Patents Examined by Chuong Anh Luu
  • Patent number: 8852969
    Abstract: A wafer-level method of fabricating an opto-electronic component package, in which the opto-electronic component is mounted to a semiconductor wafer having first and second surfaces on opposite sides of the wafer. The method includes etching vias in the first surface of the semiconductor wafer. The first surface and surfaces in the vias are metallized, and the metal is structured to define a thermal pad and to define the anode and cathode contact pads. A carrier wafer is attached on the side of the semiconductor wafer having the first surface, and the semiconductor wafer is thinned from its second surface to expose the metallization in the vias. Metal is provided on the second surface, and the metal is structured to define a die attach pad and additional anode and cathode pads for the opto-electronic component. The opto-electronic component is mounted on the die attach pad and a protective cover is formed over the opto-electronic component.
    Type: Grant
    Filed: November 3, 2010
    Date of Patent: October 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jochen Kuhmann
  • Patent number: 8709956
    Abstract: BEOL memory cells are described that include one or more sidewall protection layers on the memory device (including, for example, an MTJ element) deposited prior to interconnect via etching to prevent the formation of electrical shorts between layers. One embodiment uses a single layer sidewall protection sleeve that is deposited after the memory device has been patterned. The layer material is vertically etched down to expose the upper surface of the top electrode while leaving a residual layer of protective material surrounding the rest of the memory device. The material for the protection layer is selected to resist the etchant used to remove the first dielectric material from the via in the subsequent interconnect process. A second embodiment uses dual-layer sidewall protection in which the first layer covers the memory element is preferably an oxygen-free dielectric and the second layer protects the first layer during via etching.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: April 29, 2014
    Assignee: Avalanche Technology Inc.
    Inventors: Kimihiro Satoh, Yiming Hual, Jing Zhang, Ebrahim Abedlfard
  • Patent number: 7834415
    Abstract: A semiconductor device has: a substrate provided with a trench; and a device isolation structure formed in the trench. The device isolation structure has: a silicon oxynitride film formed on a surface of the substrate through an interfacial oxide film; and an embedded insulating film formed on the silicon oxynitride film.
    Type: Grant
    Filed: February 6, 2007
    Date of Patent: November 16, 2010
    Assignee: Elpida Memory, Inc.
    Inventor: Yoshinori Tanaka
  • Patent number: 7829476
    Abstract: A method of manufacturing a semiconductor device has forming a capacitor having electrodes and a ferroelectric film provided therebetween above a substrate, forming a pad electrode electrically connected to one of the electrodes of the capacitor above the substrate, forming a protective film covering the pad electrode over the substrate, forming an opening in the protective film exposing at least a part of the pad electrode, bringing a measurement terminal into contact with the exposed surface of the pad electrode, etching the surface of the pad electrode after the measurement terminal is brought into contact therewith, and forming a hydrogen absorbing film on the protective film and the pad electrode exposed through the opening.
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: November 9, 2010
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Kouichi Nagai, Kaoru Saigoh
  • Patent number: 7829354
    Abstract: Deviation occurring in a particular region in a plane of a resistor group which constitutes a semiconductor integrated circuit is improved and a quick increase in yield is accomplished. Provided is a fuse trimming method for a semiconductor device in which circuit elements such as transistors and resistors are formed on a semiconductor wafer and which has fuse elements capable of adjusting a resistance value of the resistors by laser trimming, including a resistor correction step of correcting in the particular region of the semiconductor wafer the resistance value of the resistors based on an amount of deviation from a target value of the resistance value of the resistors.
    Type: Grant
    Filed: February 11, 2008
    Date of Patent: November 9, 2010
    Assignee: Seiko Instruments Inc.
    Inventors: Akiko Tsukamoto, Jun Osanai
  • Patent number: 7821039
    Abstract: An integrated circuit structure includes an integrated circuit structure including a PMOS transistor including a first gate electrode; a first source region; and a first drain region; an NMOS transistor including a second gate electrode, wherein the first gate electrode and the second gate electrode are portions of a gate electrode strip; a second source region; and a second drain region. No additional transistors are formed between the PMOS transistor and the NMOS transistor. The integrated circuit further includes a VDD power rail connected to the first source region; a VSS power rail connected to the second source region; and an interconnection port electrically connected to the gate electrode strip. The interconnection port is on an outer side of a MOS pair region including the PMOS transistor, the NMOS transistor, and the region between the PMOS transistor and the NMOS transistor. The portion of the gate electrode strip in the MOS pair region is substantially straight.
    Type: Grant
    Filed: August 18, 2008
    Date of Patent: October 26, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Chun Tien, Lee-Chung Lu, Yung-Chin Hou, Chun-Hui Tai, Ta-Pen Guo, Sheng-Hsin Chen, Ping Chung Li
  • Patent number: 7821002
    Abstract: The semiconductor device has a semiconductor layer, a gate electrode which covers an end portion of the semiconductor layer, and an insulating layer for insulating the semiconductor layer and the gate electrode. The film thickness of the insulating layer which insulates a region where an end portion of the semiconductor layer and the gate electrode overlap each other is thicker than the film thickness of the insulating layer which covers the central portion of the semiconductor layer.
    Type: Grant
    Filed: April 23, 2007
    Date of Patent: October 26, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Yukie Suzuki, Yasuyuki Arai, Yoshitaka Moriya, Kazuko Ikeda, Yoshifumi Tanada, Shuhei Takahashi
  • Patent number: 7812387
    Abstract: A trench capacitor with an isolation collar in a semiconductor substrate where the substrate adjacent to the isolation collar is free of dopants caused by auto-doping. The method of fabricating the trench capacitor includes the steps of forming a trench in the semiconductor substrate; depositing a dielectric layer on a sidewall of the trench; filling the trench with a first layer of undoped polysilicon; etching away the first layer of undoped polysilicon and the dielectric layer from an upper section of the trench whereby the semiconductor substrate is exposed at the sidewall in the upper section of the trench; forming an isolation collar layer on the sidewall in the upper section of the trench; and filling the trench with a second layer of doped polysilicon.
    Type: Grant
    Filed: April 3, 2008
    Date of Patent: October 12, 2010
    Assignee: International Business Machines Corporation
    Inventor: Kangguo Cheng
  • Patent number: 7812352
    Abstract: A TFT array substrate is disclosed. In the pixel structure of the TFT array substrate, patterned transparent conductive layers are disposed under a first metal layer (M1) and a second metal layer (M2) and most areas of the M1 and M2 are substituted by the patterned transparent conductive layers. So, the pixel structure has high aperture ratio and large storage capacitance. Besides, a scan bonding pad on the TFT array substrate includes a first patterned transparent conductive layer (T1), the M1 and a third patterned transparent conductive layer (T3). The M1 is disposed on the T1, and the T3 is electrically connected to the T1 via a contact hole in the M1. So, the contact resistance of the scan bonding pad is small. The data bonding pad on the TFT array substrate has similar design. Moreover, fabricating methods of TFT array substrates are also provided.
    Type: Grant
    Filed: March 3, 2009
    Date of Patent: October 12, 2010
    Assignee: Chunghwa Picture Tubes, Ltd.
    Inventors: Yao-Hong Chien, Chih-Chieh Wang, Xuan-Yu Liu, Li-Shan Chen
  • Patent number: 7803676
    Abstract: Provided are a semiconductor device and a method of fabricating the semiconductor device.
    Type: Grant
    Filed: March 30, 2009
    Date of Patent: September 28, 2010
    Assignee: Fairchild Korea Semiconductor, Ltd.
    Inventors: Jong-ho Park, Chang-Ki Jeon, Hyi-Jeong Park, Hye-mi Kim
  • Patent number: 7786514
    Abstract: The invention discloses a switching device for a pixel electrode of display device. The switching device comprises a gate formed on a substrate; a gate-insulating layer formed on the gate; a first buffer layer formed between the substrate and the gate and/or between the gate and the gate-insulating layer, wherein the first buffer layer comprises TaSix, TaSixNy, TiSix, TiSixNy, WSix, WSixNy, or WCxNy; a semiconductor layer formed on a portion of the gate-insulating layer; and a source and a drain formed on a portion of the semiconductor layer.
    Type: Grant
    Filed: December 26, 2007
    Date of Patent: August 31, 2010
    Assignee: Au Optronics Corp.
    Inventors: Kuo-Lung Fang, Wen-Ching Tsai, Kuo-Yuan Tu, Han-Tu Lin
  • Patent number: 7785910
    Abstract: The semiconductor light emitting device having a protrusion and recess structure includes: a lower clad layer disposed on a substrate; an active layer formed on one portion of a top surface of the lower clad layer; an upper clad layer formed on the active layer; a first electrode formed on the upper clad layer; and a second electrode that is formed on a protrusion and recess structural pattern region formed on a portion of the top surface of the lower clad layer not occupied by the active layer.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: August 31, 2010
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Hyun-soo Kim, Jeong-wook Lee
  • Patent number: 7776762
    Abstract: Dielectric layers containing a zirconium-doped tantalum oxide layer, where the zirconium-doped tantalum oxide layer is formed of one or more monolayers of tantalum oxide doped with zirconium, provide an insulating layer in a variety of structures for use in a wide range of electronic devices.
    Type: Grant
    Filed: December 8, 2006
    Date of Patent: August 17, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Kie Y. Ahn, Leonard Forbes
  • Patent number: 7768112
    Abstract: A method for cutting and molding in small windows of a window-type semiconductor package and the semiconductor package fabricated from the same are revealed. According to the method, a substrate strip has a plurality of small windows disposed at the sides or at the corners of the substrate strip. The external surface of the substrate strip includes a plurality of window molding areas surrounding the small windows and extending to the scribe lines. A plurality of chips are disposed on the substrate strip. Then, an encapsulant is formed in the small windows to encapsulate the electrical connecting components and formed on the window molding areas so that the encapsulant extends to the scribe lines. Therefore, the mold flashes at the small windows can be effectively reduced.
    Type: Grant
    Filed: August 17, 2009
    Date of Patent: August 3, 2010
    Assignee: Walton Advanced Engineering Inc.
    Inventors: Kuo-Yuan Lee, Yung-Hsiang Chen
  • Patent number: 7700462
    Abstract: When the CW laser oscillator is employed in the manufacturing process of the semiconductor device, it is expected to obtain the device of high performance. However, the CW oscillator provides only a small beam spot and forms an inferior crystalline region when it is scanned on the semiconductor film. It is necessary to minimize such an inferior crystalline region because it gives a problem in terms of high integration of the semiconductor element. In view of the problem, the present invention is to form a long crystalline region as suppressing the formation of the inferior crystalline region by irradiating the fundamental wave with the harmonic supplementarily (refer to FIG. 1). The present invention also includes a constitution in which a part having high energy density in the fundamental wave is irradiated to a part having low energy density in the harmonic.
    Type: Grant
    Filed: February 27, 2004
    Date of Patent: April 20, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd
    Inventors: Koichiro Tanaka, Shunpei Yamazaki
  • Patent number: 7642577
    Abstract: The method for fabricating a semiconductor device comprises the steps of: forming a dummy electrode 22n and a dummy electrode 22p; forming a metal film 32 on the dummy electrode 22p; conducting a thermal treatment at a first temperature to substitute the dummy electrode 22n with an electrode 34a of a material containing the constituent material of the metal film 32; forming a metal film 36 on the dummy electrode 22n; and conducting a thermal treatment at a second temperature, which is lower than the first temperature and at which an interdiffusion of constituent materials between the electrode 34a and the metal film 36 does not take place, to substitute the second dummy electrode with an electrode 34b of a material containing the constituent material of the metal film 36.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: January 5, 2010
    Assignee: Fujitsu Microelectronics Limited
    Inventors: Hiroshi Kudo, Junko Naganuma, Sadahiro Kishii
  • Patent number: 7638381
    Abstract: Methods of fabricating a semiconductor structure in which a body of monocrystalline silicon is formed on a sidewall of a sacrificial mandrel and semiconductor structures made by the methods. After the body of monocrystalline silicon is formed, the sacrificial material of the mandrel is removed selective to the monocrystalline silicon of the body. The mandrel may be composed of porous silicon and the body may be fabricated using either a semiconductor-on-insulator substrate or a bulk substrate. The body may be used to fabricate a fin body of a fin-type field effect transistor.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: December 29, 2009
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Jack Allan Mandelman
  • Patent number: 7601649
    Abstract: A dielectric film containing zirconium-doped tantalum oxide arranged as a structure of one or more monolayers and a method of fabricating such a dielectric film produce a reliable dielectric layer for use in a variety of electronic devices. In an embodiment, a zirconium-doped tantalum oxide dielectric layer may be formed by depositing tantalum by atomic layer deposition onto a substrate surface and depositing a zirconium dopant by atomic layer deposition onto the substrate surface.
    Type: Grant
    Filed: August 2, 2004
    Date of Patent: October 13, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Kie Y. Ahn, Leonard Forbes
  • Patent number: 7564056
    Abstract: Embodiments relate to a method for manufacturing a semiconductor device. In embodiments, the method may include forming a gate electrode on the semiconductor substrate, forming a pattern having a groove at the edge of the gate electrode and performing an etching process using the pattern as a mask, so that a groove extending from the edge of the gate electrode to LDD is formed, forming an ion diffusion barrier on the substrate having the gate electrode and the groove obtained through the previous step, implanting low-density ions onto the diffusion barrier, forming a spacer at edge of the gate electrode, and implanting high-density ions onto the substrate using the spacer and the gate electrode. A problem that may be caused by ion-implantation or diffusion process may be solved so that the hot carrier effects are improved, thereby improving the reliability of the semiconductor device.
    Type: Grant
    Filed: December 26, 2006
    Date of Patent: July 21, 2009
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: Young Suk Ko
  • Patent number: 7560394
    Abstract: A nanodot material including nanodots formed on silicon oxide, and a method of manufacturing the same, is provided. The nanodot material includes a substrate, a silicon oxide layer, and a plurality of nanodots on the silicon oxide layer.
    Type: Grant
    Filed: July 18, 2005
    Date of Patent: July 14, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-soo Park, Wan-jun Park, Alexander Alexandrovich Saranin, Andrey Vadimovich Zotov