Patents Examined by Demetruis Pretlow
  • Apparatus and method for testing semiconductor
    Patent number: 9921267
    Abstract: Provided is an apparatus for testing a semiconductor. The apparatus includes a chuck on which a wafer is disposed, a probe card disposed on the chuck to provide a test signal to the wafer, a sensor disposed in the probe card, a base unit connected to the probe card to transmit the test signal to the probe card, and a pressure device connecting the base unit to the probe card, the pressure device correcting deformation of the probe card.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: March 20, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sangboo Kang, MinJung Kim