Abstract: A technique relates to an MRAM system. A conformal film covers trenches formed in an upper material. The upper material covers conductive islands in a substrate. The conformal film is selectively etched to leave sidewalls on the trenches. The sidewalls are etched into vertical columns self-aligned to and directly on top of the conductive islands below. A filling material is deposited and planarized to leave exposed tops of the vertical columns. An MTJ element is formed on top of the filling material and exposed tops of the vertical columns. The MTJ element is patterned into lines corresponding to the vertical columns, and each of the lines has a line MTJ element self-aligned to one of the vertical columns. Line MRAM devices are formed by patterning the MTJ element into the lines. Each of line MRAM devices respectively include the line MTJ element self-aligned to the one of the vertical columns.
Type:
Grant
Filed:
June 29, 2015
Date of Patent:
March 29, 2016
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventors:
Anthony J. Annunziata, Joel D. Chudow, Michael C. Gaidis, Rohit Kilaru
Abstract: The present invention relates to a process for fabricating integrated circuit system. More particularly, the process allows for fabrication of highly integrated system-on-a-chip modules through heterogeneous integration of different semiconductor technologies wherein alignment targets on the base semiconductor are used for precise lateral positioning of device structures above.
Type:
Grant
Filed:
July 16, 2007
Date of Patent:
January 25, 2011
Assignee:
HRL Laboratories, LLC
Inventors:
Kenneth R. Elliott, Peter David Brewer, Yakov Royter
Abstract: Disclosed are an image sensor package and its manufacturing method. As an example, an infrared ray protection glass is positioned directly on an image sensing region of an image sensor die. An electrically conductive wire and so forth located outside the image sensing region are encapsulated. At this time, one surface of the infrared ray protection glass is exposed outwardly. A mount holder to which a barrel with lenses is coupled is adhered on a surface of the encapsulant outside the infrared ray protection glass. The mount holder has a similar width to that of the image sensor die. Accordingly, the overall width of the image sensor package can become reduced, and the electrically conductive wire is protected against oxidization because it is surrounded by the encapsulant.
Abstract: A barrier layer for a semiconductor device is provided. The semiconductor device comprises a dielectric layer, an electrically conductive copper containing layer, and a barrier layer separating the dielectric layer from the copper containing layer. The barrier layer comprises a silicon oxide layer and a dopant, where the dopant is a divalent ion, which dopes the silicon oxide layer adjacent to the copper containing layer. A method of forming a barrier layer is provided. A silicon oxide layer with a surface is provided. The surface of the silicon oxide layer is doped with a divalent ion to form a barrier layer extending to the surface of the silicon oxide layer. An electrically conductive copper containing layer is formed on the surface of the barrier layer, where the barrier layer prevents diffusion of copper into the substrate.
Abstract: A capacitor structure having a re-oxide layer on a nitride layer, wherein an interface between the nitride layer and the re-oxide layer includes electron traps. Characteristics of the carrier traps control a voltage output of the device. The thickness of the nitride layer and the re-oxide layer also control the voltage output. The nitride layer and a re-oxide layer form a dielectric capacitor. The dielectric capacitor undergoes a trap filled limit voltage, wherein a consistent voltage is output for a plurality of currents.
Type:
Grant
Filed:
July 22, 2002
Date of Patent:
September 21, 2004
Assignee:
International Business Machines Corporation
Inventors:
Fen Chen, Rajarao Jammy, Baozhen Li, Sebastian T. Ventrone