Abstract: An object of the present invention is to provide a method of evaluating current-driven conductive material in which a capability of wiring material to withstand electro-migration and that to withstand stress migration can be evaluated independently.In the method according to the present invention wherein reliability of wiring is evaluated with a shorter period of time by repeating an operating cycle comprising the steps of flowing a first current to measure a resistance value, flowing a second current having a larger current value than the first current for a specified period of time to generate changes in the physical properties, and then flowing the first current to measure a resistance value of the wiring, the wiring's capability to withstand electro-migration is measured by making a time for flowing the second current fully smaller than a time for flowing the first current to control temperature rise when the second current is flown to 50.degree. C. or below.

Abstract: The present invention allows to automatically presume a defect location of an IC using an EB tester. Under each of the conditions where a normal power supply voltage and an abnormal power supply voltage are applied to an IC respectively, test patterns are applied to the IC until the pattern address where the first defect is detected by an IC tester. At this point in time, the pattern update is stopped. Then a potential contrast image data is acquired from one of the partitioned segments of the IC surface for each of the above power supply conditions. A diffrence image data between the two potential contrast image data (normal power case and abnormal power case) is generated. This difference image data generation is repeated several times and those defference image data are summed up. A check is made to see if there is a changed portion greater than a predetermined value in each of the segments and if there is, a defect information is stored in a storage portion corresponding to the defect segment.

Abstract: An apparatus for testing individual ones of semiconductor laser devices of a laser bar during a manufacturing thereof comprises a laser bar chuck for securing the laser bar in a first manner and orientation. A probe is used for probing a laser device of the laser bar. A translational manipulator receives the laser bar chuck and the probe in a second and third manner and orientation, respectively, the manipulator further for translationally positioning the laser bar chuck and the probe independently in a fourth and fifth controlled manner. An energizing means energizes the probe in a sixth controlled manner. A detector detects a lasing of a probed laser device and provides a characteristic output signal representative of a testing characteristic of the probed laser device.