Patents Examined by A. Powell
  • Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith
    Patent number: 6255223
    Abstract: Data related to an attractive force between a substrate holder 3 and a substrate 2 is detected when pushing up and releasing the substrate 2 from the substrate holder 3, and when the attractive force is detected to be greater than a predetermined value, the push-up operation is regulated by a controller 18.
    Type: Grant
    Filed: March 11, 1999
    Date of Patent: July 3, 2001
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Izuru Matsuda, Hideo Haraguchi, Shigeyuki Yamamoto