Patents Examined by A. C. Powell
  • Carrier head with a multilayer retaining ring for chemical mechanical polishing
    Patent number: 6251215
    Abstract: A carrier head for a chemical mechanical polishing apparatus includes a retaining ring having a flexible lower portion and a rigid upper portion.
    Type: Grant
    Filed: June 3, 1998
    Date of Patent: June 26, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Steven M. Zuniga, Thomas H. Osterheld, Lawrence M. Rosenberg