Abstract: Multi-wavelength optical thermometry provides for non-contact measurement of the temperature of a sample where the front surface and the back surface of the sample are used in a interferometer to measure changes in optical path length. Laser beams at two different wavelengths are used and the beam phase of the two resultant interference signals is used to unambiguously measure the path length change over a broad temperature range.
Type:
Grant
Filed:
September 25, 1992
Date of Patent:
November 23, 1993
Assignee:
International Business Machines Corporation
Inventors:
David W. Abraham, William M. Holber, Joseph S. Logan, Hemantha K. Wickramasinghe