Abstract: An image sensor having a wave guide includes a semiconductor substrate formed with a photodiode and a peripheral circuit region; an anti-reflective layer formed on the semiconductor substrate; an insulation layer formed on the anti-reflective layer; a wiring layer formed on the insulation layer and connected to the semiconductor substrate; at least one interlayer dielectric stacked on the wiring layer; and a wave guide connected to the insulation layer by passing through the interlayer dielectric and the wiring layer which are formed over the photodiode.
Type:
Grant
Filed:
April 12, 2010
Date of Patent:
February 5, 2013
Assignee:
Siliconfile Technologies Inc.
Inventors:
In-Gyun Jeon, Se-Jung Oh, Heui-Gyun Ahn, Jun-Ho Won