Abstract: An apparatus for transferring a small amount of fluid has at least one series of vibration pump units each having a fluid transfer pipe designed to perform a respirating action by the operation of a vibrator which vibrates in response to application of a high-frequency voltage. The fluid transfer pipes are connected in series via fluid diodes which serve to enable the fluid to flow only in one direction, while resisting reversing of the fluid, so that the fluid is transferred in one direction through the successive fluid transfer pipes. In order to minimize the pulsation of the fluid pressure at the downstream end of the apparatus, the vibrators of the pump unit are excited with predetermined phase differentials. Additional fluid diode is connected to the outlet end of the most downstream pump unit.