a contact area to come into contact with one of the body connector terminals, are disposed; an optical system that includes a drive target member which can be driven; and a drive unit that drives the drive target member. A shape of at least one lens connector terminal among the twelve lens connector terminals is different from a shape of another lens connector terminal among the twelve lens connector terminals.

Abstract: Methods and control systems are provided for controlling stage position errors based, in some embodiments, on a selection of frequency components in a stage position error signal. An error frequency representation of a position error signal may be generated in the frequency domain and filtered by selecting one or more desired frequency components. The filtered error frequency representation can then be manipulated according to a control law and transformed back into the time domain to generate a current control signal. The current control signal can then be used to adjust the position of the stage to reduce positioning error.

Abstract: A laser device includes: a signal light source that outputs seed light; an electro-optic modulator that chops a portion of the seed light outputted from the signal light source and outputs signal light; an optical amplifier that amplifies the signal light outputted from the electro-optic modulator; a wavelength conversion optical element that wavelength converts the signal light amplified by the optical amplifier; a converted light detector that detects the signal light that has been wavelength converted by the wavelength conversion optical element; and an EU control unit that controls the operation of the electro-optic modulator, wherein the EU control unit is adapted, in the state in which the seed light is being outputted, to adjust bias voltage of the electro-optic modulator on the basis of the applied voltage when the intensity of the signal light after wavelength conversion detected by the converted light detector becomes substantially maximum.

Abstract: So as to obtain color parallax images, it has been necessary to prepare an image capturing optical system and an image capturing element that are complex, to capture the parallax images. In view of the above, provided is an image processing apparatus including: an image obtaining section; a disparity amount operation section; and an image converting section.

Abstract: A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source.

Abstract: A laser device includes: an optical fiber amplifier that amplifies and emits a signal light; a control unit that controls pumping power for pumping the optical fiber amplifier; and a signal light detector that detects signal light being propagated to the optical fiber amplifier or an ASE photodetector that detects light that is emitted from the optical fiber amplifier and that has wavelength for which the gain is higher than for the signal light, wherein the control unit suppresses the pumping power for pumping the optical fiber amplifier, when the intensity of the signal light detected by the signal light detector becomes less than or equal to a predetermined signal reference value, or when the intensity of the spontaneously emitted light detected by the ASE photodetector becomes greater than or equal to a predetermined ASE reference value.

Abstract: A photographer 2 registers photographing availability information by accessing a server at a service provider 3 from his terminal (S 1). A photograph client 1 registers photographing request information by accessing the server at the service provider 3 from a home terminal (S 2). The photograph client 1 selects a photographer 2 to be assigned to photograph a subject desired by the client based upon registered photographing availability information provided by photographers 2 (S 3). The selected photographer 2 performs a photographing operation (S 4). The photographer 2 registers a photographed image at the server of the service provider 3 (S 5). The photograph client 1 receives the image from the server of the service provider 3 (S 6).

Abstract: To provide a camera that can perform a removal operation for particles adherent to a surface upon which light is incident, of a pickup device and a transmitting member disposed on an optical path of the pickup device in such a condition that the particles are properly removed. According to the present invention, a camera comprises a driving mechanism section to drop and remove particles on a cleaning target that is a surface of an image pickup device and/or a surface of a low-pass filter provided closer to a side of a subject in an optical path than the image pickup device, the subject light passing through the low-pass filter, which is provided with: a tilt sensor to detect an orientation of the camera; and a control section to judge whether a removal operation for the particles by the driving mechanism section should be carried out or not in accordance with the detected value from the tilt sensor.

Abstract: A plurality of pixels PX include effective pixels and optical black pixels. Signal lines VL are provided corresponding to each column of the pixels PX and supplied with output signals of the pixels PX of the corresponding column. Clip transistors CL are provided corresponding to the respective signal lines VL and limit a potential of the corresponding vertical signal lines VL based on a gate potential. At least in a predetermined operating mode, a potential Vclip_dark is supplied to a gate of one of the clip transistors CL corresponding to at least one pixel column formed of the optical black pixels when reading a noise level from the pixels PX corresponding to the clip transistors CL and when reading a data level from the pixels PX corresponding to the clip transistors CL.