Abstract: A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.

Abstract: A charged particle beam exposure system has a blanking aperture array (31) having groups of apertures (53) controlled by shift registers (75), wherein different inputs (C) to the shift registers influence a different number of apertures. Charged particle beamlets traversing the apertures are scanned across a charged particle sensitive substrate in synchronism with a clock signal of the shift registers.

Abstract: An apparatus for spectrometry that includes a spectrometer configured for second order focusing and capable of 2? azimuthal collection.

Abstract: A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.

Abstract: To implant a carbon-containing species, a gas containing carbon is ionized in the ion chamber. The ionization of this gas will typically produce a number of ionized species. However, many of these resulting ionized species are not beneficial to the desired implant, as they contain only non-carbon atoms. These species must be eliminated before the implantation, leaving only carbon-based species. However, the current of the desired species may be low, thereby requiring extra energy or time to implant the desired dosage of carbon into a substrate. This can be improved through the use of a second gas. This second gas is used to dilute the primary carbon-containing gas to be ionized in the ion chamber. By incorporating this dilution gas, more of the resulting ionized species are beneficial to the carbon implantation.

Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit 109 in an energy selecting diaphragm 108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 113 will have a reduced energy spread. Deflection unit 112 deflects the beam to the optical axis 101. One can also elect to deflect a beam 105 going through the middle of the lens toward the optical axis and having, for example, greater current. The energy dispersed spot is imaged on the slit by a deflector 111. When positioning the energy dispersed spot on the slit, central beam 105 is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm.

Abstract: In an ion source that generates ions by matrix-assisted laser desorption (MALDI), ion acceleration diaphragms having apertures though which ions are accelerated and which have become contaminated by matrix material, are cleaned by temporarily heating the diaphragms. During the cleaning process, the sample support plate is moved aside but remains in the ion source housing, and the heating is preferably limited to regions surrounding the apertures in the diaphragms. In one embodiment, the diaphragms are heated by irradiation generated by infrared laser diodes.

Abstract: A charged particle beam device is described. The charged particle beam device includes an emitter adapted for emitting a primary charged particle beam, a specimen location adapted for holding a specimen, from which secondary and/or backscattered charged particles are released on impingement of the primary charged particle beam, a detection unit adapted for detecting the secondary particles and/or secondary particles, and a beam guiding unit adapted for guiding the primary charged particle beam to the detection unit for impingement of a primary charged particle beam on the detection unit.

Abstract: The present invention relates to an ion trap with a large trap capacity. A mass spectrometer comprises a first linear ion trap that performs mass selective ejection, and a second linear ion trap that accumulates and then mass selectively ejects ions ejected from the first linear ion trap. Directions of resonant excitation of ions of the first linear ion trap and of the second linear ion trap are orthogonal. Compared to conventional art, sensitivity is significantly improved.

Abstract: Aspects of the invention are directed to piezoresponse force analysis of a material. A stimulus signal including a first frequency component is applied to a contact point on the material such that the stimulus signal actuates a portion of the material to experience a motion as a result of a piezoelectric effect. A resonant device is coupled to the contact point such that the resonant device experiences a resonant motion at the first frequency component in response to the motion of the material, the resonant motion having a greater displacement than a displacement of the motion of the material, and is substantially unaffected by mechanical properties of the material at the contact point. The resonant motion of the resonant device is detected and processed to produce a measurement representing the piezoresponse of the material at the contact point.

Abstract: An apparatus is provided that precisely conduct ion beam etching to a sample having the properties of which easily change by electron beam irradiation with no loss of ease of operation and throughput. An apparatus includes an ion beam lens barrel and an electron beam lens barrel, which can observe or measure the conditions of a sample with an electron beam in the process of etching with an ion beam, wherein first, an observation image is obtained that includes the entire process area formed by secondary signals generated by an electron beam, secondly, an irradiation permit area and an irradiation inhibit area are defined in the observation image, and thirdly, electron beam irradiation is restricted only to the irradiation permit area.

Abstract: A focused ion beam device is described. The focused ion beam device includes an ion beam column including an enclosure for housing a gas field ion source emitter with an emitter area for generating ions, an electrode for extracting ions from the gas field ion source emitter, one or more gas inlets adapted to introduce a first gas and a second gas to the emitter area, an objective lens for focusing the ion beam generated from the first gas or the second gas, a voltage supply for providing a voltage between the electrode and the gas field ion source emitter, and a controller for switching between a first voltage and a second voltage of the voltage supply for generating an ion beam of ions of the first gas or an ion beam of ions of the second gas.

Abstract: Speed control of an induction motor is effected in digital fashion through use of a computer but without complex processing, and with a computer that need not be large in scale. This is accomplished by processing at least a speed command signal, actual speed signal and torque signal in analog fashion, enabling simplification of an induction motor speed control digital processing section which performs all other control operations in a digital manner. In a speed control network having a closed loop, a frequency-to-voltage converter, adder-subtractor, proportional integrator, polarity determining circuit absolute value circuit and voltage-to-frequency converter are constructed of circuitry operable on the basis of analog values, with all other circuits being constructed of circuitry operable on the basis of digital values.

Abstract: An induction motor controller which compensates for changes in primary resistance values and secondary resistance values that occur with changes in temperature. Multi-phase current and voltage values are detected at the motor input and converted into primary currents and voltages within an orthogonal system and are used to calculate equivalent and estimated equivalent values of magnetic flux. The flux values are used to generate an estimated value of rotary angular velocity of the induction motor, which is used as a basis for controlling in a feedback manner the generation of the command signals for the motor. The magnetic flux values generated in response to the orthogonal voltage and current values are sensitive to a predetermined primary resistance value and a predetermined secondary resistance value. Circuits for automatically changing the predetermined primary resistance value alone or together with the predetermined secondary resistance value, in response to ones of the flux values, are provided.

Abstract: A rotor position estimator for a switched reluctance motor (SRM) employs a flux-current map to determine whether the actual rotor angle is closer to, or farther from, axial alignment of stator and rotor poles than a reference angle .theta..sub.r. The flux-current map is a plot of reference flux .PSI..sub.r as a function of current for the reference angle .theta..sub.r. If a flux linkage estimate .PSI..sub.i is greater than the reference flux .PSI..sub.r, then the actual rotor angle is closer to alignment than the reference angle .theta..sub.r, and the flux-map comparator output is a logic level one. If the flux linkage estimate .PSI..sub.i is lower than the reference flux .PSI..sub.r, then the actual rotor angle is farther from alignment than the reference angle .theta..sub.r, and the flux-map comparator output is a logic level zero. When the result of the flux comparison causes the flux-current map comparator to change state, the actual rotor angle is equal to the reference angle .theta..sub.

Abstract: A variable speed control is provided for controlling a reversing permanent split capacitor motor in an automatic washer. The operation of the motor is controlled such that the motor will accelerate for a first predetermined time period and then coast with no power applied for a second predetermined time period. This generalized operation of the motor occurs in the spin cycle. In the agitate cycle, a logic decoding circuit uses a tach pulse signal indicative of the speed of the motor to provide a time for the motor to be on, and utilizes an AC line current zero crossing signal from a zero crossing detector to establish a time during which the motor is off, the motor on plus off time establishing a stroke rate for the agitate cycle.