Abstract: A method and device for the laser drilling of laminates includes the use of a frequency-doubled Nd vanadate laser. The laser includes the following parameters: pulse width<40 ns, pulse frequency≧30 kHz for the metal layer and ≧20 kHz for the dielectric layer, and wavelength=532 nmn. Such a laser is used for the laser drilling of laminates which have at least one metal layer and at least one dielectric layer including an organic material.
Type:
Grant
Filed:
March 29, 2002
Date of Patent:
March 30, 2004
Assignee:
Siemens Aktiengesellschaft
Inventors:
Hubert De Steur, Marcel Heerman, Jozef Van Puymbroeck