Abstract: A method for forming a via in a damascene process. In one embodiment, the present method comprises depositing a material into a via formed using a damascene process. More particularly, in one embodiment, the material which is comprised of a substantially conformal material which has an etch selectivity with respect to the substrate into which the via is formed. Furthermore, in this embodiment, the material is deposited along the sidewalls and the base of the via. Next, the present embodiment etches material such that the via is formed having a profile conducive to the adherence of overlying material thereto. In this embodiment, the etching of the material is performed without substantially etching the substrate into which the via is formed. In so doing, the present embodiment creates a via in a damascene process which allows for the formation of a metallized interconnect which is substantially free of voids.

Abstract: A digital eddy current proximity system including a digital impedance measuring device for digitally measuring the proximity probes impedance correlative to displacement motion and position of a metallic target object being monitored. The system further including a cable-length calibration method, an automatic material identification and calibration method, a material insensitive method, an inductive ratio method and advanced sensing characteristics.

Abstract: The present invention discloses a method of manufacturing a dual chip package using tape wiring boards. According to the method, an upper tape wiring board, a lower tape wiring board, and a lead frame are prepared. Each of the tape wiring boards includes a polymeric tape having windows patterned therein, metal patterns formed on the lower surface of the polymeric tape at either sides of said windows. The metal patterns have pad connection portions exposed through the window. Lead connection portions extend outwardly from said polymeric tape. An adhesive layer is formed on the lower surface of the tape. A lower chip is attached to a lower surface of the die pad. The lower chip includes an active surface having a plurality of electrode pads at approximately the center and a rear surface attached to the lower surface of the die pad. An upper chip is attached to an upper surface of the die pad.