Abstract: An MOS device has an embedded dielectric structure underlying an active portion of the device, such as a source extension or a drain extension. In an alternative embodiment, an embedded dielectric structure underlies the channel region of a MOS device, as well as the source and drain extensions.
Type:
Grant
Filed:
October 6, 2005
Date of Patent:
May 3, 2011
Assignee:
Xilinx, Inc.
Inventors:
Yuhao Luo, Deepak Kumar Nayak, Daniel Gitlin