Abstract: Process for the observation of at least one sample region with a light raster microscope by a relative movement between the illumination light and sample via first scanning means along at least one scanning axis essentially perpendicular to the illumination axis wherein the illumination light illuminates the sample in parallel at several points or regions and several points or regions are detected simultaneously wherein at an angle to the plane of the relative movement, preferably perpendicular thereto, second scanning means are moved and an image acquisition takes place by the movement of the first and second scanning means being coupled and a three-dimensional sampling movement being done by the illumination of the sample wherein the second scanning means are coupled to the movement of the first scanning means in such a manner that straight and/or curved lines and/or plane and/or curved surfaces are scanned which are extended along at least one scanning direction of the first scanning means as well as along

Abstract: The invention relates to a photodetectors array that will be hybridized on a readout circuit (30) and realized from a wafer of semiconducting material (11). The wafer is divided into pixels (12), each pixel forming a photodetector, the pixels being separated from each other by separation means formed in the wafer and comprising a photogrid for photodetectors, each photodetector having a connection pad (18) to hybridize the photodetectors array to the readout circuit.

Abstract: A detection device for an optical configuration, in particular for a confocal microscope, with a detector, a pinhole aperture 2 arranged before the detector in a beam path 1 of the detection light, and a lens 3 for focusing the detection light on the pinhole aperture 2 arranged before the pinhole aperture 2, is implemented with regard to high resolution and detection efficiency even in the presence of varying wavelengths such that a means 4 for wavelength-dependent illumination of the lens 3 is arranged before the lens 3 in the beam path 1. Furthermore, a wavelength-dependent beam expander 6 as well as a confocal microscope with such a detection device are disclosed.

Abstract: An indicating instrument including a light guiding system having at least a first and second light guides, a sensor disposed at a first end of the first light guide and configured to receive incident ambient light that has traveled through the first light guide, a light-emitting device disposed at a first end of the second light guide and configured to emit light through the second light guide, and a covering body disposed at a second end of the first and second light guides that is opposite to the first ends. Further, the incident ambient light is incident upon the covering body and travels through the first light guide and is received by the sensor, and the light emitted by the light-emitting unit travels through the second light guide and exits the covering body.

Abstract: An optical sensor circuit comprises an optical sensor adapted to sense a position of a component in a semiconductor manufacturing apparatus according to the presence or absence of a flag and output a signal indicative of the position. A position sensing driver receives the signal via a path selected by a plurality of switches and then drives an output signal in response to the signal. The path selected by the plurality of switches causes the optical sensor circuit to act as either a close-type optical sensor circuit or an open-type optical sensor circuit.

Abstract: A light scattering photometer signal-enhancement systems includes an adaptive sample and subtract circuit controlled by a computer or microcontroller (MCU). The MCU controls the gain of a programmable-gain amplifier (PGA) cascade that is used to amplify the raw photometer signal. In order to maintain the DC accuracy, the DC offset contained in the raw signal from the photometer is estimated by an algorithmic within the MCU and then subtracted from the raw signal before allowing it to be amplified by the PGA cascade. In addition to DC estimation and adaptive cancellation, the MCU applies a digital filtering scheme to compensate irrelevant frequency bands in the amplified signal and offers user determined averaging functions for additional signal conditioning. Moreover, hardware filters are used to prevent signal aliasing by the analog to digital converters (ADC) and a 60 Hz notch filter suppresses general electrical noise.

Abstract: Microelectronic imagers and methods of packaging microelectronic imagers are disclosed herein. In one embodiment, a microelectronic imager can include a microelectronic die, an image sensor, an integrated circuit electrically coupled to the image sensor, and a plurality of terminals electrically coupled to the integrated circuit. The microelectronic imager can further include a single unitary member cover unit having a window and a side member projecting from the window. The side member is attached to the die. A plurality of electrically conductive interconnects can extend through the microelectronic die and/or the cover unit and are electrically coupled to corresponding terminals. The microelectronic imager can further include an optics unit having an optic member attached to the cover unit, with the optic member positioned at a desired location relative to the image sensor.

Abstract: An encoder device for the determination of absolute angle or linear segments is described, with which the distance from the actual to the reference position is determined upon prompting and output via incremental signals. This encoder offers new functions for the incremental measuring system employed up to now. The transition to the absolute measuring system is also made possible according to requirements.

Abstract: There is disclosed an image reading apparatus having an image sensor unit. The image sensor unit may include a number of photodiode arrays. The photodiode arrays may have different qualities and the output of the photodiode arrays may be processed differently. Output of the photodiode arrays may be mixed to improve image qualities.

Abstract: An optical semiconductor device comprises a lead frame having, on a main surface thereof, a light-emitting element mount portion, and a light-receiving element mount portion formed to be convex. The optical semiconductor device comprises a light-emitting element mounted on the light-emitting element mount portion, and a light-receiving element mounted on the light-receiving element mount portion such that a light-receiving area faces the light-emitting element.

Abstract: A light source and method for making the same are disclosed. The light source includes a plurality of LEDs mounted on a substrate and a sensor for measuring light from the LEDs. Each LED emits light having a different spectrum from the other LEDs, the average intensity of light from that LED being determined by a drive signal coupled to that LED. The sensor generates a plurality of signals, each signal being characterized by a sensor value that is proportional to the intensity of light emitted by a corresponding one of the LEDs. A controller generates the drive signals and stores a current target value for each LED. The drive signals for each of the LEDs is generated such that the sensor value for that LED matches the stored current target value for that LED.

Abstract: A sensing arrangement (12) is described. The arrangement comprises: a moveable object (80) including a plurality of marker portions (112) disposed in a calibrated configuration, each marker portion (112) being capable of emitting light in response to stimulation. The arrangement also includes a light source (42) directed towards the marker portions (112) and for causing light emission therefrom. An imaging device (44) is directed towards the marker portions (112) and includes an array of light-detecting elements for sensing light emitted from the marker portions (112) to generate image data. A processor (52), in communication with the imaging device (44), analyses image data received from the imaging device (44) to determine the location of the moveable object (80) based on the calibrated configuration.

Abstract: An electro-optical element is provided including a light-emitting element part and a light-receiving element part. An electro-optical element includes a light-emitting element part and a light-receiving element part having an optical surface and formed on the light-receiving element part. The electro-optical element emits light at least in a direction that the light-emitting element part and the light-receiving element part are formed in layers. In addition, an optical member is formed at least on the optical surface.

Abstract: A scanning unit for an optical position measuring device, the scanning unit having a structured optoelectronic photodetector that includes: a semiconductor substrate, a plurality of radiation-sensitive detector areas, which are arranged next to each other on the semiconductor substrate and a strip conductor, wherein at least a portion of the strip conductor is positioned across a surface defined by the plurality of detector areas and forms a connection with an associated detector area of the plurality of detector areas.

Abstract: A light source unit includes a light source having LED chips for emitting different colors of light and an optical sensor for detecting light from a light mixer. A light source control section controls by feedback control luminance of each of the LED chips according to values detected by the optical sensor. The light source unit also includes a temperature control section for controlling the temperature of the light source. The temperature control section is a feedback control system. Keeping the light source at a constant temperature allows suppressing spectrum changes of the LED chips with temperature, thereby suppressing changes in the luminance and chromaticity of the light source unit.

Abstract: A confocal microscope apparatus has a confocal scanner for scanning a sample with shifting a focal position of a light beam in a direction perpendicular to an optical axis, a moving mechanism for moving the focal position of the light beam in an optical axis direction, a camera for picking up an image of the sample with the light beam, and a movement control unit for controlling the moving mechanism to move the focal position of the light beam by a predetermined distance in the optical axis direction for every vertical synchronizing signal of the camera in synchronization with the vertical synchronizing signal. A high-speed three-dimensional image can be displayed in such that while measuring the sample, two or more slice images in such an arrangement on a common screen that their positions relative to the sample enables to be grasped.

Abstract: A solid state image pickup device has: an n-type semiconductor substrate; a p-type layer formed in the n-type substrate; a first n-type region formed in the p-type layer and constituting a photodiode therewith; a first gate structure including a charge storage region and a control gate, formed on the semiconductor substrate adjacent to the first region; a second n-type region formed adjacent to the first gate structure on opposite side to the first region, constituting a non-volatile memory element with the first region and the first gate structure; and a control circuit for applying write and read voltages to the control gate, for tunneling and writing charges, and for reading stored information. A solid state image pickup device is provided which can execute a novel pixel signal read operation.

Abstract: A map of the surface of a substrate is generated at a measurement station. The substrate is then moved to where a space between a projection lens and the substrate is filled with a liquid. The substrate is then aligned using, for example, a transmission image sensor and, using the previous mapping, the substrate can be accurately exposed. Thus the mapping does not take place in a liquid environment.

Abstract: An adjusting apparatus includes a judging unit that receives a characteristic value of an article processed by one of processing machines from one of measuring machines and, on the basis of the characteristic value, judges whether or not the processed article meets regular quality, and an abnormality estimating unit that, when the processed article does not meet regular quality, specifies an device to be adjusted on the basis of whether a characteristic value out of the regular range appears for every two cycles or three cycles.

Abstract: A charge division arrangement for a CCD device for producing a divided charge output from an input charge, comprising an input for receiving an input charge, an array of elements and an output. The array of elements being arranged in rows and columns and having clock connections to allow charge in each row to be successively clocked from one row of elements to the next. At least some of the elements being arranged in a charge division unit having a first element and a second element in adjacent columns and being communicable at least temporarily so that charged introduced into the first element is divided between the first element and the second element, the charge division unit being arranged to produce divided charge for production at the output. The arrangement allows a small amount of charge to be introduced into a CCD circuit.