Patents Examined by Frank E. Werner
  • Patent number: 6454519
    Abstract: A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate chambers. Each chamber may be separately pumped down. Thus, while a first cassette of wafers, from a first chamber is being accessed, a second cassette of wafers may be loaded in the second chamber and the second chamber pumped down. Each chamber is designed to minimize intrusion to a clean room. Thus a door to each chamber has a mechanism which, when opening the door, first moves the door slightly away from an opening in the chamber and then the door is moved down parallel to the chamber. After the door is opened, a cassette of wafers is lowered through the opening in a motion much like a drawbridge. The cassette may be pivoted within the chamber when the position from which wafers are accessed from the cassette differs from the position from which the cassette is lowered out of the chamber.
    Type: Grant
    Filed: March 7, 1997
    Date of Patent: September 24, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Masato M. Toshima, Phil M. Salzman, Steven C. Murdoch, Cheng Wang, Mark A. Stenholm, James Howard, Leonard Hall, David Cheng
  • Patent number: 6447237
    Abstract: A pivoting bed trailer to be towed behind a motor vehicle for transporting a wheeled vehicle includes a main frame having a trailer hitch at a front end for coupling with the motor vehicle and a rearward end that engages the ground in an inclined loading condition and supported horizontally above the ground in a transporting condition. The main frame includes longitudinally extending guide rails for laterally aligning the vehicle. A pivot frame frontally and laterally bounds the main frame and the guide rails and is connected to said main frame at a transverse pivotal connection. The pivot frame includes pair of laterally spaced wheel assemblies carried by leaf spring below the pivot frame forward of the pivotal connection whereby rotation of the pivot frame about the wheels raises and lowers the transverse pivotal connection and moves the main frame between the loading condition and the transporting condition.
    Type: Grant
    Filed: April 10, 2001
    Date of Patent: September 10, 2002
    Inventor: Ralph William Haynes
  • Patent number: 6447232
    Abstract: A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean processing chamber and at least one processing station disposed in the processing chamber. An interface section is disposed adjacent an interface end of the enclosure. The interface section includes at least one interface port through which a pod containing articles for processing are loaded or unloaded to or from the processor. The interface section is hygienically separated from the processing chamber since the interface section is generally not as clean as the highly hygienic processing chamber. An article extraction mechanism adapted to seal with the pod is employed. The mechanism is disposed to allow extraction of the articles contained within the pod into the processing chamber without exposing the articles to ambient atmospheric conditions in the interface section.
    Type: Grant
    Filed: December 19, 1997
    Date of Patent: September 10, 2002
    Assignee: Semitool, Inc.
    Inventors: Jeffry A. Davis, Kert L. Dolechek, Gary L. Curtis
  • Patent number: 6447233
    Abstract: An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base pivotable toward and away from the opening along an arcuate path and a closure plate linearly movably coupled to the base and configured to a seal the opening in the barrier. The closure plate is removable in synchronization with the pivoting of the base to traverse a horizontal linear path into contact with the barrier to close the opening. A vacuum system is provided in conjunction with the door assembly to extract particles from the sealed environment. A sensor disposed on the closure plate is operable to sense the position of wafers or other objects disposed adjacent the opening, to detect misalignment or omission thereof.
    Type: Grant
    Filed: August 18, 2000
    Date of Patent: September 10, 2002
    Assignee: PRI Automation, Inc.
    Inventor: Jeffrey M. Denker
  • Patent number: 6439822
    Abstract: A substrate processing apparatus comprises a processing section for performing processing for a substrate, a substrate carrier transfer section into/out of which a substrate carrier holding a plurality of substrates is carried, and a substrate transfer mechanism for taking an unprocessed substrate out of the substrate carrier carried into the substrate carrier transfer section to deliver it to the processing section and for receiving a processed substrate from the processing section to deliver it into the substrate carrier placed on the substrate carrier transfer section. The substrate carrier transfer section shifts the position of the substrate carrier between a first position at which the substrate carrier is carried to/from the outside and a second position at which the substrate in the substrate carrier is delivered to/from the substrate transfer mechanism.
    Type: Grant
    Filed: September 22, 1999
    Date of Patent: August 27, 2002
    Assignee: Tokyo Electron Limited
    Inventors: Yoshio Kimura, Issei Ueda, Mitiaki Matsushita, Kazuhiko Ito
  • Patent number: 6439823
    Abstract: A restraint device for restraining a vehicle to a loading dock is disclosed. The restraint device has a pivot member with a hooking member pivotable between an upwards operative position and a downwards inoperative position. The device also has springs for biasing the pivot member in the upwards operative position and an actuator member for bringing back the pivot member from the upwards operative position to the downwards inoperative position. Such a restraint device is securable to a loading dock equipped with a dock leveller which has a platform pivotable between a raised position and a lowered position and a lip. When the platform is in the lowered position, the lip is hanging in a pendant position and engages and presses on the top end of the actuator member thus maintaining the pivot member in the downwards inoperative position.
    Type: Grant
    Filed: February 27, 2001
    Date of Patent: August 27, 2002
    Assignee: Pro-Qual Inc.
    Inventor: Jimmy Lambert
  • Patent number: 6435809
    Abstract: A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the arms can be positioned over the other arm and handed off. In one version, a Bernoulli-style wand translates along a linear guideway and may be positioned over a paddle-style pickup arm. The wafer carried by the Bernoulli wand can be handed off to the paddle by shutting off the flow of gas from the Bernoulli wand jets. The two pickup arms may be mounted on linear slides and adapted to translate between a load/unload chamber and a processing chamber, or the guideway may be adapted to rotate to allow transfer of wafers to multiple processing chambers in a cluster system. One of the pickup arms is preferably an all-quartz Bernoulli-style pickup arm having a proximal arm portion and a distal wand.
    Type: Grant
    Filed: December 1, 2000
    Date of Patent: August 20, 2002
    Assignee: ASM America, Inc.
    Inventors: Dennis L. Goodwin, Eric R. Wood, Ivo Raaijmakers
  • Patent number: 6435799
    Abstract: A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the arms can be positioned over the other arm and handed off. In one version, a Bernoulli-style wand translates along a linear guideway and may be positioned over a paddle-style pickup arm. The wafer carried by the Bernoulli wand can be handed off to the paddle by shutting off the flow of gas from the Bernoulli wand jets. The two pickup arms may be mounted on linear slides and adapted to translate between a load/unload chamber and a processing chamber, or the guideway may be adapted to rotate to allow transfer of wafers to multiple processing chambers in a cluster system. One of the pickup arms is preferably an all-quartz Bernoulli-style pickup arm having a proximal arm portion and a distal wand.
    Type: Grant
    Filed: December 1, 2000
    Date of Patent: August 20, 2002
    Assignee: ASM America, Inc.
    Inventors: Dennis L. Goodwin, Eric R. Wood, Ivo Raaijmakers
  • Patent number: 6435802
    Abstract: A manual side loading refuse vehicle has a plurality of refuse storage compartments and an equal number of hopper compartments divided by means of a slide separator attached to a pack blade which moves together with said pack blade to compact the refuse. The wall dividing the refuse storage compartments is vertically and rearwardly tapered. A rear hinged door is provided for each refuse storage compartment. The door is unlatched and opened by means of a directional movement of a hydraulic cylinder and closes and latches by means of movement of the hydraulic cylinder in the opposite direction.
    Type: Grant
    Filed: December 30, 1999
    Date of Patent: August 20, 2002
    Assignee: Wittke Inc.
    Inventors: Lynn Donald Schreiber, Harvey James Aasman, Simon Huang
  • Patent number: 6431812
    Abstract: A device used in the tobacco-processing industry for emptying a container filled with rod-shaped articles into a magazine, in which the container has an open upper narrow side and an open wide front side. The device includes a container holder that accommodates the container and which can be tilted by 180° so that the container assumes an emptying position above the magazine. The container holder includes an article support comprising two support strips mounted for being adjacent and movable relative to the open narrow side of the container. An actuation mechanism is connected to the article support for effecting an opening movement in which the two support strips undergo a vertical drop movement and a horizontal spreading movement in which the two movable strips move in opposite directions to respective sides of the container to allow the articles to be released from the container.
    Type: Grant
    Filed: February 22, 2000
    Date of Patent: August 13, 2002
    Assignee: Hauni Maschinenbau AG
    Inventor: Piotr Budny
  • Patent number: 6431810
    Abstract: This invention related to a bearing for the drive ring of a ring drive of a silo reclaimer wherein the bearing is mounted on the drive ring for bearing relation with bearing surface of the ring drive and is made of a plastics bearing material. The plastics bearing material has a coefficient of friction on its bearing surface so as to operate without lubrication in use.
    Type: Grant
    Filed: July 28, 2000
    Date of Patent: August 13, 2002
    Inventor: Richard L. Weaver
  • Patent number: 6425724
    Abstract: A hand truck includes a frame having an upper portion and a lower portion, and a cargo support pivotally attached to the lower portion of the frame. A pair of wheels rotatably mounted to the frame, and an unload mechanism having a latched position and an unlatched position is pivotally coupled to the cargo support and the frame. In the unlatched position, pulling the upper portion of the frame rearward causes the unload mechanism to urge the load off of the cargo support.
    Type: Grant
    Filed: August 9, 2000
    Date of Patent: July 30, 2002
    Inventor: Gary L. Williamson
  • Patent number: 6422800
    Abstract: The system is for use in a front loader assembly for refuse vehicles, which include two spaced fork members which are secured to a cross-member, which in turn are supported by lift arms which move the load supported on the forks into the refuse truck. The system includes flexure beams which are formed by cutout portions in a sensing portion of each fork. The flexure beams are located symmetrically about a centerline of a sensing section of each fork, and alternate between two different lengths, with the flexure beams of each length being in alignment. Three sets of long cutout portions and 3 sets of short cutout portions are included, in addition to a central pair of cutout portions on which the strain gauges are mounted. The sensing section of the fork is configured to provide the necessary stiffness with the plurality of flexure beams therein.
    Type: Grant
    Filed: September 14, 1998
    Date of Patent: July 23, 2002
    Inventors: Keith W. Reichow, Bill Zimmerman
  • Patent number: 6415913
    Abstract: A base excited vibratory trough conveyor includes a trough mounted on leaf springs to a base which is excited by a linear vibratory drive. The vibratory drive produces a linear force which is oriented to be perpendicular to the springs, and the linear force is adjusted to equal the reaction force of the springs on the base during the desired stroke. Such balancing results in no stroke or movement of the base. A more lightweight base can thus be used without requiring that the base center of gravity be aligned along the center of gravity of the conveyor and the trough, or that the base be excessively heavy.
    Type: Grant
    Filed: March 17, 1997
    Date of Patent: July 9, 2002
    Assignee: FMC Technologies, Inc.
    Inventors: Paul I. Sleppy, Harold E. Patterson
  • Patent number: 6409449
    Abstract: The invention relates to a commissioning system (1) with at least one high-speed automatic machine (2) which comprises at least one article shelf (3) with article shafts (4) which are adjacently and essentially vertically arranged, preferably in a slightly slanted manner, and which can be accessed from the front. Articles which are to be commissioned can be stored in said article shafts, whereby a shelf control unit (5) can travel and which is assigned to the article shelf can be positioned at each article shaft (4) and stores articles in said article shaft. According to the invention, the spatially moveable shelf control unit (5) is equipped with an article handling unit (6) which stores the articles of the same type or dimensions in a stacked manner without the use of a magazine, whereby an article stack (7) which is to be stored in. Simultaneously handled without a separate article stack magazine or receptacle by the shelf control unit.
    Type: Grant
    Filed: November 19, 1999
    Date of Patent: June 25, 2002
    Assignee: Knapp Logistik Automation GmbH
    Inventors: Karl Freudelsperger, Manfred Preiss
  • Patent number: 6409455
    Abstract: A wheeled elevator apparatus for use in transferring freight between a highway truck and a freight storage dock or building, the apparatus including an elevatable platform powered by hydraulic cylinder means and including two oppositely directed ramps hingedly connected to said platform to provide access to said platform for pallet jacks moving pallets of freight, one of said ramps being long enough to reach inside the highway truck to form a bridge from the elevatable platform to the highway truck, the bridge having side curbs and being sufficiently narrow and laterally off-set to permit an independently operated roller, skate-wheel, or belt conveyer to function simultaneously beside the elevatable platform for moving small individual packages of freight between the same building or dock and the same truck.
    Type: Grant
    Filed: February 23, 2000
    Date of Patent: June 25, 2002
    Assignee: Superior Handling Equipment, Inc.
    Inventor: John F. Moseley
  • Patent number: 6406248
    Abstract: A work load lifting and moving apparatus is formed by a wheel supported horizontal main frame in turn supporting a mast assembly having a vertically reciprocal lifting frame gripping and lifting the work load by a hoist supported by the mast assembly. Other lifting apparatus supported by the main frame tilts the vertical axis of the work load in a forward direction.
    Type: Grant
    Filed: December 4, 2000
    Date of Patent: June 18, 2002
    Inventors: Dennis E. McGill, Billy J. Lucas
  • Patent number: 6402451
    Abstract: A drive across low-profile portable hydraulic trailer dumper for dumping the contents from a trailer containing a dumpable material, includes a towable elongated frame. A base frame with a deck pivotally attached hereto, which closes down and interlocks with the base frame. Making the overall height of the lift deck only seven (7) inches above the ground or pad site. Removable tread plates for use, when pulling a tractor and trailer forward, onto the trailer dumper. The lift deck has an adjustable chock for positioning the trailer during dumping. Actuators raise and lower the deck between a lowered position adjacent the base frame and a raised position for dumping the trailer contents. The trailer dumper has opposing cantilever wheels located near the back end of the dump for lowering a back end base frame to the support surface at the dump site, and raising a back end of a trailer dumper for towing.
    Type: Grant
    Filed: October 4, 1999
    Date of Patent: June 11, 2002
    Inventor: Herbert Louis Brown
  • Patent number: 6398013
    Abstract: A differential impulse conveyor 10, 80, 90, 100 includes a tray 12 which is driven in a forward direction at a slow speed and a backward direction at a higher speed to slide goods with respect to the tray and thereby move goods along the tray. The drive motor 26, 27 powers the tray in the forward and backward directions through a drive shaft 40 and a tray crank 66, 106 interconnecting the drive shaft and the tray. Controller 84 is provided for varying the rotational speed of the motor shaft, thereby avoiding mechanical knock in the drive system. In another embodiment, a pair of counterweights 52, 62 are provided on opposing sides of the drive shaft 40, with respective counterweight cranks 46, 56 initiating forward movement of each counterweight at a preselected offset angular position with respect to forward movement of the tray.
    Type: Grant
    Filed: June 8, 2000
    Date of Patent: June 4, 2002
    Inventors: Paul A. Svejkovsky, John Silvester
  • Patent number: 6394734
    Abstract: The trailer has a deck assembly that includes a level main deck portion and a tail hinged to the main deck for vertical swinging movement between a level transport position, a downwardly and rearwardly inclined ground-loading position, and an upwardly and rearwardly inclined dock-loading position. Raising and lowering of the tail between such positions is carried out by fore-and-aft movement of the shiftable undercarriage of the trailer, such undercarriage being located under the tail and generally behind the hinge when the trailer is in its roading position with the tail in its transport position. When the undercarriage is shifted forwardly beyond a lost motion segment of travel, the tail is allowed to progressively descend by gravity to its ground-loading position. Returning the undercarriage to its roading position beneath the tail causes the tail to be raised back to its transport position.
    Type: Grant
    Filed: February 10, 2000
    Date of Patent: May 28, 2002
    Inventors: Donald R. Landoll, Loren F. Wassenberg