Patents Examined by Felisa H. Teshew
  • Method of self-assembly silicon quantum dots
    Patent number: 6375737
    Abstract: A method of self-assembling silicon quantum dots comprises the steps of providing a substrate, forming a thin amorphous Si film, and forming a plurality of Si quantum dots by controlling the energy and the shooting numbers of an excimer laser during an annealing process, wherein the excimer laser emits light on the thin amorphous Si film.
    Type: Grant
    Filed: April 5, 2001
    Date of Patent: April 23, 2002
    Assignee: National Science Council
    Inventors: An Shih, Chao-Yu Meng, Si-Chen Lee