Patents Examined by George Mannuel
  • Patent number: 6208748
    Abstract: Methods for determining a focus position of a lens system based on astigmatism. The methods can be used to monitor the focus of the lens system or to determine the flatness of a surface.
    Type: Grant
    Filed: January 5, 2000
    Date of Patent: March 27, 2001
    Assignee: Intel Corporation
    Inventors: Patrick M. Troccolo, Andrew Grenville