Patents Examined by Aaron Dehne
  • Patent number: 9768301
    Abstract: A semiconductor device includes a semiconductor substrate having a first region and a second region. The first region includes a first set of fin structures, the first set of fin structures comprising a first set of epitaxial anti-punch-through features of a first conductivity type. The first region further includes a first set of transistors formed over the first set of fin structures. The second region includes a second set of fin structures, the second set of fin structures comprising a second set of epitaxial anti-punch-through features of a second conductivity type opposite to the first conductivity type. The second region further includes a second set of transistors formed over the second set of fin structures. The first set of epitaxial anti-punch-through features and the second set of epitaxial anti-punch-through features are substantially co-planar.
    Type: Grant
    Filed: September 17, 2015
    Date of Patent: September 19, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Yi Peng, Chia-Cheng Ho, Chih-Sheng Chang, Yee-Chia Yeo, Yu-Lin Yang
  • Patent number: 9716042
    Abstract: A semiconductor device includes a substrate, a plurality of fins on the substrate, wherein the plurality of fins each include a fin channel region, first isolation regions on the substrate corresponding to active gate regions, a second isolation region on the substrate corresponding to a dummy gate region, wherein a height of the second isolation region is greater than a height of the first isolation regions, a plurality of active gate structures formed around the fins, and on the first isolation regions, and a dummy gate structure formed on the second isolation region.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: July 25, 2017
    Assignee: International Business Machines Corporation
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Theodorus E. Standaert, Junli Wang
  • Patent number: 9711611
    Abstract: A semiconductor device includes a transistor and a contact pad over a substrate. The transistor includes a high-k dielectric layer, a work function metal layer, a metal gate, two spacers, a metal compound, an insulator and a doped region. The high-k dielectric layer is over the substrate. The work function metal layer is over the high-k dielectric layer. The metal gate is over the work function metal layer. The two spacers sandwich the work function metal layer and the metal gate. The metal compound is over inner walls of the two spacers and over the top surface of the work function metal layer and the metal gate. The insulator covers the metal compound. The doped region is in the substrate. The contact pad is electrically connected to the metal gate.
    Type: Grant
    Filed: March 29, 2016
    Date of Patent: July 18, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu Chiang, Wei-Shuo Ho, Kuang-Hsin Chen
  • Patent number: 9704768
    Abstract: It is an object of the present invention to achieve reduced faults in manufacturing steps and increased reliability by relieving electric field strength of a surface of a power semiconductor chip. The present invention includes: a power semiconductor chip disposed on an insulating substrate; wiring connected to a surface conductor pattern in an element region of the power semiconductor chip; a low dielectric constant film disposed between the wiring and the peripheral region; and a sealing material formed so as to cover the insulating substrate, the power semiconductor chip, the wiring, and the low dielectric constant film. The low dielectric constant film has a dielectric constant lower than that of the sealing material.
    Type: Grant
    Filed: December 17, 2013
    Date of Patent: July 11, 2017
    Assignee: Mitsubishi Electric Corporation
    Inventor: Yasuto Kawaguchi
  • Patent number: 9653576
    Abstract: Directed self-assembly (DSA) material, or di-block co-polymer, to pattern features that ultimately define a channel region a gate electrode of a vertical nanowire transistor, potentially based on one lithographic operation. In embodiments, DSA material is confined within a guide opening patterned using convention lithography. In embodiments, channel regions and gate electrode materials are aligned to edges of segregated regions within the DSA material.
    Type: Grant
    Filed: August 25, 2016
    Date of Patent: May 16, 2017
    Assignee: Intel Corporation
    Inventors: Paul A. Nyhus, Swaminathan Sivakumar
  • Patent number: 9646879
    Abstract: A depression filling method for filling a depression of a workpiece including a semiconductor substrate and an insulating film formed on the semiconductor substrate includes: forming an impurity-doped first semiconductor layer along a wall surface which defines the depression; forming, on the first semiconductor layer, a second semiconductor layer which is lower in impurity concentration than the first semiconductor layer and which is smaller in thickness than the first semiconductor layer; annealing the workpiece to form an epitaxial region at the bottom of the depression corresponding to crystals of the semiconductor substrate from the first semiconductor layer and the second semiconductor layer; and etching the first amorphous semiconductor region and the second amorphous semiconductor region.
    Type: Grant
    Filed: December 24, 2014
    Date of Patent: May 9, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Akinobu Kakimoto, Youichirou Chiba, Takumi Yamada, Daisuke Suzuki
  • Patent number: 9646851
    Abstract: A reconstituted wafer includes a rigid mass with a flat surface and a base surface disposed parallel planar to the flat surface. A plurality of dice are embedded in the rigid mass. The plurality of dice include terminals that are exposed through coplanar with the flat surface. A process of forming the reconstituted wafer includes removing some of the rigid mass to expose the terminals, while retaining the plurality of dice in the rigid mass. A process of forming an apparatus includes separating one apparatus from the reconstituted wafer.
    Type: Grant
    Filed: March 15, 2016
    Date of Patent: May 9, 2017
    Assignee: Intel Corporation
    Inventors: Robert L. Sankman, John S. Guzek
  • Patent number: 9640565
    Abstract: The present disclosure provides a Gate driver On Array (GOA) unit, a method for manufacturing the GOA unit, a display substrate and a display device. The GOA unit includes a capacitor structure including: a first metal layer arranged on a substrate; an insulation layer arranged on the first metal layer, wherein the insulation layer is thinned out and has a first thickness, and the first thickness is less than a thickness of any other layer arranged on a same layer as the insulation layer in the display substrate; and a second metal layer arranged on the insulation layer.
    Type: Grant
    Filed: May 13, 2016
    Date of Patent: May 2, 2017
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Yunyun Tian, Hyunsic Choi
  • Patent number: 9627269
    Abstract: A method for forming transistors is provided. The method includes providing a substrate having a base and at least a fin on the base; and forming a gate layer on the fin, the gate layer has first side surfaces parallel to a longitudinal direction of the fin and second side surfaces perpendicular to the fin. The method also includes forming a protective layer on the first side surfaces of the gate layer to protect a vertex of the top of the gate layer from having EPI particles; and forming sidewall spacers on side surfaces of the protective layer and the second side surfaces of the gate layer. Further, the method includes forming a stress layer in the fin at both sides of the sidewall spacers and the gate layer.
    Type: Grant
    Filed: October 22, 2015
    Date of Patent: April 18, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventor: Jie Zhao
  • Patent number: 9614090
    Abstract: A semiconductor device includes at least one first gate structure and at least one second gate structure on a semiconductor substrate. The at least one first gate structure has a flat upper surface extending in a first direction and a first width in a second direction perpendicular to the first direction. The at least one second gate structure has a convex upper surface extending in the first direction and a second width in the second direction, the second width being greater than the first width.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: April 4, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ju-youn Kim, Sang-jung Kang, Ji-hwan An
  • Patent number: 9607863
    Abstract: Integrated circuit packages with cavity are disclosed. A disclosed integrated circuit package includes a first die. A second die may be coupled to the first die by attaching the first die to a top surface of the second die. A blocking element such as a barrier structure may be formed that surrounds the second die. A cavity may be formed between the blocking element and the first die that encloses the second die. The barrier structure may help prevent underfill material from entering the cavity during underfill deposition processes. A heat spreading lid may cover the first die, second die and package substrate.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: March 28, 2017
    Assignee: Altera Corporation
    Inventor: Myung June Lee
  • Patent number: 9564426
    Abstract: Performance of a semiconductor device is improved without increasing an area size of a semiconductor chip. For example, a source electrode of a power transistor and an upper electrode of a capacitor element have an overlapping portion. In other word, the upper electrode of the capacitor element is formed over the source electrode of the power transistor through a capacitor insulating film. That is, the power transistor and the capacitor element are arranged in a laminated manner in a thickness direction of the semiconductor chip. As a result, it becomes possible to add a capacitor element to be electrically coupled to the power transistor while suppressing an increase in planar size of the semiconductor chip.
    Type: Grant
    Filed: November 4, 2015
    Date of Patent: February 7, 2017
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Tohru Kawai, Yasutaka Nakashiba, Yutaka Akiyama
  • Patent number: 9559118
    Abstract: A vertical ferroelectric field effect transistor construction comprises an isolating core. A transition metal dichalcogenide material encircles the isolating core and has a lateral wall thickness of 1 monolayer to 7 monolayers. A ferroelectric gate dielectric material encircles the transition metal dichalcogenide material. Conductive gate material encircles the ferroelectric gate dielectric material. The transition metal dichalcogenide material extends elevationally inward and elevationally outward of the conductive gate material. A conductive contact is directly against a lateral outer sidewall of the transition metal dichalcogenide material that is a) elevationally inward of the conductive gate material, or b) elevationally outward of the conductive gate material. Additional embodiments are disclosed.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: January 31, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Chandra Mouli, Gurtej S. Sandhu
  • Patent number: 9524989
    Abstract: Embodiments of the present invention disclose an array substrate and a method of manufacturing the same, and a liquid crystal display screen.
    Type: Grant
    Filed: August 12, 2014
    Date of Patent: December 20, 2016
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., Hefei Xinsheng Optoelectronics Technology Co., Ltd.
    Inventors: Tong Yang, Guolei Wang
  • Patent number: 9520462
    Abstract: Semiconductor devices are described that include a capacitor integrated therein. In an implementation, the semiconductor devices include a substrate including a dopant material of a first conductivity type. A plurality of trenches are formed within the substrate. The semiconductor devices also include a diffusion region having dopant material of a second conductivity type formed proximate to the trenches. A capacitor is formed within the trenches and at least partially over the substrate. The capacitor includes at least a first electrode, a second electrode, and a dielectric material formed between the first and second electrodes.
    Type: Grant
    Filed: November 23, 2015
    Date of Patent: December 13, 2016
    Assignee: Maxim Integrated Products, Inc.
    Inventors: Khanh Tran, Joseph P. Ellul, Anuranjan Srivastava, Kiyoko Ikeuchi, Scott W. Barry
  • Patent number: 9515151
    Abstract: Methods of forming memory cells including a charge storage structure having a gettering agent therein can be useful for non-volatile memory devices. Providing for gettering of oxygen from a charge-storage material of the charge storage structure can facilitate a mitigation of detrimental oxidation of the charge-storage material.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: December 6, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Rhett Brewer, Durai V. Ramaswamy
  • Patent number: 9515095
    Abstract: The invention belongs to the field of display technology, and particularly provides an array substrate and a method for manufacturing the same, and a display device. The array substrate includes a base substrate, and a thin film transistor and at least one driving electrode provided on the base substrate, and the thin film transistor includes a gate, and a source and a drain provided in the same layer, wherein the gate, the source or the drain is formed with the same material as the at least one driving electrode, and thickness thereof is larger than that of the at least one driving electrode. Regarding the array substrate, the manufacturing procedure of the array substrate is effectively simplified, cost for mask plate and material is reduced, equipment investment is reduced, production cost is saved, productivity is improved, and competitiveness of the display device is increased, while the transmittance requirement is met.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: December 6, 2016
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Feng Zhang, Qi Yao, Zhiyong Liu
  • Patent number: 9515103
    Abstract: A method of forming an LTPS TFT substrate includes: Step 1: providing a substrate (1) and depositing a buffer layer (2); Step 2: depositing an a-Si layer (3); Step 3: depositing and patterning a silicon oxide layer (4); Step 4: taking the silicon oxide layer (4) as a photomask and annealing the a-Si layer (3) with excimer laser, so that the a-Si layer crystallizes and turns into a poly-Si layer; Step 5: forming a first poly-Si region (31) and a second poly-Si region (32); Step 6: defining a heavily N-doped area and a lightly N-doped area on the first and second poly-Si regions (31) and (32), and forming an LDD area; Step 7: depositing and patterning a gate insulating layer (5); Step 8: forming a first gate (61) and a second gate (62); Step 9: forming via holes (70); and Step 10: forming a first source/drain (81) and a second source/drain (82).
    Type: Grant
    Filed: February 9, 2015
    Date of Patent: December 6, 2016
    Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
    Inventor: Gaiping Lu
  • Patent number: 9502243
    Abstract: A method of forming a semiconductor device that includes providing a base semiconductor substrate having a first orientation crystal plane, and forming an epitaxial oxide layer on the base semiconductor substrate. The epitaxial oxide layer has the first orientation crystal plane. A first semiconductor layer having a second orientation crystal plane is then bonded to the epitaxial oxide layer. A portion of the first semiconductor layer is removed to expose a second surface of the epitaxial oxide layer. A remaining portion of the first semiconductor layer is present on the first surface of the epitaxial oxide layer; and epitaxially forming a second semiconductor layer on the second surface of the epitaxial oxide layer, wherein the second semiconductor layer has a first orientation crystal plane.
    Type: Grant
    Filed: December 22, 2014
    Date of Patent: November 22, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Bruce B. Doris, Pouya Hashemi, Ali Khakifirooz, Alexander Reznicek
  • Patent number: 9490230
    Abstract: Additive processes are employed for electrically insulating selected surface regions on a stack of die; and methods for electrically interconnecting die in a stack of die, include additive processes for electrically insulating selected surface regions of the die. Regions that are not insulated according to the invention are available for electrical connection using electrically conductive material applied in flowable form to make electrically conductive traces.
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: November 8, 2016
    Assignee: Invensas Corporation
    Inventor: Jeffrey S. Leal