Abstract: Systems and methods for inspecting or characterizing samples, such as by characterizing patterned features or structures of the sample. In an aspect, the technology relates to a method for characterizing a patterned structure of a sample. The method includes directing a pump beam to a first position on a surface of the sample to induce a surface acoustic wave in the sample and directing a probe beam to a second position on the sample, where the probe beam is affected by the surface acoustic wave when the probe beam reflects from the surface of the sample. The method also includes detecting the reflected probe beam, analyzing the detected reflected probe beam to identify a frequency mode in the reflected probe beam, and based on the identified frequency mode, determining at least one of a width or a pitch of a patterned feature in the sample.

Abstract: A method comprising: generating a pulsed laser beam comprised of non-interfering pulse-pairs having a phase difference, wherein the phase difference changes between each two consecutive cycles of the pulse-pairs; directing the pulsed laser beam at one or more optical resonators, wherein each of the one or more optical resonators is impinged by acoustic waves, to cause the pulsed laser beam to propagate through each of the one or more optical resonators, thereby interfering the pulse-pairs; and calculating shifts in a spectral response of each of the one or more optical resonators based on measuring the interference, wherein the shifts are indicative of a waveform of the acoustic waves.

Abstract: Disclosed is a multi-axis atom interferometer system, including a source of cold atoms, a laser source generating a first light pulse configured in such a way as to spatially split the source of cold atoms into a first cloud of atoms propagating along a first trajectory along a first axis and a second cloud of atoms propagating along a second trajectory along a second axis, a second light pulse adapted to spatially deflect the first trajectory along the second axis and simultaneously the second trajectory along the first axis towards a first point and a last light pulse adapted to recombine the at least one part of the first cloud of atoms and the at least one part of the second cloud of atoms at the first point, and a detection system measuring an interferometric phase-shift accumulated between the first light pulse and the last light pulse.

Abstract: A swept-source optical coherence tomography (SS-OCT) apparatus includes a plurality of wavelength-tunable light sources. The SS-OCT apparatus includes a first optical coupler configured to receive an output from each of the plurality of wavelength-tunable light sources. The optical coupler is configured to split the received output from the plurality of wavelength-tunable light sources into a reference optical path and a sample optical path. The sample optical path is configured to illuminate a sample. The SS-OCT apparatus includes a second optical coupler configured to receive return optical signals from the reference optical path and the sample optical path, and to output an optical interference signal. The SS-OCT apparatus includes a detector configured to detect the optical interference signal; and a controller configured to receive an electrical signal based on the detected optical interference signal. The controller is configured to generate a depth profile of the sample using compressed sensing.