Abstract: Embodiments discussed herein refer to using LiDAR systems that uses a rotating polygon with a multi-facet mirror. Such multi-facet galvanometer mirror arrangements generate a point map that has reduced curvature.

Abstract: Methods and apparatus for an upper reflector assembly for use in a process chamber are provided herein. In some embodiments, an upper reflector assembly for use in a process chamber includes a reflector mounting ring; and upper reflector plate coupled to the reflector mounting ring and having an upper surface and lower surface, wherein the lower surface includes a plurality of linear channels extending substantially parallel to each other across the lower surface, and wherein the upper reflector plate includes air cooling slots extending from the upper surface to the lower surface.

Abstract: A MEMS device is obtained by forming a temporary biasing structure on a semiconductor body, and forming an actuation coil on the semiconductor body, the actuation coil having at least one first end turn, one second end turn and an intermediate turn arranged between the first and the second end turns and electrically coupled to the first end turn through the temporary biasing structure. In this way, the intermediate turn is biased at approximately the same potential as the first end turn during galvanic growth, and, at the end of growth, the actuation coil has an approximately uniform thickness. At the end of galvanic growth, portions of the temporary biasing structure are selectively removed to electrically separate the first end turn from the intermediate turn and from a dummy biasing region adjacent to the first end turn.

Abstract: [Object] To provide (i) a two-lens optical system, (ii) a beam combining module, (iii) a projector, and (iv) a method for assembling a two-lens optical system each of which allows for an improved lens positioning sensitivity [Means to Attain the Object] A two-lens optical system (100) includes a first lens (1) for use in collimation adjustment, the first lens being configured to move along only an optical axis of light emitted from a light source; and a second lens (2) for use in beam steering, the second lens being configured to move along only two axes perpendicular to the optical axis.

Abstract: Mirror control circuitry operates to control a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor causes the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.

Abstract: In an optical device, a movable unit includes a main body portion, a frame portion that surrounds the main body portion with a predetermined interval from the main body portion, and a plurality of connection portions which connect the main body portion and the frame portion to each other. A width of each of the connection portions is larger than an interval between the main body portion and the frame portion, and is smaller than a distance from a connection position with each of the connection portions in the frame portion to any of a connection position with each of a pair of first torsion support portions and a connection position with each of a pair of second torsion support portions.

Abstract: An apparatus that extends a field-of-view (FOV) of a camera of a camera device. For instance, the apparatus may include a frame and a visor. The frame may include a first side portion, a second side portion, a top portion, a bottom portion, and an opening for receiving a front of the camera device. The visor may include a first support that extends from the first side member, a second support that extends from the second side member, and a transverse member that extends between the first support and the second support. When the apparatus is attached to the camera device, the traverse member is located at least partly within the FOV of the camera. Additionally, the traverse member includes a mirror that reflects light from below and just in front of the camera device to the camera. This way, the FOV of the camera includes the area below and just in front of the camera device.

Abstract: An actuator device includes: a support portion; a movable portion; a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis; and a first wiring provided on the first connection portion. The first wiring includes a first main body formed of a metal material having a Vickers hardness of 50 HV or more. The first main body includes a first surface facing the first connection portion and a second surface other than the first surface. The second surface has a shape in which a curvature is continuous over the entire second surface in a cross-section perpendicular to an extension direction of the first wiring.

Abstract: A light deflector includes a movable unit having a reflective surface, an elastic member that supports the movable unit in a tiltable manner about a tilting axis, and a supporter that supports the elastic member. The elastic member has a first connection segment whose rigidity changes continuously, and is connected to the movable unit at the first connection segment. The rigidity changes continuously between the elastic member and the movable unit via the first connection segment. The elastic member includes a linear segment having a substantially fixed width, the elastic member has a second connection segment that is provided between the linear segment and the supporter and that connects the linear segment and the supporter, a width of the second connection segment gradually increases toward the supporter, and a maximum width of the first connection segment is greater than a maximum width of the second connection segment.

Abstract: A scanner and a method for controlling the scanner for a Lidar system are provided. The method comprises: producing a trigger signal by a positional sensor of the scanner; generating a single drive signal comprising a first component at a first frequency and a second component at a second frequency, the first component and the second component are superposed with a fixed phase relationship with aid of the trigger signal; transmitting the single drive signal to the scanner, and the scanner has resonant responses at the first frequency; and actuating the scanner to move in a first periodic motion at the first frequency about a first axis, and move in a second periodic motion at the second frequency about a second axis.

Abstract: A microelectromechanical system (MEMS) device including an oscillator structure configured to oscillate about a rotation axis; a frame that is rotationally fixed, the frame including a frame recess within which the oscillator structure is suspended; and a suspension assembly mechanically coupled to and between the oscillator structure and the frame, the suspension assembly configured to suspend the oscillator structure within the frame recess. The suspension assembly includes a central support beam that extends lengthwise along the rotation axis, the central support beam being mechanically coupled to and between the oscillator structure and the frame; a first outer support beam mechanically coupled to the oscillator structure and laterally displaced from the central support beam in a first direction orthogonal to the rotation axis; and at least one first interior support beam directly coupled to and between the central support beam and the first outer support beam.

Abstract: Provided is an image display device including an optical scanner configured to scan light emitted from a light source, a parallel light generator configured to generate the scanned light as parallel light, a prism configured to refract the parallel light, and a light direction changer including a plurality of points whereon the parallel light refracted by the prism is incident and configured to reflect or diffract the parallel light and change a traveling direction of the parallel light, wherein the prism is provided on a path of each light traveling from the optical scanner to the light direction changer to adjust an optical path difference of parallel light incident on each of the plurality of points of the light direction changer.

Abstract: A microelectromechanical device includes a fixed structure defining a cavity with a tiltable structure that is elastically suspended in the cavity. A piezoelectrically driven actuation structure, interposed between the tiltable structure and the fixed structure, is biased for causing rotation of the tiltable structure about a first rotation axis belonging to a horizontal plane in which the tiltable structure rests. The actuation structure includes a pair of driving arms carry respective regions of piezoelectric material and are elastically coupled to the tiltable structure on opposite sides of the first rotation axis through respective elastic decoupling elements. The elastic decoupling elements exhibit stiffness in regard to movements out of the horizontal plane and compliance to torsion about the first rotation axis.

Abstract: A scanning device includes an MEMS mirror mechanism that swings a mirror with respect to a first axial line as a central line and swings the mirror with respect to a second axial line as a central line, and a control unit that generates a first drive signal for swinging the mirror with respect to the first axial line, and a second drive signal for swinging the mirror with respect to the second axial line. The control unit generates the first drive signal and the second drive signal so that m times of reciprocation of an irradiation region in a first direction and one time of reciprocation of the irradiation region in a second direction correspond to each other by repeating generation of a second signal element constituting the second drive signal to correspond to a first signal element in a period equal to or less than one cycle in the first drive signal.

Abstract: A light deflector includes a stationary part; a movable unit having a reflecting surface; a connecting part between the movable unit and the stationary part; a drive unit disposed on a first surface of the connecting part, the drive unit configured to deform the connecting part to oscillate the movable unit; and a rib disposed on a second surface of the connecting part, the second surface being an opposite surface of the first surface. The rib includes a portion whose longitudinal direction is orthogonal to a direction at which the connecting part is bent.

Abstract: A display system includes an optical element through which light diverges and an imaging optical system configured to form an image by projecting diverging light diverging through the optical element. In the display system, the image formed by the imaging optical system is visually recognized by a viewer, and a condition in an equation tan 0?(T×B)/(S×O) is satisfied, where ? denotes a divergence angle of the optical element, T denotes distance between the image forming optical system and the formed image, B denotes a range of an eye box that is an area through which the formed image can visually be recognized, S denotes distance between the formed image and a viewpoint of the viewer of the formed image, and O denotes distance between the optical element and the image forming optical system. In the above equation, each distance indicates length of an optical path that passes through a center of an image formed by the light when an object is observed from a reference eyepoint.

Abstract: A disclosed reluctance actuator includes a magnetizable stator, at least one coil, and a yoke. The coil is configured to generate a magnetic field in the stator and the yoke is configured to partially close the magnetic flux of the stator. The yoke is further configured as a movable element that performs lifting/tilting movements. An actuator system including a non-magnetic housing and a reluctance actuator is also disclosed. In the actuator system, the reluctance actuator may be at least partially located in the non-magnetic housing. A method of performing lifting/tilting movements of the yoke of a reluctance actuator is also disclosed. The method includes controlling a current in the at least one coil of the reluctance actuator to thereby generate a magnetic field in the stator. The magnetic field generates a lifting/tilting movement of the yoke due to interaction between the magnetic field and the yoke.

Abstract: An opposing substrate as a substrate for an electro-optical device includes a transparent base member and a light shielding portion disposed on a region between pixels on the base member. The light shielding portion includes a first reflective film and a second reflective film that is disposed to overlap the first reflective film and has a reflection rate lower than that of the first reflective film, and a first protective film that covers the first reflective film is provided between the first reflective film and the second reflective film.

Abstract: An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.

Abstract: A super-resolution scanning display. The scanning display includes a light source, a conditioning assembly, and a scanning mirror assembly. The light source is configured to emit source light from a plurality of columns of emitters formed along a first dimension, including at least a first column of emitters emitting in a first band of light and a second column of emitters emitting in a second band of light which are offset along the first dimension by a fraction of an emitter width and offset along a second dimension—that is orthogonal to the first dimension—by greater than the emitter width. The conditioning assembly receives and conditions the source light. The scanning mirror assembly scans the conditioned light along the second dimension to generate a portion of an image at a first location with a resolution that is more than a first threshold number of emitters in a unit angle in the first dimension.