Patents Examined by Aaron Staniszewski
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Patent number: 7936041Abstract: The structure for millimeter-wave frequency applications, includes a Schottky barrier diode (SBD) with a cutoff frequency (FC) above 1.0 THz formed on a SiGe BiCMOS wafer. A method is also contemplated for forming a Schottky barrier diode on a SiGe BiCMOS wafer, including forming a structure which provides a cutoff frequency (Fc) above about 1.0 THz. In embodiments, the structure which provides a cutoff frequency (Fc) above about 1.0 THz may include an anode having an anode area which provides a cutoff frequency (FC) above about 1.0 THz, an n-epitaxial layer having a thickness which provides a cutoff frequency (FC) above about 1.0 THz, a p-type guardring at an energy and dosage which provides a cutoff frequency (FC) above about 1.0 THz, the p-type guardring having a dimension which provides a cutoff frequency (FC) above about 1.0 THz, and a well tailor with an n-type dopant which provides a cutoff frequency (FC) above about 1.0 THz.Type: GrantFiled: September 12, 2007Date of Patent: May 3, 2011Assignee: International Business Machines CorporationInventors: Jeffrey B. Johnson, Xuefeng Liu, Bradley A. Orner, Robert M. Rassel
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Patent number: 7927973Abstract: In a semiconductor wafer including a plurality of imaginary-divided-regions which are partitioned by imaginary-dividing-lines that are respectively arranged in a grid-like arrangement on the semiconductor wafer and a circumferential line that is the outer periphery outline of the semiconductor wafer, a mask is placed so as to expose an entirety of surfaces of the wafer corresponding to respective removal-regions. The removal-regions are regions in approximately triangular form partitioned by the circumferential line of the wafer and the imaginary-dividing-lines. Then, plasma etching is performed on a mask placement-side surface of the wafer, by which the semiconductor wafer is divided into the individual semiconductor devices along dividing lines while portions corresponding to the removal-regions of the wafer are removed.Type: GrantFiled: October 4, 2005Date of Patent: April 19, 2011Assignee: Panasonic CorporationInventors: Hiroshi Haji, Kiyoshi Arita, Akira Nakagawa, Kazuhiro Noda
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Patent number: 7910415Abstract: A method of manufacturing a semiconductor device including a substrate; an insulating film formed thereon; a first semiconductor layer where strain is induced in the directions parallel to the surface of the substrate, the first semiconductor layer being on the insulating film; a source region and a drain region formed in the first semiconductor layer; and a gate layered body formed of a gate insulating film and a gate electrode on the first semiconductor layer is disclosed. The method includes the steps of (a) forming a second semiconductor layer by epitaxial growth on the first semiconductor layer; (b) heating the second semiconductor layer; and (c) removing the second semiconductor layer. The second semiconductor layer is different in lattice constant in an in-plane direction from the first semiconductor layer. Step (b) induces the strain in the first semiconductor layer by exposing the surface of the second semiconductor layer to energy lines.Type: GrantFiled: October 25, 2006Date of Patent: March 22, 2011Assignee: Fujitsu Semiconductor LimitedInventor: Yasuyoshi Mishima
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Patent number: 7897451Abstract: By selectively applying a stress memorization technique to N-channel transistors, a significant improvement of transistor performance may be achieved. High selectivity in applying the stress memorization approach may be accomplished by substantially maintaining the crystalline state of the P-channel transistors while annealing the N-channel transistors in the presence of an appropriate material layer which may not to be patterned prior to the anneal process, thereby avoiding additional lithography and masking steps.Type: GrantFiled: May 20, 2008Date of Patent: March 1, 2011Assignee: GLOBALFOUNDRIES Inc.Inventors: Maciej Wiatr, Casey Scott, Andreas Gehring, Peter Javorka, Andy Wei
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Patent number: 7875514Abstract: By selectively providing a buffer layer having an appropriate thickness, height differences occurring during the deposition of an SACVD silicon dioxide may be reduced during the formation of an interlayer dielectric stack of advanced semiconductor devices. The buffer material may be selectively provided after the deposition of contact etch stop layers of both types of internal stress or may be provided after the deposition of one type of dielectric material and may be used during the subsequent patterning of the other type of dielectric stop material as an efficient etch stop layer.Type: GrantFiled: July 22, 2010Date of Patent: January 25, 2011Assignee: Advanced Micro Devices, Inc.Inventors: Ralf Richter, Robert Seidel, Carsten Peters
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Patent number: 7871927Abstract: A method of electrically conductive via formation in a fully processed wafer involves defining at least one trench area on a backside of the fully processed wafer, forming at least one trench within the trench area to an overall depth that will allow for a via formed within the trench to be seeded over its full length, forming the via within the trench into the fully processed wafer to a predetermined depth, depositing a seed layer over the full length of the via, and plating the seed layer to fill the via with an electrically conductive metal.Type: GrantFiled: October 15, 2007Date of Patent: January 18, 2011Assignee: Cufer Asset Ltd. L.L.C.Inventor: John Trezza
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Patent number: 7863077Abstract: An image sensor and method of manufacturing the same are disclosed. A semiconductor substrate can be prepared comprising a photodiode region, a transistor region, and a floating diffusion region. A gate dielectric can be disposed under a surface of the semiconductor substrate in the transistor region. A first dielectric pattern can be provided having a portion above and a portion below the surface of the semiconductor substrate in the photodiode and the floating diffusion regions. A second dielectric can be disposed under the gate dielectric. The second dielectric can extend the depth of the gate dielectric into the semiconductor substrate to space the movement path of photoelectrons from the photodiode region to the floating diffusion region.Type: GrantFiled: September 17, 2008Date of Patent: January 4, 2011Assignee: Dongbu Hitek Co., Ltd.Inventor: Dong Bin Park
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Patent number: 7851263Abstract: A method of manufacturing a semiconductor device including (1) providing a metal plate having an upper surface and a back surface, the metal plate including a plurality of lids disposed in matrix, which are defined by a first groove formed from the upper surface, (2) providing a ceramic sheet having an upper surface and a back surface, the ceramic sheet including a plurality of headers disposed in matrix, which are defined by a second groove formed from the back surface, (3) fixing the metal plate on the ceramic sheet by facing the back surface of the metal plate to the upper surface of the ceramic sheet, wherein the first groove is aligned with the second groove, and (4) dividing the metal plate and the ceramic sheet along the first and the second grooves.Type: GrantFiled: December 27, 2007Date of Patent: December 14, 2010Assignee: Oki Semiconductor Co., Ltd.Inventor: Kenji Fuchinoue
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Patent number: 7842552Abstract: A structure and a method for forming the same. The structure includes (i) a carrier substrate which includes substrate pads, (ii) a chip physically attached to the carrier substrate, and (iii) a first frame physically attached to the carrier substrate. A CTE (coefficient of thermal expansion) of the first frame is substantially lower than a CTE of the carrier substrate.Type: GrantFiled: October 12, 2007Date of Patent: November 30, 2010Assignee: International Business Machines CorporationInventors: John Peter Karidis, Mark Delorman Schultz
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Patent number: 7820475Abstract: In one embodiment, active diffusion junctions of a solar cell are formed by diffusing dopants from dopant sources selectively deposited on the back side of a wafer. The dopant sources may be selectively deposited using a printing method, for example. Multiple dopant sources may be employed to form active diffusion regions of varying doping levels. For example, three or four active diffusion regions may be fabricated to optimize the silicon/dielectric, silicon/metal, or both interfaces of a solar cell. The front side of the wafer may be textured prior to forming the dopant sources using a texturing process that minimizes removal of wafer material. Openings to allow metal gridlines to be connected to the active diffusion junctions may be formed using a self-aligned contact opening etch process to minimize the effects of misalignments.Type: GrantFiled: December 20, 2006Date of Patent: October 26, 2010Assignee: Sunpower CorporationInventors: Denis De Ceuster, Peter John Cousins, Richard M. Swanson, Jane E. Manning
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Patent number: 7807518Abstract: The present invention provides a semiconductor memory device having a capacitor electrode of a MOS capacitor formed in polygon and slanting faces enlarged toward an insulating film are provided therearound. A floating gate electrode is provided which extends from over a channel region of a MOSEFT to over corners of ends on the MOSFET side, of the capacitor electrode and which is opposite to the channel region and the capacitor electrode with a gate insulating film interposed therebetween.Type: GrantFiled: April 18, 2008Date of Patent: October 5, 2010Assignee: Oki Semiconductor Co., Ltd.Inventor: Tomohiko Tatsumi
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Patent number: 7807510Abstract: There are provided the steps of connecting a chip component 13 to a first substrate 10 through a wire 14, providing an electrode 21 on a second substrate 20, attaching, to the first substrate 10, a molding tool 30 having a protruded portion 31 formed corresponding to an array of a bump connecting pad 12 of the first substrate 10 and a cavity 32 formed corresponding to a region in which the chip component 13 is mounted, thereby forming a first sealing resin 34 for sealing the chip component 13 and the wire 14, bonding the electrode 21 to the bump connecting pad 12 through a solder, thereby bonding the first substrate 10 to the second substrate 20, and filling a second filling resin 40 in a clearance portion between the first substrate 10 and the second substrate 20.Type: GrantFiled: May 20, 2008Date of Patent: October 5, 2010Assignee: Shinko Electric Industries Co., Ltd.Inventor: Toshio Kobayashi
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Patent number: 7804149Abstract: The present invention provides methods of forming metal oxide semiconductor nanostructures and, in particular, zinc oxide (ZnO) semiconductor nanostructures, possessing high surface area, plant-like morphologies on a variety of substrates. Optoelectronic devices, such as photovoltaic cells, incorporating the nanostructures are also provided.Type: GrantFiled: April 2, 2007Date of Patent: September 28, 2010Assignee: The University of Utah Research FoundationInventors: Ashutosh Tiwari, Michael R. Snure
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Patent number: 7785956Abstract: By selectively providing a buffer layer having an appropriate thickness, height differences occurring during the deposition of an SACVD silicon dioxide may be reduced during the formation of an interlayer dielectric stack of advanced semiconductor devices. The buffer material may be selectively provided after the deposition of contact etch stop layers of both types of internal stress or may be provided after the deposition of one type of dielectric material and may be used during the subsequent patterning of the other type of dielectric stop material as an efficient etch stop layer.Type: GrantFiled: July 7, 2008Date of Patent: August 31, 2010Assignee: Advanced Micro Devices, Inc.Inventors: Ralf Richter, Robert Seidel, Carsten Peters
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Patent number: 7781859Abstract: An integrated circuit structure includes a semiconductor substrate; a well region of a first conductivity type over the semiconductor substrate; a metal-containing layer on the well region, wherein the metal-containing layer and the well region form a Schottky barrier; an isolation region encircling the metal-containing layer; and a deep-well region of a second conductivity type opposite the first conductivity type under the metal-containing layer. The deep-well region has at least a portion vertically overlapping a portion of the metal-containing layer. The deep-well region is vertically spaced apart from the isolation region and the metal-containing layer by the well region.Type: GrantFiled: March 24, 2008Date of Patent: August 24, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Puo-Yu Chiang, Tsai Chun Lin, Chih-Wen (Albert) Yao, David Ho
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Patent number: 7763907Abstract: A semiconductor light emitting element includes: an {0001} n-type semiconductor substrate formed of a III-V semiconductor, which is in a range of 0° to 45° in inclination angle into a <1-100> direction, and which is in a range of 0° to 10° in inclination angle into a <11-20> direction; an n-type layer formed of a III-V semiconductor on the n-type semiconductor substrate; an n-type guide layer formed of a III-V semiconductor above the n-type layer; an active layer formed of a III-V semiconductor above the n-type guide layer; a p-type first guide layer formed of a III-V semiconductor above the active layer; a p-type contact layer formed of a III-V semiconductor above the p-type first guide layer; and an concavo-convex layer formed of a III-V semiconductor between the p-type first guide layer and the p-type contact layer.Type: GrantFiled: September 5, 2007Date of Patent: July 27, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Koichi Tachibana, Hajime Nago, Shinji Saito, Shinya Nunoue, Genichi Hatakoshi
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Patent number: 7727832Abstract: It is made possible to provide a method for manufacturing a semiconductor device that includes CMISs each having a low threshold voltage Vth and a Ni-FUSI/SiON or high-k gate insulating film structure. The method comprises: forming a p-type semiconductor region and an n-type semiconductor region insulated from each other in a substrate; forming a first and second gate insulating films on the p-type and n-type semiconductor regions, respectively; forming a first nickel silicide having a composition of Ni/Si<31/12 above the first gate insulating film, and a second nickel silicide having a composition of Ni/Si?31/12 on the second gate insulating film; and segregating aluminum at an interface between the first nickel silicide and the first gate insulating film by diffusing aluminum through the first nickel silicide.Type: GrantFiled: October 11, 2007Date of Patent: June 1, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Masato Koyama, Yoshinori Tsuchiya, Seiji Inumiya
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Patent number: 7700935Abstract: A non-volatile memory device and a method of fabricating the same are provided. In the non-volatile memory device, at least one first semiconductor layer of a first conductivity type may be formed spaced apart from each other on a portion of a substrate. A plurality of first resistance variation storage layers may contact first sidewalls of each of the at least one first semiconductor layer. A plurality of second semiconductor layers of a second conductivity type, opposite to the first conductivity type, may be interposed between the first sidewalls of each of the at least one first semiconductor layer and the plurality of first resistance variation storage layers. A plurality of bit line electrodes may be connected to each of the plurality of first resistance variation storage layers.Type: GrantFiled: August 3, 2007Date of Patent: April 20, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Won-joo Kim, Suk-pil Kim, Yoon-dong Park, June-mo Koo
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Patent number: 7642141Abstract: A manufacturing method for a display device having a first conductive type thin film transistor and a second conductive type thin film transistor, comprising the steps of: in formation regions for a first conductive type thin film transistor and a second conductive type thin film transistor forming a semiconductor layer, a first insulating film covering the semiconductor layer and a gate electrode disposed on the first insulating film so as to intersect the semiconductor layer, on substrate having first conductive type impurity regions on both outer sides of a channel region of the semiconductor layer below the gate electrode forming a second insulating film, in the second insulating film and the first insulating film forming a contact hole for a drain electrode and a source electrode, in the formation region for the second conductive type thin film transistor forming electrodes and a second conductive type impurity region.Type: GrantFiled: May 30, 2008Date of Patent: January 5, 2010Assignee: Hitachi Displays, Ltd.Inventors: Yoshiaki Toyota, Takeshi Sato