Abstract: An outfit for the construction of several complex industrial installations for the treatment of industrial fluids includes several assemblies of several functional modules, each adapted to perform an elementary operation. Each functional module includes at least one input and at least one output, as well as a local guide unit of the functional module provided with a communication interface. All the functional modules have the same assembly to carry out the same elementary operation and are standard. The functional modules are adapted to be associated functionally with each other in installations. The outfit moreover includes, for each industrial installation, a single central guide unit, adapted to guide the functional modules of the associated industrial installation.

Abstract: A method and an apparatus for performing process control based upon a metrology delay. A process step is performed upon a first workpiece. Metrology data related to the first workpiece is acquired. A control adjustment based upon the metrology data is determined. A magnitude of the control adjustment is modified based upon a time period. The time period is defined by a first time frame relating to processing the first workpiece and a second time frame relating to acquiring metrology data related to the first workpiece.

Abstract: A monitoring system includes a factory automation (FA) computer for receiving information from a manufacturing apparatus, an information collecting computer for receiving the information on a LAN from the FA computer and sending the received information to a facility operation monitoring host computer, and the facility operation monitoring host computer constructs a database based on the received information and displaying the information for a supervisor in accordance with the constructed database. The facility operation monitoring host computer includes databases, and displays information stored in the databases on a monitor, linking the information from the databases.