Abstract: The present invention provides an organic ultra-thin film firmly fixed to a substrate with the film thickness ranging from tens of nm to hundreds of nm. The organic ultra-thin film comprises polymers fixed on a substrate by M2—O—A— bond in which A represents an Si, Ge, Ti, Sn or Zr atom in the polymer, and M2 represents an atom in the substrate) or by a coordinate bond, the polymers are combined with each other by —A1—O—A1?— bond in which A1 and A1? are Si, Ge, Ti, Sn, Zr or S or by a coordinate bond.