Abstract: Embodiments of the invention provide methods and apparatuses for efficient and cost-effective imaging of alignment marks. For one embodiment, alignment mark imaging is accomplished separately from, and independent of product imaging through use of a relatively low cost, low resolution, imaging tool. For one embodiment a wafer is exposed to low-resolution light source through a reticle having a number of alignment patterns corresponding to desired alignment marks. For one embodiment, global alignment marks are imaged on a backside of a wafer. Various embodiments of the invention obviate the need for a highly accurate stage and a high-resolution imaging device, and therefore reduce processing costs and processing time.

Abstract: An exposure apparatus includes a projection optical system for projecting a pattern of a reticle onto an object to be exposed, via a liquid that is filled in a space between said projection optical system and the object, and a removing part for removing an air bubble and/or a foreign particle mixed in the liquid by forming a predetermined flow velocity distribution in the liquid.

Abstract: According to one embodiment, a method of calibrating level sensors of at least two lithographic projection apparatus to correct machine to machine level sensor process dependency includes using a first lithographic projection apparatus to measure a first set of leveling data for a reference substrate and a second set of leveling data for a substrate processed according to a selected process, and using a second lithographic projection apparatus to measure a third set of leveling data for the reference substrate and a fourth set of leveling data for the processed substrate. The method also includes calculating, based on the first, second, third and fourth sets of leveling data, a set of level sensor parameters corresponding to machine to machine level sensor differences for the selected process, wherein the machine to machine level sensor differences are measured and stored as intrafield values.

Abstract: An image display projector includes a lens element for focusing a light beam from a lamp light source, a reflecting mirror for reflecting a light beam emitted from the lens element, an elliptical mirror for reflecting a light beam emitted from the reflecting mirror, a light valve for modulating a light beam reflected by the elliptical mirror, thereby forming an image light, and a projection lens for projecting the image light onto a screen. In this image display projector, a light focusing point, where the light beam emitted from the lens element is focused, is symmetric to one of the two focal points of the elliptical mirror with respect to the reflecting mirror, and the center of an entry pupil of the projection lens is symmetric to the second focal point of the elliptical mirror with respect to the light valve.

Abstract: The present invention relates to a barrier member slidably movable along the surface of a camera to a closing position for covering a lens barrel of a camera body and to an opening position for letting the lens barrel be exposed. The camera includes a pressing member for pressing the barrier member from the side of the camera body, and regulating the slide movement of the barrier member in the closing and opening positions. In the camera of the present invention, the barrier member is provided with a guide member abutting on the pressing member at a plurality of points with the center of the pressing member being interposed therebetween in a direction along the surface of the camera and in a direction orthogonal to a slide moving direction of the barrier member, thereby eliminating a backlash of the barrier member.

Abstract: Light from a pattern of a mask 3 travels through a first imaging optical system K1 to form a primary image I of the mask pattern. Light from the primary image I travels through a center aperture of a main mirror M1 and a lens component L2 to be reflected by a sub-mirror M2, and the light reflected by the sub-mirror M2 travels through the lens component L2 to be reflected by the main mirror M1. The light reflected by the main mirror M1 travels through the lens component L2 and a center aperture of the sub-mirror M2 to form a secondary image of the mask pattern at a reduction ratio on a surface of wafer 9.

Abstract: A system for recording and reproducing a color image of a scene includes an image recording apparatus including a body portion for containing components of the apparatus and for housing a roll of black and white silver halide emulsion film. The body portion includes a focal lens for focusing scene illumination to expose the film with the scene image. A color filter disposed in the body portion filters the scene illumination. The filter includes a color filter array having a plurality of adjacent pixel arrays, whereby the scene illumination is pixelated on the black and white film for each array as units of luminance and chrominance information.

Abstract: A lens-fitted photo film unit incorporates a mechanism for taking an exposure, and is pre-loaded with unexposed photo film. A telephoto selectable type indicia is imprinted previously on a first edge of the photo film outside imaging frames in an optical manner. An indicia recorder imprints a magnification indicia on a second edge of the photo film outside the imaging frames in an optical manner each time that one exposure is taken. A combination of the telephoto selectable type indicia and the magnification indicia designates a printing condition for each of the imaging frames.

Abstract: A system and method for transferring and buffering sheets of media between first and second components of an imagesetting system operates by: rotating a transfer buffer having at least two storage devices, to align a first storage device with the first component while concurrently aligning a second storage device with the second component; transferring a first sheet of said media from the first component to the first storage device; rotating the transfer buffer to align the first storage device with the second component while concurrently aligning the second storage device with the first component; and transferring the first sheet of said media from the first storage device to the second component while simultaneously transferring a second sheet of said media from the first component to the second storage device.

Abstract: A first transfer device and a second transfer device, each for transferring a wafer, are arranged opposite each other, and a cooling processing unit group is arranged between the first transfer device and the second transfer device. A first thermal processing unit group and a second thermal processing unit group are arranged on both sides of the first transfer device, and a first solution processing unit group and a second solution processing unit are arranged on both sides of the second transfer device. The first transfer device transfers the wafer between the cooling processing unit group, and units included in the first thermal processing unit group and the second thermal processing unit group, and the second transfer device transfers the wafer between the cooling processing unit group, and units included in the first solution processing unit group and the second solution processing unit group.

Abstract: This invention is directed to a method of processing at least one digital image of at least one photographic image and distributing at least one visual print produced from the at least one digital image. The method includes the steps of storing at least one digital image of at least one photographic image on at least one image server at a first location. Selective authorized access to the at least one digital image of the at least one photographic image from a second location is then facilitated. Orders are received for at least one visual print of the at least one photographic image from the second location. Based upon the orders at least one visual image is produced from the stored digital image at the first location in response to the at least one order.

Abstract: A rolling loop motion picture projector is convertible for projecting images either from a 2-D film strip or from a 3-D film strip. The film is advanced through the same incremental amount irrespective of whether a 2-D film of a 3-D film is being projected. The projector has a single central aperture for projecting 2-D images and respective 3-D images on opposite sides of the central aperture. The images on the 3-D film strip are anamorphically compressed in the direction of film travel by a factor of two and the 3-D apertures are correspondingly sized. Projection lenses associated with the 3-D apertures decompress the images so that images of comparable size appear on the screen irrespective of whether a 2-D film or a 3-D film is being shown.

Abstract: Photographic sheet material is processed using a processing cell through which the sheet material passes. Process liquid is fed from a collapsible storage container to the cell and returned from the cell to the container. The returning liquid is caused to enter the container as a jet stream. A cap assembly for the container comprises a body releasably connected to an upwardly facing mouth of the container. Inlet and outlet passages pass through the body and the inlet passage opening into the container is provided with a cross-sectional area smaller than that of the outlet passage to enable the jet stream to be achieved. Mixing of the returning process liquid in the container in a simple and economical manner is possible without compromising the ability of the container to collapse.

Abstract: A processor for use in processing sheets of photosensitive material has a plurality of processing stations. A plurality of drive rollers define a sheet processing path through the processing stations and are driven to transport a sheet of photosensitive material along that path. The drive rollers at the processing station at the end of the path are driven at a faster rate of rotation than the drive rollers at previous processing stations along the path. The drive rollers of those previous processing stations, however, are mounted to permit said rollers to overrun their driven slower rate of rotation and permit those rollers to rotate at the faster rate of rotation.

Abstract: An illumination optical apparatus for illuminating an object to be illuminated in an arcuate or rectangular shape. A first optical integrator forms a plurality of light source images in a substantially linear arrangement, based on a beam of parallel rays. Then a second optical integrator forms a plurality of light source images in a substantially square arrangement, based on the beam from the first optical integrator. A relay optical system is disposed between the first and second optical integrator, and makes a position of the light source images formed by the first optical cintegrator conjugate with a position of the light source images formed by the second optical integrator.