Abstract: A system and a method for detecting abnormality of a thin-film deposition process are provided. In the method, a thin-film is deposited on a substrate in a thin-film deposition chamber by using a target, a dimension of a collimator mounted between the target and the substrate is scanned by using at least one sensor disposed in the thin-film deposition chamber to derive an erosion profile of the target, and abnormality of the thin-film deposition process is detected by analyzing the erosion profile with an analysis model trained with data of a plurality of erosion profiles derived under a plurality of deposition conditions.

Abstract: A system for coating of a donor material onto a laser radiation transparent substrate, the system including a donor material applicator, applying donor material to the laser radiation transparent substrate, a multi-pass precise donor material thickness determiner for providing a desired thickness of the donor material on the laser radiation transparent substrate and including a linearly displaceable blade support, a layer thickness uniformizing blade lockably pivotably mounted onto the linearly displaceable blade support about a pivot axis, the blade having a straight edge and a blade position maintainer operative for maintaining the straight edge at a desired separation distance from the laser radiation transparent substrate, the separation distance being uniform along the straight edge of the layer thickness uniformizing blade.

Abstract: A continuous coating line includes a snout assembly exposed to molten metal. The snout assembly includes a snout tip positioned about a steel strip that is immersible in the molten metal to provide a seal around the steel strip during entry into the molten metal. The snout tip includes a refractory material that is resistant to wear, abrasion, and corrosion when the snout tip is exposed to the molten metal.

Abstract: A substrate processing apparatus capable of minimizing the effect of a filling gas in a lower space on the processing of a substrate includes: a substrate supporting unit; at least one ring surrounding the substrate supporting unit; a processing unit on the substrate supporting unit; and an exhaust unit connected to a reaction space between the substrate supporting unit and the processing unit, wherein a first gas in the reaction space is transmitted to the exhaust unit through a first channel, a second gas in a lower space below the substrate supporting unit is transmitted to the exhaust unit through a second channel, and the first channel and the second channel are separated by the at least one ring.

Abstract: An apparatus and method for treating a substrate are provided. The apparatus includes at least one first process chamber configured to supply a developer onto the substrate; at least one second process chamber configured to treat the substrate using a supercritical fluid; a transfer chamber configured to transfer the substrate from the at least one first process chamber to the at least one second process chamber, while the developer supplied in the at least one first process chamber remains on the substrate; and a temperature and humidity control system configured to manage temperature and humidity of the transfer chamber by supplying a first gas of constant temperature and humidity into the transfer chamber.

Abstract: A central tubular defines a central flow passage and spray nozzles along an outer circumference of the central tubular. A first brush pig supports a first end of the central tubular. A second brush pig supports a second end of the tubular. An inflatable balloon is at the second end of the tubular. The inflatable balloon is encircled by the second brush pig. The inflatable balloon is configured to cause a first pressure drop across the balloon when in an inflated state and cause a second pressure drop, less than the first pressure drop, across the balloon when in a deflated state. A flow control system is at the first end of the tubular and is configured to regulate fluid exchange with the tubular and fluid exchange with the inflatable balloon.

Abstract: An atomizer having an atomizer head configured to atomize a first fluid. The atomizer includes, in addition, a measurement module including at least one sensor configured to measure the values of at least one parameter of the atomizer, an electronic control module configured to receive the measured values, and a power supply configured to electrically supply the control module with a power supply voltage.

Abstract: A vapor deposition reactor apparatus, systems and methods for deposition of thin films, particularly high-temperature superconducting (HTS) coated conductors, utilize multi-sided susceptors and susceptor pairs for increased production throughput. The reactors may also be configured in multi-stack arrangements of the susceptors within a single reactor chamber for additional throughput gains.

Abstract: A flame coating machine for coating field joints of a pipeline has a flame spray system having two flame spray units configured for heating and/or coating with a thermoplastic polymer an annular junction portion and two annular end portions of an existing coating delimiting the annular junction portion; a control system having two temperature sensors configured for acquiring temperature values along the surface collectively defined by the annular junction portion and the annular end portions, and a control unit configured for actuating the flame spray unit in a polymer flame spraying mode or in a flame heating mode as a function of the detected temperature values and at least one threshold value.

Abstract: A continuous coating line includes a snout assembly exposed to molten metal. The snout assembly includes a snout tip positioned about a steel strip that is immersible in the molten metal to provide a seal around the steel strip during entry into the molten metal. The snout tip includes a refractory material that is resistant to wear, abrasion, and corrosion when the snout tip is exposed to the molten metal.

Abstract: The disclosure concerns a coating device and a corresponding coating process for coating components, in particular motor vehicle body components, with a coating agent (e.g. paint), with a coating robot with a first printhead which is mounted on the coating robot. The disclosure provides that the first printhead is exchangeably mounted on the coating robot and can be exchanged for a second printhead during a color change. Another variant of the disclosure, on the other hand, provides for a second printhead to be mounted on the coating robot in addition to the first printhead, the two printheads each applying a specific coating agent in order to enable a color change without changing the printhead.

Abstract: A method of controlling application of at least one material onto a substrate includes configuring a material applicator having an array plate with an applicator array. The applicator array has a plurality of micro-applicators with a first subset of micro-applicators and a second subset of micro-applicators. Each of the plurality of micro-applicators has a plurality of apertures through which fluid is ejected. The first subset of micro-applicators and the second subset of micro-applicators are individually addressable, and a liquid flows through the first subset of micro-applicators and a shaping gas, e.g., air, flows through the second subset of micro-applicators. The flow of shaping gas shapes the flow of the liquid from the first subset of micro-applicators to the substrate.

Abstract: Embodiments relate to surface treating a substrate, spraying precursor onto the substrate using supercritical carrier fluid, and post-treating the substrate sprayed with the precursor to form a layer with nanometer thickness of material on the substrate. A spraying assembly for spraying the precursor includes one or more spraying modules and one or more radical injectors at one or more sides of the spraying module. A differential spread mechanism is provided between the spraying module and the radical injectors to inject spread gas that isolates the sprayed precursor and radicals generated by the radical injectors. As relative movement between the substrate and the spraying assembly is made, portions of the substrate is exposed to first radicals, sprayed with precursors either one of the spraying modules or both spraying modules using supercritical carrier fluid, and then exposed to second radicals again.

Abstract: A deposition mask includes: a first surface and a second surface, in which a plurality of through-holes are formed; a pair of long side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a longitudinal direction of the deposition mask; and a pair of short side surfaces connected to the first and second surfaces, and defining a profile of the deposition mask in a width direction of the deposition mask. The long side surface includes a first portion that is recessed inside and includes a first end portion positioned along the first surface, and a second end portion positioned along the second surface and positioned inside the first end portion. The through-hole includes a first recess formed on the first surface, and a second recess formed on the second surface and connected to the first recess through a hole connection portion.

Abstract: A liquid treatment apparatus includes: a substrate holder for holding a substrate; a discharge nozzle for discharging a treatment liquid onto the substrate; a liquid supply pipe for supplying the treatment liquid from a treatment liquid storage source to the discharge nozzle; a gas pipe that encompasses the liquid supply pipe and through which an inert gas for adjusting the temperature of the treatment liquid flows in a space between the gas pipe and the liquid supply pipe; a processing container in which the substrate holder, the discharge nozzle, the liquid supply pipe, and the gas pipe are provided; and an atmosphere gas supply part for supplying an atmosphere gas into the processing container. The gas pipe is provided so that an extension portion between an upstream end inside the processing container and an encompassing portion is folded back inside the processing container in a plan view.

Abstract: A coating device for applying a coating agent to the surface of a workpiece. The coating device includes a frame with a workpiece receptacle, a coating agent source and a rotary unit which is rotatable in relation to the frame. The rotary unit has a pump and a plurality of spray units, with the pump on the suction side being connected to the coating agent source by a fluid-conducting rotary joint connection. The rotary unit has a pneumatic valve device, and the spray units have in each case one compressed air controlled valve for controlling the delivery of coating agent. The inlet side of the valve is connected to the compressed air source by a fluid-conducting rotary feedthrough, which simplifies the overall construction of the coating device by providing a pneumatic connection between the compressed air source and the rotary unit that is independent of the rotation angle.

Abstract: According to one embodiment, a system for manufacturing a fully impregnated thermoplastic prepreg includes a mechanism for moving a fabric or mat and a drying mechanism that removes residual moisture from at least one surface of the fabric or mat. The system also includes a resin application mechanism that applies a reactive resin to the fabric or mat and a press mechanism that presses the coated fabric or mat to ensure that the resin fully saturates the fabric or mat. The system further includes a curing oven through which the coated fabric or mat is moved to polymerize the resin and thereby form a thermoplastic polymer so that upon exiting the oven, the fabric or mat is fully impregnated with the thermoplastic polymer. During at least a portion of the process, humidity in the vicinity of the coated fabric or mat is maintained at substantially zero.

Abstract: The electrospray device comprises a sprayer comprising a sprayer body and nozzle, and a partition positioned vertically and coaxially with the sprayer. The sprayer body is provided with a swirl generator for generating a swirling air stream, and a power supply connected between the nozzle and the partition, to apply voltage to the nozzle and the partition. The electrospray device may be part of a fluidized bed apparatus comprising a product container, a lower plenum base, an air distribution plate resided therebetween. When the power supply applies voltage in opposite polarities to the nozzle and the partition, the fluidized bed apparatus is used for coating particles; and when the power supply applies voltage of the same, the fluidized bed apparatus is used for spray-drying a solution. The electrospray device uses an electromagnetic hydrodynamic method to improve the performance of the fluidized bed apparatus and optimize the process of product.

Abstract: Described herein is a technique capable of adjusting an inner pressure of a process chamber into a high vacuum state in a short time. According to one aspect of the technique, there is provided a substrate processing apparatus including: a process chamber; a main exhaust line including a first pipe, a first opening degree adjusting valve, an opening/closing valve and a pressure sensor; a bypass exhaust line including a second pipe and a second opening degree adjusting valve; and a controller configured to adjust an inner pressure of the process chamber by: (a) adjusting an opening degree of the second opening degree adjusting valve; (b) closing the second opening degree adjusting valve and opening the opening/closing valve and the first opening degree adjusting valve; and (c) closing the opening/closing valve and the first opening degree adjusting valve and adjusting the opening degree of the second opening degree adjusting valve.

Abstract: A system for applying a first, a second, and a third coating composition. The system includes a first high transfer efficiency applicator defining a first nozzle orifice. The system further includes a second high transfer efficiency applicator defining a second nozzle orifice. The system further includes a third high transfer efficiency applicator defining a third nozzle orifice. The system further includes a substrate defining a target area. The first, the second, and the third high transfer efficiency applicators are configured to expel the first coating composition through the first nozzle orifice to the target area of the substrate, through the second nozzle orifice to the target area of the substrate, and through the third nozzle orifice to the target area of the substrate.