Patents Examined by Eric B. Fuller
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Patent number: 7189432Abstract: A deposition system includes a process chamber for conducting an ALD process to deposit layers on a substrate. In one embodiment, instead of varying the gas flux on a substrate in the chamber by controlling the flow of gas upstream of the process chamber, the gas flux on the substrate is controlled by controlling the conductance between the process chamber and a lower pressure volume outside the process chamber. The flux of the gas on the substrate varies inversely with the chamber conductance, such that the flux of the gas on the substrate increases when the conductance decreases. Various methods of performing an ALD process by controlling the conductance are disclosed as well as various structures for controlling the conductance.Type: GrantFiled: December 19, 2001Date of Patent: March 13, 2007Assignee: Novellus Systems, Inc.Inventors: Tony P. Chiang, Karl F. Leeser, Jeffrey A. Brown, Jason E. Babcoke
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Patent number: 7094443Abstract: Wheel track ruts form under moving sprinklers and the depth of ruts is reduced and water infiltration is increased by using solid polymeric products. Solid polymeric products containing water soluble polymer are located over each wheel track. Sprinkler water contacts and dissolves the solid polymeric products, carrying water soluble polymer into the wheel track.Type: GrantFiled: October 21, 2002Date of Patent: August 22, 2006Inventor: John Kevin Loucks
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Patent number: 7081270Abstract: A heterogeneous mixture produced by blending aliphatic or cyclic organic compounds with carboxylic acids of chemical structure R—COOH and applied to soils in a manner to produce high levels of dust and erosion control, and soil stabilization. Alternatively, a heterogeneous mixture may be produced by blending aliphatic or cyclic organic compounds with polyolefins of chemical structure CnH2n or R—C2nH3n, and applied to soils in a manner to produce high levels of dust control and soil stabilization. The aliphatic and cyclic compounds act as plasticizers and carriers for the carboxylic acids or polyolefin compounds. When applied to soil the carrier provides a mechanism for the carboxylic acid or polyolefin to penetrate the soil and also acts as a dust suppressing weighting agent. The plasticized carboxylic acid and/or polyolefin provides a durable, reworkable binder that associates small particulates while stabilizing soil and aggregate.Type: GrantFiled: June 17, 2004Date of Patent: July 25, 2006Assignee: Midwest Industrial Supply, Inc.Inventors: Todd R. Hawkins, Leland E. Beyersdorff, Robert W. Vitale
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Patent number: 7045170Abstract: A method for depositing an anti-stiction coating on a MEMS device comprises reacting the vapor of an amino-functionalized silane precursor with a silicon surface of the MEMS device in a vacuum chamber. The method can further comprise cleaning the silicon surface of the MEMS device to form a clean hydroxylated silicon surface prior to reacting the precursor vapor with the silicon surface. The amino-functionalized silane precursor comprises at least one silicon atom, at least one reactive amino (or imine) pendant, and at least one hydrophobic pendant. The amino-functionalized silane precursor is highly reactive with the silicon surface, thereby eliminating the need for a post-process anneal step and enabling the reaction to occur at low pressure. Such vapor-phase deposition of the amino-functionalized silane coating provides a uniform surface morphology and strong adhesion to the silicon surface.Type: GrantFiled: April 3, 2002Date of Patent: May 16, 2006Assignee: Sandia CorporationInventors: Matthew G. Hankins, Thomas M. Mayer, David R. Wheeler
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Patent number: 7037552Abstract: System and method for coating a medical appliance are provided. In accord with one embodiment, a system for applying a coating to a medical appliance having accessible patterned surfaces is provided. The system may include: a processor, an appliance support, and a solenoid type fluid dispensing head having an electromagnetically controlled valve. In the system, the appliance support may be adapted to hold the medical appliance and to provide direct access for a coating to contact the exposed external patterned surfaces of the medical appliance. The solenoid type fluid dispensing head in this system may move with respect to the medical appliance and may be in communication with a source of coating and with the processor. The processor in this system may contain commands that instruct the solenoid type fluid dispensing head to force coating onto the accessible patterned surfaces of the medical appliance in a pattern that correlates with the accessible patterned surfaces of the medical appliance.Type: GrantFiled: December 15, 2003Date of Patent: May 2, 2006Assignee: Boston Scientific SciMed, Inc.Inventors: Sheng-ping Zhong, Dennis R. Boulais, Praveen Kulkarni, Ron Sahatijian
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Patent number: 7033640Abstract: A method of coloring cut gemstones introduces metals or metal oxides into a surface layer by means of heat treatment. During the heat treatment the gemstones are laid on a solid plate and the metals or metal oxides form a substantial constituent of the plate. The surface of the gemstone is protected from direct content with the metals and metal oxides in the plate by a layer containing non-coloring oxides.Type: GrantFiled: December 12, 2002Date of Patent: April 25, 2006Assignee: D. Swarovski & CoInventors: Thomas Rauch, Martin Würtenberger
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Patent number: 7029722Abstract: A conductive polymer composite, comprising a polymer and polypyrrole and derivatives thereof. The composite is manufactured by first diffusing an oxidant such as iodine into the polymer, and then diffusing pyrrole or a pyrrole derivative vapor into the impregnated polymer, resulting in an in situ chemical oxidative polymerization of pyrrole at the oxidant site. The conductivity of the composite foam can be effectively controlled between 10?7 to 10?1 S/cm, inclusive.Type: GrantFiled: November 13, 2001Date of Patent: April 18, 2006Assignee: The University of ConnecticutInventors: Robert A. Weiss, Can Erkey, Suresh L. Shenoy, Daniel Cohen
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Patent number: 7018679Abstract: A change station for atomizer (7) and other tools that contains a carousel-like rotatable and/or linearly movable mount (112) is arranged on the wall of the cabin of a coating installation. The arrangement is such that the storage locations of the change station are accessible both to the coating machine (151) in the cabin and from outside the cabin.Type: GrantFiled: March 27, 2002Date of Patent: March 28, 2006Assignee: Dürr Systems, Inc.Inventors: Hans J. Nolte, Harry Krumma, Frank Herre, Michael Baumann, Stefano Giuliano, Rainer Melcher, Juergen Haas
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Patent number: 7014885Abstract: A device and method for depositing a material of interest onto a receiving substrate includes a first laser and a second laser, a receiving substrate, and a target substrate. The target substrate comprises a laser transparent support having a back surface and a front surface. The front surface has a coating that comprises the source material, which is a material that can be transformed into the material of interest. The first laser can be positioned in relation to the target substrate so that a laser beam is directed through the back surface of the target substrate and through the laser-transparent support to strike the coating at a defined location with sufficient energy to remove and lift the source material from the surface of the support. The receiving substrate can be positioned in a spaced relation to the target substrate so that the source material is deposited at a defined location on the receiving substrate.Type: GrantFiled: July 19, 2000Date of Patent: March 21, 2006Assignee: The United States of America as represented by the Secretary of the NavyInventors: Alberto Piqué, Raymond Auyeung, James Fitzgerald, Douglas B. Chrisey, Huey-Daw Wu, Paul Kydd, David L. Richard
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Patent number: 7011866Abstract: A reaction gas made of a hydrogen-based carrier gas and a silane gas or the like is brought in contact with a heated catalyzer of tungsten or the like, and a DC voltage not higher than a glow discharge starting voltage or a voltage produced by superimposing an AV voltage or an RF voltage on the DC voltage is applied on the produced reactive species, so as to provide kinetic energy and carry out vapor growth of a predetermined film on a substrate, thereby providing a film of high quality.Type: GrantFiled: January 24, 2000Date of Patent: March 14, 2006Assignee: Sony CorporationInventors: Hideo Yamanaka, Kikuo Kaise
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Patent number: 7008672Abstract: The present invention relates to a method for manufacturing a diamond composite from diamond particles, comprising the steps of forming a work piece, heating the work piece and controlling the heating temperature and heating time so that a certain desired amount of graphite is created by graphitization of diamond particles, thereby creating an intermediate body, and infiltrating silicon or silicon alloy into the intermediate body. The invention also relates to a diamond composite produced by this method.Type: GrantFiled: December 15, 2003Date of Patent: March 7, 2006Assignee: Skeleton Technologies AGInventors: Sergey Konstantinovitch Gordeev, Sergey Germanovitch Zhukov, Lija Vladimirovna Danchukova, Thommy Ekström
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Patent number: 6998153Abstract: A method that includes placing a wafer within a process chamber, generating a nitrogen plasma that is remote from the process chamber, nitriding a surface of the wafer with the nitrogen plasma, depositing a nickel film over the nitrided silicon substrate surface, and annealing the nickel film to form NiSi.Type: GrantFiled: January 27, 2003Date of Patent: February 14, 2006Assignee: Applied Materials, Inc.Inventors: Mei-Ling Chiang, Thai-Cheng Chua
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Patent number: 6994894Abstract: A method of depositing a solid film on a substrate in which a stream comprising particles suspended in a transport gas is moved through a heating zone. The particles are combined with the transport gas from a powder feeder operatively coupled to a gas flow tube. The particle stream is directed toward the heating zone by ejecting the powder stream from a nozzle connected to a distal end of the gas flow tube. A radiation source is directed at the suspended particles as they move through the heating zone so that the particles heated to a molten state. The droplets are undercooled in a cooling zone before impact with the substrate.Type: GrantFiled: April 20, 2001Date of Patent: February 7, 2006Assignee: Vanderbilt UniversityInventor: William Hofmeister
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Patent number: 6989173Abstract: The present invention comprises a polymeric epoxy patching resin containing metal intercalated AlSiO structures. The AlSiO structures are typically nanoclays, and the preferred metals are Cr, Sn and Zn, and mixtures thereof. The patching resin is applied to damaged mica tapes, where the metal intercalated nanoclays penetrate the damaged area, leaving a homogenous patch. The present invention may also be used to thicken an area of insulating tape.Type: GrantFiled: September 12, 2003Date of Patent: January 24, 2006Assignee: Siemens Westinghouse Power CorporationInventors: James D. B. Smith, F. Tim Emery
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Patent number: 6984417Abstract: A novel lead zirconium titanate (PZT) material having unique properties and application for PZT thin film capacitors and ferroelectric capacitor structures, e.g., FeRAMs, employing such thin film material. The PZT material is scalable, being dimensionally scalable, pulse length scalable and/or E-field scalable in character, and is useful for ferroelectric capacitors over a wide range of thicknesses, e.g., from about 20 nanometers to about 150 nanometers, and a range of lateral dimensions extending to as low as 0.15 ?m. Corresponding capacitor areas (i.e., lateral scaling) in a preferred embodiment are in the range of from about 104 to about 10?2 ?m2. The scalable PZT material of the invention may be formed by liquid delivery MOCVD, without PZT film modification techniques such as acceptor doping or use of film modifiers (e.g., Nb, Ta, La, Sr, Ca and the like).Type: GrantFiled: August 13, 2001Date of Patent: January 10, 2006Assignee: Advanced Technology Materials, Inc.Inventors: Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston, Daniel J. Vestyck, Thomas H. Baum
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Patent number: 6982103Abstract: The invention a chemical vapor deposition method of forming a barium strontium titanate comprising dielectric layer having a varied concentration of barium and strontium, and/or titanium, within the layer. A substrate is positioned within a chemical vapor deposition reactor. Barium and strontium are provided within the reactor by flowing at least one metal organic precursor to the reactor. Titanium is provided within the reactor. One or more oxidizers are flowed to the reactor. In one aspect, conditions are provided within the reactor to be effective to deposit a barium strontium titanate comprising dielectric layer on the substrate from the reactants.Type: GrantFiled: January 30, 2004Date of Patent: January 3, 2006Assignee: Micron Technology, Inc.Inventors: Cem Basceri, Nancy Alzola
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Patent number: 6960373Abstract: A solder jet apparatus is disclosed. The solder jet apparatus is a continuous mode solder jet that includes a blanking system and raster scan system. The use of the raster scan and blanking systems allows for a continuous stream of solder to be placed anywhere on the surface in any desired X-Y plane. This allows for greater accuracy as well as greater product throughput. Additionally, with the raster scan system, repairs to existing soldered surfaces can be quickly and easily performed using a map of the defects for directing the solder to the defects.Type: GrantFiled: August 30, 2001Date of Patent: November 1, 2005Assignee: Micron Technology, Inc.Inventor: Warren M. Farnworth
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Patent number: 6958174Abstract: The present invention provides a solid material comprising a solid substrate having a thin metal film and methods for producing the same. The method generally involves using a plurality self-limiting reactions to control the thickness of the metal film.Type: GrantFiled: March 10, 2000Date of Patent: October 25, 2005Assignee: Regents of the University of ColoradoInventors: Jason W. Klaus, Steven M. George
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Patent number: 6936299Abstract: A method and device for layer thickness determination allows for the layer thickness to be determined in situ during the coating process. This is achieved using a sensor which has an electrical property which, as a result of the coating process, changes in a manner which is representative of the layer thickness which has been reached. As such, this property can be measured.Type: GrantFiled: May 9, 2003Date of Patent: August 30, 2005Assignee: Siemens AktiengesellschaftInventors: Ulrich Bast, Roman Beyer, Ralph Reiche
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Patent number: 6936311Abstract: A method for creating a microarray of biomaterial uses a source of laser energy, a receiving substrate, and a target substrate. The target substrate comprises a laser-transparent support having a laser-facing surface and a support surface. The target substrate also comprises a composite material having a back surface in contact with the support surface and a front surface. The composite material comprises a mixture of the biomaterial to be deposited and a matrix material. The matrix material is a material that has the property that, when it is exposed to laser energy, it desorbs from the laser-transparent support. The source of laser energy is positioned in relation to the target substrate so that laser energy is directed through the laser-facing surface of the target substrate and through the laser-transparent support to strike the composite material at a defined target location. The receiving substrate is positioned in a spaced relation to the target substrate.Type: GrantFiled: February 8, 2002Date of Patent: August 30, 2005Assignee: The United States of America as represented by the Secretary of the NavyInventors: Bradley R. Ringeisen, Douglas B. Chrisey, Alberto Pique, R. Andrew McGill, David Krizman