Patents Examined by Cjong Q Nguyen
  • Patent number: 6198153
    Abstract: The present invention provides for a shielded capacitor in a digital CMOS fabrication process. The shield capacitor comprises a first surface (also known as a top plate) and a second surface (the bottom plate). The bottom plate has two portions which are connected, and the two portions of the bottom plate are positioned to sandwich the top plate in between the portions. A polysilicon layer is fabricated between the plates and the substrate of the semiconductor to isolate the plates from the substrate. To build the shielded capacitor, the polysilicon layer is fabricated first, then the plates are built on top of the polysilicon layer. The polysilicon layer is silicized and is often connected to the ground.
    Type: Grant
    Filed: April 21, 1997
    Date of Patent: March 6, 2001
    Assignee: LSI Logic Corporation
    Inventors: Edward W. Liu, See-Hoi Caesar Wong