Patents Examined by Bruce Andrson
  • Patent number: 6346710
    Abstract: A stage apparatus comprises a fixed base, a movable table, a pair of elastic portions arranged in both sides of the table along an X axis, a pair of elastic portions arranged in both sides of the table along a Y axis, a pair of actuators for generating displacements for moving the table in a Y direction, a pair of displacement amplifying mechanisms for amplifying displacements of the actuators, a pair of actuators for generating displacements for moving the table in an X direction, and a pair of displacement amplifying mechanisms for amplifying displacements of the actuators.
    Type: Grant
    Filed: August 30, 1999
    Date of Patent: February 12, 2002
    Assignee: Olympus Optical Co., Ltd.
    Inventor: Yoshihiro Ue