Patents Examined by Eugene R. Larochi
  • Patent number: 4952027
    Abstract: A film forming device includes an optical device which has a light source, and a first optical system for projecting light beams split by a light splitting device. The light splitting device and the optical system steadily maintain the intensity center of the light beam projected onto a detecting surface of a light detector at an invariable position without positional fluctuation independently of fluctuation of an emitting angle to a thin film of the light source.
    Type: Grant
    Filed: January 11, 1989
    Date of Patent: August 28, 1990
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kenji Saito, Ken Eguchi, Haruki Kawada, Yoshinori Tomida, Toshihiko Miyazaki, Yukuo Nishimura, Takashi Nakagiri