Patents Examined by Brooke Purinton
  • Patent number: 11114270
    Abstract: A scanning magnet is positioned downstream of a mass resolving magnet of an ion implantation system and is configured to control a path of an ion beam downstream of the mass resolving magnet for a scanning or dithering of the ion beam. The scanning magnet has a yoke having a channel defined therein. The yoke is ferrous and has a first side and a second side defining a respective entrance and exit of the ion beam. The yoke has a plurality of laminations stacked from the first side to the second side, wherein at least a portion of the plurality of laminations associated with the first side and second side comprise one or more slotted laminations having plurality of slots defined therein.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: September 7, 2021
    Assignee: Axcelis Technologies, Inc.
    Inventors: Bo Vanderberg, Edward Eisner
  • Patent number: 11073535
    Abstract: A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: July 27, 2021
    Assignee: Shimadzu Corporation
    Inventor: Masato Hirade
  • Patent number: 11067597
    Abstract: A method of performing atomic force microscopy (AFM) measurements, uses an ultrasound transducer to transmit modulated ultrasound waves with a frequency above one GHz from the ultrasound transducer to a top surface of a sample through the sample from the bottom surface of the sample. Effects of ultrasound wave scattering are detected from vibrations of an AFM cantilever at the top surface of the sample. Before the start of the measurements, a drop of a liquid is placed on a top surface of the ultrasound transducer. The sample is placed on the top surface of the ultrasound transducer, whereby the sample presses the liquid in the drop into a layer of the liquid between the top surface of the ultrasound transducer and a bottom surface of the sample. The AFM measurements are started after a thickness of the layer of the liquid has stabilized.
    Type: Grant
    Filed: November 2, 2018
    Date of Patent: July 20, 2021
    Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
    Inventors: Martinus Cornelius Johannes Maria Van Riel, Paul Louis Maria Joseph Van Neer, Hamed Sadeghian Marnani, Maarten Hubertus Van Es
  • Patent number: 11049709
    Abstract: A method of mass spectrometry or ion mobility spectrometry is disclosed comprising: providing ions towards an ion storage region; selecting a target maximum charge desired to be stored within the ion storage region at any given time; and reducing the ion current passing to the ion storage region such that the ions entering the ion storage region do not cause the total charge within the storage region to rise above said target maximum charge. The step of reducing the ion current passing to the ion storage region comprises: temporally separating the ions according to their ion mobility in an ion mobility separator; and mass filtering the ions according to mass to charge ratio with a mass filter. Said steps of separating and mass filtering the ions result in substantially only target ions having selected combinations of ion mobility and mass to charge ratio being transmitted towards the ion storage region.
    Type: Grant
    Filed: November 11, 2014
    Date of Patent: June 29, 2021
    Assignee: MICROMASS UK LIMITED
    Inventors: Kevin Giles, Martin Raymond Green, Keith Richardson, Jason Lee Wildgoose
  • Patent number: 11049691
    Abstract: A system and method for optimizing a ribbon ion beam in a beam line implantation system is disclosed. The system includes a mass resolving apparatus having a resolving aperture, in which the resolving aperture may be moved in the X and Z directions. Additionally, a controller is able to manipulate the mass analyzer and quadrupole lenses so that the crossover point of desired ions can also be moved in the X and Z directions. By manipulating the crossover point and the resolving aperture, the parameters of the ribbon ion beam may be manipulated to achieve a desired result. Movement of the crossover point in the X direction may affect the mean horizontal angle of the beamlets, while movement of the crossover point in the Z direction may affect the horizontal angular spread and beam current.
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: June 29, 2021
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Bon-Woong Koo, Robert C. Lindberg, Eric D. Hermanson, Frank Sinclair, Antonella Cucchetti, Randy Martin, Michael D. Johnson, Ana Samolov, Svetlana B. Radovanov
  • Patent number: 11049626
    Abstract: An apparatus includes a splash shield incorporating a clear viewing area, a vacuum manifold, the vacuum manifold adapted to releasably engage the splash shield, and a link emanating from the vacuum manifold, the link configured to attach to a vacuum system wherein application of a vacuum creates a laminar flow to draw vapor away from the splash shield.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: June 29, 2021
    Inventor: David J. Ahearn
  • Patent number: 11031208
    Abstract: A cold cathode field-emission electron gun includes: an emitter; an extraction electrode which extracts electrons from the emitter; and a biased electrode which is disposed closer to the emitter than the extraction electrode. A voltage applied to the biased electrode is variable.
    Type: Grant
    Filed: September 14, 2018
    Date of Patent: June 8, 2021
    Assignee: JEOL Ltd.
    Inventor: Yuji Kohno
  • Patent number: 11032887
    Abstract: Systems and methods for applying light to an environment are provided. A system may include an elongate first body having a first side wall, a second side wall opposite the first side wall, and a bottom wall. The first body may define a lengthwise channel between the first side wall and the second side wall. The first body may have a first groove disposed along an inner surface of the first side wall, a second groove disposed along an inner surface of the second side wall, and a cover which may be coupled to the first body via the first groove and the second groove. The first body and the cover may collectively enclose at least a portion of the channel. The system may include an LED disposed within the channel.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: June 8, 2021
    Assignee: RGF ENVIRONMENTAL GROUP, INC.
    Inventors: Walter B. Ellis, Sergei Chtchavelev
  • Patent number: 11020499
    Abstract: A vehicle comprising: a seating assembly; and a console disposed proximate the seating assembly. The console comprises a disinfection apparatus. The disinfection apparatus comprises a housing to accept items to be disinfected, and a source of ultraviolet radiation configured to emit ultraviolet radiation into the housing. In embodiments, the housing comprises a light guide operably coupled to at least one of a base and a lid, the light guide accepting the ultraviolet radiation from the source of the ultraviolet radiation and guiding the ultraviolet radiation within an interior chamber. In embodiments, the source of ultraviolet radiation is a light emitting diode configured to emit electromagnetic radiation having a peak intensity within a wavelength range of 200 nm to 300 nm.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: June 1, 2021
    Assignee: Ford Global Technologies, LLC
    Inventors: Scott Holmes Dunham, Stuart C. Salter, Daniel Ferretti
  • Patent number: 11004667
    Abstract: A portable ion mobility spectrometry apparatus (1) for detecting an aerosol and a method for using the apparatus. The apparatus comprises an ion mobility spectrometer (3); a portable power source (5) carried by the apparatus for providing power to the apparatus (1); an inlet (7) for collecting a flow of air to be tested by the spectrometer (3); a heater (4) configured to heat the air to be tested to vapourise an aerosol carried by the air and a controller (2) configured to control the spectrometer (3) to obtain samples from the heated air, wherein the controller is configured to increase a heat output from the heater (4) for a selected time period before obtaining samples from the heated air.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: May 11, 2021
    Assignee: SMITHS DETECTION-WATFORD LIMITED
    Inventors: David Sharp, Alastair Clark, William Munro, Paul Arnold, John Fitzgerald, David Cutmore, Rod Wilson
  • Patent number: 10994150
    Abstract: A radiation device is for the radiation of human skin, preferably the face of a user, in particular at least with radiation in the red light range, with a source of radiation and a filtering device for filtering the radiation emitted by the source of radiation. The filtering device is configured in such a way that the radiation device emits radiation in a wavelength range from 280 to 400 nm and beyond that radiation in a wavelength range of 600 to 700 nm, and that the radiation device emits at least zonally radiation in a wavelength range of a visible color shade of the visible light spectrum and filters further radiation of the visible light spectrum.
    Type: Grant
    Filed: August 22, 2018
    Date of Patent: May 4, 2021
    Assignee: WM BEAUTYSYSTEMS AG & Co. KG
    Inventor: Wolfgang Müller
  • Patent number: 10989735
    Abstract: Embodiments relate to the design of an electronic device capable of preventing a lateral motion between a first body and a second body. The device comprises a first body comprising one or more atomic force microscopy (AFM) tips protruding from a first surface of the first body. The device further comprises a second body comprising one or more electrical contacts on a second surface of the second body. The second surface faces the first surface. The one or more electrical contacts pierced by the AFM tips of the first surface to prevent a lateral motion between the first body and the second body.
    Type: Grant
    Filed: February 4, 2020
    Date of Patent: April 27, 2021
    Assignee: Facebook Technologies, LLC
    Inventors: Ali Sengül, Oscar Torrents Abad, Zheng Sung Chio, Pooya Saketi, Daniel Brodoceanu
  • Patent number: 10984976
    Abstract: An ion trap chip, which may be used for quantum information processing and the like, includes an integrated microwave antenna. The antenna is formed as a radiator connected by one of its ends to the center trace of a microwave transmission line and connected by its other end to a current return path through a ground trace of the microwave transmission line. The radiator includes several parallel, coplanar radiator traces connected in series. The radiator traces are connected such that they all carry electric current in the same direction, so that collectively, they simulate a single, unidirectionally flowing sheet of current. In embodiments, induced currents in underlying metallization planes are suppressed by parallel slots that extend in a direction perpendicular to the radiator traces.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: April 20, 2021
    Assignee: National Technology & Engineering Solutions of Sandia, LLC
    Inventors: Christopher Nordquist, Matthew G. Blain, Peter Lukas Wilhelm Maunz, Christopher W. Berry
  • Patent number: 10985001
    Abstract: A rapid online analyzer for a 14C-AMS, comprising: a solid sample processing module, an atmospheric sample collection and processing module, a microflow control module, an AMS module and an automatic control module. Sample preparation and AMS measurement are combined, a solid sample is directly converted into CO2 gas by an element analyzer and then enters an AMS for measurement, and an atmospheric sample is collected in real time for analysis by the AMS, such that quick and efficient analysis of the solid sample and the atmospheric sample is realized.
    Type: Grant
    Filed: January 7, 2019
    Date of Patent: April 20, 2021
    Assignee: INSTITUTE OF EARTH ENVIRONMENT, CHINESE ACADEMY OF SCIENCES
    Inventors: Yun-Chong Fu, Hua Du, Peng Cheng, Shugang Wu, Wei-Jian Zhou
  • Patent number: 10984980
    Abstract: The objective of the present invention is to provide a charged particle beam device for setting, from an image of a trench-like groove or a pit, device conditions for finding a hole or the like provided in the trench or the pit, or measuring a hole or the like provided inside the trench or the like with high accuracy. In the present invention, a charged particle beam device comprises: a deflector for causing a charged particle beam emitted from a charged particle source to perform a scan; a detector for detecting a charged particle obtained on the basis of the scanning of the charged particle beam; and a computation processing device for generating an image on the basis of the output of the detector.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: April 20, 2021
    Assignee: Hitachi High-Tech Corporation
    Inventors: Kei Sakai, Satoru Yamaguchi, Hideki Itai, Yasunori Takasugi, Kumiko Shimizu
  • Patent number: 10978273
    Abstract: A multiple charged particle writing method includes performing a tracking operation by shifting the main deflection position of multiple beams using charged particle beams in the direction of stage movement so that the main deflection position of the multiple beams follows the stage movement while a predetermined number of beam shots of the multiple beams are performed, and shifting the sub deflection position of the multiple beams so that each beam of the multiple beams straddles rectangular regions among plural rectangular regions obtained by dividing a writing region of a target object into meshes by the pitch size between beams of the multiple beams, and the each beam is applied to a different position in each of the rectangular regions straddled, and applying a predetermined number of shots per beam using plural beams in the multiple beams to each of the plural rectangular regions, during the tracking operation.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: April 13, 2021
    Assignee: NuFlare Technology, Inc.
    Inventor: Hideo Inoue
  • Patent number: 10978213
    Abstract: A protective layer, a cell and a method provide radiation shielding. The cell and the protective layer formed of a plurality of cells provide radiation shielding, such as from protons and alpha particles having dangerously high energy levels, while being more lightweight than a conventional bulk HDPE protective layer. In the context of a protective layer, the protective layer includes a plurality of cells positioned proximate one another. The plurality of cells include at least a first cell. The first cell includes a cell body formed of an insulative material and extends between opposed first and second ends. The first cell also includes a conductive spherical portion proximate the first end of the cell body and an electrode disposed interior of the conductive spherical portion.
    Type: Grant
    Filed: August 22, 2018
    Date of Patent: April 13, 2021
    Assignee: THE BOEING COMPANY
    Inventor: Shahriar Khosravani
  • Patent number: 10978270
    Abstract: A charged particle beam device, comprising a charged particle source configured to emit a charged particle beam; a movable stage comprising an assembly of aperture arrays having at least a first aperture array and a second aperture array, the movable stage is configured to align the assembly of aperture arrays with the charged particle beam, and at least one aperture array comprises a shielding tube coupled to the movable stage.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: April 13, 2021
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Dieter Winkler, Thomas Jasinski
  • Patent number: 10969690
    Abstract: A method of controlling a droplet illumination module/droplet detection module system of an extreme ultraviolet (EUV) radiation source includes irradiating a target droplet with light from a droplet illumination module and detecting light reflected and/or scattered by the target droplet. The method includes determining whether an intensity of the detected light is within an acceptable range. In response to determining that the intensity of the detected light is not within the acceptable range, a parameter of the droplet illumination module is automatically adjusted to set the intensity of the detected light within the acceptable range.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: April 6, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng
  • Patent number: 10950410
    Abstract: Provided is a multiple electron beam inspection apparatus including: an irradiation source irradiating a substrate with multiple electron beams; a stage on which is cable of mounting the substrate; an electromagnetic lens provided between the irradiation source and the stage, the electromagnetic lens generating a lens magnetic field, the multiple electron beams being capable of passing through the lens magnetic field; an electrostatic lens provided in the lens magnetic field, the electrostatic lens including a plurality of through-holes and a plurality of electrodes, the plurality of through-holes having wall surfaces respectively, each of the multiple electron beams being capable of passing through the corresponding each of the plurality of through-holes, each of the plurality of electrodes provided on each of the wall surfaces of the plurality of through-holes, at least one of the through-holes provided apart from a central axis of trajectory of the multiple electron beams having a spiral shape; and a power
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: March 16, 2021
    Assignee: NuFlare Technology, Inc.
    Inventors: Kazuhiko Inoue, Atsushi Ando, Munehiro Ogasawara