Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
Type:
Grant
Filed:
July 13, 1999
Date of Patent:
November 13, 2001
Assignee:
Input/Output, Inc.
Inventors:
Duli Yu, Lianzhong Yu, Howard D. Goldberg, Martin A. Schmidt, Robert P. Ried