Patents Examined by Aliciia M Harrington
  • Optical element module with minimized parasitic loads
    Patent number: 10215948
    Abstract: An optical element module includes an optical element unit and a support structure. The optical element module includes an optical element. The support structure includes a support device and a contact device connected to the support device. A surface of the contact device contacts a surface of the optical element unit and exerts a holding force on the optical element unit along a holding force direction.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: February 26, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jens Kugler, Ulrich Weber, Dirk Schaffer