Patents Examined by Damian A Hillman
  • Patent number: 9537003
    Abstract: A semiconductor device includes a semiconductor body and a source metallization arranged on a first surface of the body. The body includes: a first semiconductor layer including a compensation-structure; a second semiconductor layer adjoining the first layer, comprised of semiconductor material of a first conductivity type and having a doping charge per horizontal area lower than a breakdown charge per area of the semiconductor material; a third semiconductor layer of the first conductivity type adjoining the second layer and comprising at least one of a self-charging charge trap, a floating field plate and a semiconductor region of a second conductivity type forming a pn-junction with the third layer; and a fourth semiconductor layer of the first conductivity type adjoining the third layer and having a maximum doping concentration higher than that of the third layer. The first semiconductor layer is arranged between the first surface and the second semiconductor layer.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: January 3, 2017
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Stefan Gamerith, Franz Hirler
  • Patent number: 9508951
    Abstract: There is provided an electrode foil that can form an organic electroluminescent device having a high external quantum efficiency despite the presence of the organic nitrogen compound at the interface of a metal foil and a reflective layer. The electrode foil of the invention includes a metal foil made of copper or copper alloy and a reflective layer provided on at least one surface of the metal foil. The electrode foil has an organic nitrogen compound at the interface between the metal foil and the reflective layer in such an amount that the ratio of the number of counts on the C—N bond to the total number of counts on the copper and the C—N bond: CN/(CN+Cu) in the organic nitrogen compound is 0.4 or less determined by time-of-flight secondary ion mass spectrometric analysis (TOF-SIMS) of the interface.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: November 29, 2016
    Assignees: Mitsui Mining & Smelting Co., Ltd., Panasonic Corporation
    Inventors: Yoshinori Matsuura, Toshimi Nakamura, Masaharu Myoi, Nozomu Kitajima, Mitsuo Yaguchi
  • Patent number: 9484405
    Abstract: A method for manufacturing a semiconductor device comprises depositing alternating layers of a plurality of first dielectric layers and a plurality of second dielectric layers on a substrate in a stacked configuration, forming one or more first openings in the stacked configuration to a depth penetrating below an upper surface of a bottom second dielectric layer of the plurality of second dielectric layers, forming one or more second openings in the stacked configuration to a depth corresponding to an upper surface of the substrate or below an upper surface of the substrate, removing the plurality of second dielectric layers from the stacked configuration to form a plurality of gaps, and epitaxially growing a semiconductor material from a seed layer in the one or more second openings to fill the one or more first and second openings and the plurality of gaps, wherein defects caused by a lattice mismatch between the epitaxially grown semiconductor material and a material of the substrate are contained at a bot
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: November 1, 2016
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
  • Patent number: 9455366
    Abstract: According to one embodiment, a photoconductive semiconductor switch includes a structure of nanopowder of a high band gap material, where the nanopowder is optically transparent, and where the nanopowder has a physical characteristic of formation from a sol-gel process. According to another embodiment, a method includes mixing a sol-gel precursor compound, a hydroxy benzene and an aldehyde in a solvent thereby creating a mixture, causing the mixture to gel thereby forming a wet gel, drying the wet gel to form a nanopowder, and applying a thermal treatment to form a SiC nanopowder.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: September 27, 2016
    Assignee: Lawrence Livermore National Security, LLC
    Inventors: Richard L. Landingham, Joe Satcher, Jr., Robert Reibold
  • Patent number: 9412715
    Abstract: A semiconductor device, includes: a connection member including a first pad formed on a principal surface thereof; a semiconductor chip including a circuit-formed surface on which a second pad is formed, the chip mounted on the connection member so that the circuit-formed surface faces the principal surface; and a solder bump that connects the first and second pads and is made of metal containing Bi and Sn, wherein the bump includes a first interface-layer formed adjacent to the second pad, a second interface-layer formed adjacent to the first pad, a first intermediate region formed adjacent to either one of the interface-layers, and a second intermediate region formed adjacent to the other one of the interface-layers and formed adjacent to the first intermediate region; Bi-concentration in the first intermediate region is higher than a Sn-concentration; and a Sn-concentration in the second intermediate region is higher than a Bi-concentration.
    Type: Grant
    Filed: October 7, 2014
    Date of Patent: August 9, 2016
    Assignee: FUJITSU LIMITED
    Inventors: Kozo Shimizu, Seiki Sakuyama, Toshiya Akamatsu
  • Patent number: 9397274
    Abstract: Embodiments disclose a light emitting device package including an insulating layer, a first lead frame and a second lead frame disposed on the insulating layer electrically separate from each other, a light emitting device disposed on the second lead frame electrically connected to the first lead frame and the second lead frame, the light emitting device includes a light emitting structure having a first conduction type semiconductor layer, an active layer, and a second conduction type semiconductor layer and a lens which encloses the light emitting device, wherein the insulating layer has an end portion projected beyond at least one of an end portion of the first lead frame and an end portion of the second lead frame, to form an opened region which exposes the insulating layer.
    Type: Grant
    Filed: March 6, 2012
    Date of Patent: July 19, 2016
    Assignee: LG INNOTEK CO., LTD.
    Inventors: Gun Kyo Lee, Nak-Hun Kim, Sun Mi Moon
  • Patent number: 9391149
    Abstract: A semiconductor device includes a drift region of a first doping type, a junction between the drift region and a device region, and a field electrode structure in the drift region. The field electrode structure includes a field electrode, a field electrode dielectric adjoining the field electrode, arranged between the field electrode and the drift region, and having an opening, and at least one of a field stop region and a generation region. The semiconductor device further includes a coupling region of a second doping type complementary to the first doping type. The coupling region is electrically coupled to the device region and coupled to the field electrode.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: July 12, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Franz Hirler
  • Patent number: 9373697
    Abstract: A method comprising steps of removing a first dielectric material, including a hard mask layer and one or more spacer material layers, from a semiconductor device having a sacrificial gate whose sidewalls being covered by said spacer material layers, and a raised source and a raised drain region with both, together with said sacrificial gate, being covered by said hard mask layer, wherein the removing is selective to the sacrificial gate, raised source region and raised drain region and creates a void between each of the raised source region, raised drain region and sacrificial gate. The method includes depositing a conformal layer of a second dielectric material to the semiconductor device, wherein the second material conforms in a uniform layer to the raised source region, raised drain region and sacrificial gate, and fills the void between each of the raised source region, raised drain region and sacrificial gate.
    Type: Grant
    Filed: October 8, 2014
    Date of Patent: June 21, 2016
    Assignee: GlobalFoundries, Inc.
    Inventors: Sanjay C. Mehta, Shom S. Ponoth, Muthumanickam Sankarapandian, Theodorus E. Standaert, Tenko Yamashita
  • Patent number: 9366601
    Abstract: A wafer fabrication monitoring/control system and method is disclosed. The invention utilizes Multiple Internal Reflection Infrared Detection (MIR-IR) to provide a highly sensitive (sub-10 nm, in-situ, ex-situ) on-wafer monitoring and characterization apparatus and method. The disclosed system and method has many practical applications to the development of advanced microfabrication technologies for sub-32 nm node CMOS semiconductor devices and provides support for formulation design, photolithographic patterning, etching/ashing of photoresists, plasma reactive ion etching (RIE) for trench/via patterning of low k dielectric, bottom anti-reflective coatings (BARCs), etch stop layers, and minimization/removal of plasma-etch polymers, development/confirmation of wet cleaning formulations and effectiveness for post CMP and post-etch cleaning.
    Type: Grant
    Filed: March 15, 2012
    Date of Patent: June 14, 2016
    Assignee: University of North Texas
    Inventors: Jin-Jian Chen, Oliver M. Chyan
  • Patent number: 9356023
    Abstract: Techniques are disclosed for forming a planar-like transistor device on a fin-based field-effect transistor (finFET) architecture during a finFET fabrication process flow. In some embodiments, the planar-like transistor can include, for example, a semiconductor layer which is grown to locally merge/bridge a plurality of adjacent fins of the finFET architecture and subsequently planarized to provide a high-quality planar surface on which the planar-like transistor can be formed. In some instances, the semiconductor merging layer can be a bridged-epi growth, for example, comprising epitaxial silicon. In some embodiments, such a planar-like device may assist, for example, with analog, high-voltage, wide-Z transistor fabrication.
    Type: Grant
    Filed: March 30, 2013
    Date of Patent: May 31, 2016
    Assignee: INTEL CORPORATION
    Inventors: Walid M. Hafez, Peter J. Vandervoorn, Chia-Hong Jan
  • Patent number: 9337096
    Abstract: Methods and apparatus for performing molding on die on wafer interposers. A method includes receiving an interposer assembly having a die side and an opposite side including two or more integrated circuit dies mounted on the die side of the interposer, the interposer assembly having spaces formed on the die side of the interposer between the two or more integrated circuit dies; mounting at least one stress relief feature on the die side of the interposer assembly in one of the spaces between the two or more integrated circuit dies; and molding the integrated circuit dies using a mold compound, the mold compound surrounding the two or more integrated circuit dies and the at least one stress relief feature. An apparatus is disclosed having integrated circuits mounted on a die side of an interposer, stress relief features between the integrated circuits and mold compound over the integrated circuits.
    Type: Grant
    Filed: October 16, 2013
    Date of Patent: May 10, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung Yu Wang, Chih-Wei Wu, Szu Wei Lu, Jing-Cheng Lin
  • Patent number: 9318345
    Abstract: When forming strain-inducing dielectric material layers above transistors of different conductivity type, the patterning of at least one strain-inducing dielectric material may be accomplished on the basis of a process sequence in which a negative influence of a fluorine species in an oxygen plasma upon removing the resist mask is avoided or at least significantly suppressed. For example, a substantially oxygen-free plasma process may be applied for removing the resist material.
    Type: Grant
    Filed: October 5, 2011
    Date of Patent: April 19, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ronald Naumann, Volker Grimm, Andrey Zakharov, Ralf Richter
  • Patent number: 9269615
    Abstract: A method for forming an interconnect structure includes forming a recess in a dielectric layer of a substrate. An adhesion barrier layer is formed to line the recess. A first stress level is present across a first interface between the adhesion barrier layer and the dielectric layer. A stress-reducing barrier layer is formed over the adhesion barrier layer. The stress-reducing barrier layer reduces the first stress level to provide a second stress level, less than the first stress level, across a second interface between the adhesion barrier layer, the stress-reducing barrier layer, and the dielectric layer. The recess is filled with a fill layer.
    Type: Grant
    Filed: July 20, 2012
    Date of Patent: February 23, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Vivian W. Ryan, Xunyuan Zhang, Paul R. Besser
  • Patent number: 9269713
    Abstract: A power semiconductor device comprises a first substrate that is highly doped with a first dopant type, the first substrate having a front face and a back face, the back face forming a backside of the device, a vertical p-type FET and a vertical n-type FET provided laterally adjacent to each other on the front face of the first substrate, wherein one of the FETs has a first drift zone with a complementary doping to the first dopant of the first substrate, and wherein the p-type FET and the n-type FET share the first substrate as a common backside, and wherein a region between the first drift zone and the first substrate comprises a highly conductive structure providing a low ohmic connection between the first drift zone and the first substrate. Further, a method for producing such a device is provided.
    Type: Grant
    Filed: June 4, 2013
    Date of Patent: February 23, 2016
    Assignee: Infineon Technologies Austria AG
    Inventors: Peter Irsigler, Franz Hirler, Hans-Joachim Schulze
  • Patent number: 9257333
    Abstract: Embodiments of the present disclosure include interconnect structures and methods of forming interconnect structures. An embodiment is an interconnect structure including a post-passivation interconnect (PPI) over a first substrate and a conductive connector on the PPI. The interconnect structure further includes a molding compound on a top surface of the PPI and surrounding a portion of the conductive connector, a top surface of the molding compound adjoining the conductive connector at an angle from about 10 degrees to about 60 degrees relative to a plane parallel with a major surface of the first substrate, the conductive connector having a first width at the adjoining top surface of the molding compound, and a second substrate over the conductive connector, the second substrate being mounted to the conductive connector.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: February 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Hsiung Lu, Hsuan-Ting Kuo, Tsung-Yuan Yu, Hsien-Wei Chen, Ming-Da Cheng, Chung-Shi Liu
  • Patent number: 9252206
    Abstract: The cost of liquid phase epitaxial growth of a monocrystalline silicon carbide is reduced. A feed material 11 is such that when a surface layer thereof containing a polycrystalline silicon carbide with a 3C crystal polymorph is subjected to X-ray diffraction, a diffraction peak corresponding to a (111) crystal plane and a diffraction peak other than the diffraction peak corresponding to the (111) crystal plane are observed as diffraction peaks corresponding to the polycrystalline silicon carbide with a 3C crystal polymorph.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: February 2, 2016
    Assignee: TOYO TANSO CO., LTD.
    Inventors: Satoshi Torimi, Satoru Nogami, Tsuyoshi Matsumoto
  • Patent number: 9236405
    Abstract: An array substrate, a manufacturing method thereof and a display device are provided. In the manufacturing method, the needed patterns can be formed by just three photolithography processes, wherein the semiconductor layer and the etch stop layer are formed by just one photolithography process. The method reduces one photolithography process compared to the method of the state of the art, which forms the pattern of the semiconductor layer and the etch stop layer by two photolithography processes respectively, thereby greatly reducing the manufacturing cost and improving the production efficiency.
    Type: Grant
    Filed: November 23, 2012
    Date of Patent: January 12, 2016
    Assignee: BOE TECHNOLOG GROUP CO., Ltd.
    Inventor: Xiang Liu
  • Patent number: 9219159
    Abstract: A method for forming an oxide semiconductor film having favorable semiconductor characteristics is provided. In addition, a method for manufacturing a semiconductor device having favorable electric characteristics, with use of the oxide semiconductor film is provided. A method for forming an oxide semiconductor film including the steps of forming an oxide semiconductor film, forming a hydrogen permeable film over and in contact with the oxide semiconductor film, forming a hydrogen capture film over and in contact with the hydrogen permeable film, and releasing hydrogen from the oxide semiconductor film by performing heat treatment. Further, in a method for manufacturing a semiconductor device, the method for forming an oxide semiconductor film is used.
    Type: Grant
    Filed: March 16, 2012
    Date of Patent: December 22, 2015
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yuki Imoto, Tetsunori Maruyama, Toru Takayama
  • Patent number: 9190324
    Abstract: A manufacturing method for a micro bump structure includes the following steps as follows. A substrate is provided and a under bump metallurgy (UBM) is formed on the substrate for accommodating a solder ball. A buffer layer is disposed on the substrate and then the solder ball is disposed on the UBM. Finally, the solder ball is grinded in order get the height reduced to a predetermined height.
    Type: Grant
    Filed: April 2, 2013
    Date of Patent: November 17, 2015
    Assignee: CHIPMOS TECHNOLOGIES INC.
    Inventor: Tsung Jen Liao
  • Patent number: 9178085
    Abstract: Techniques are described for forming a waveguide photodetector. In one example, a method of forming a waveguide photodetector includes forming a waveguide on a substrate, e.g., silicon on insulator, depositing a first oxide coating over the waveguide and on the SOI substrate, creating a seed window through the first oxide coating to a bulk silicon layer of the SOI substrate, depositing a photodetector material into the seed window and on top of the first oxide coating over the waveguide, depositing a second oxide coating over the photodetector material and over the first oxide coating deposited over the waveguide and on the SOI substrate, and applying thermal energy to liquefy the photodetector material.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: November 3, 2015
    Inventor: Bing Li