Patents Examined by Gerald O'Connor
  • Patent number: 6068441
    Abstract: A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or the outer susceptor sections. When the inner section is engaged, the support spider lifts the inner section vertically out of the outer section. When the outer section is engaged, the support spider raises and lowers the entire susceptor unit. A fork type robotic arm end effector permits wafer pick up and unloading by the inner susceptor section.
    Type: Grant
    Filed: November 21, 1997
    Date of Patent: May 30, 2000
    Assignee: ASM America, Inc.
    Inventors: Ivo Raaijmakers, Loren Jacobs, Mike Halpin, Jim Alexander, Ken O'Neill, Dennis Lee Goodwin
  • Patent number: 6036431
    Abstract: A new parts handling apparatus is provided which can shorten the index time and increase working ability without increasing the number of components and can restrict the rise of manufacturing cost. X driving member 12 to be moved rightward and leftward in correlation to the rotation of a ball screw 2 by a servomotor 1 is provided with a pair of right and left movable members 7 mounted movably in the Z direction. Two contact hands 5 are attached to each movable member 7 through aligning mechanisms 8 respectively. Each movable member 7 is provided with a Z driving member 6 mounted slidably in the X direction. The Z driving member 6 is engaged with a ball screw 4, and the ball screw 4 is connected to a servomotor 3. When the ball screw 4 is rotated by the servomotor 3, the Z driving member 6 moves vertically in the figure, thereby also moving the movable member 7 vertically.
    Type: Grant
    Filed: January 21, 1999
    Date of Patent: March 14, 2000
    Assignee: Seiko Epson Corporation
    Inventor: Hiroaki Fujimori
  • Patent number: 6033175
    Abstract: A device that aligns and couples a movable object to a destination includes fixed and movable coupling elements that interengage with one another. The fixed coupling elements are provided in a fixed location at the destination and the movable coupling elements are provided on the movable object. The fixed coupling elements include a guiding device and a mechanism that fixes an ultimate coupling position of the object. The fixing mechanism is included in the guiding device. The guiding device allows movement of the object in a first direction so that it can reach the ultimate coupling position, which is determined by the fixing mechanism. The guiding device further blocks movement of the object in a direction perpendicular to the first direction. The movable coupling elements are separated into first elements that engage in the guiding device and second elements that engage with the fixing mechanism.
    Type: Grant
    Filed: October 13, 1998
    Date of Patent: March 7, 2000
    Assignee: Jenoptik Aktiengesellschaft
    Inventors: John C. Pflueger, Lawrence R. Gravell
  • Patent number: 6021885
    Abstract: A rotary drive device for a flat object which is transported by a conveyance means to a processing station. At the processing station the object is rotated about an axis orthogonal to its surface extension by the rotary drive device. The rotary drive device includes a receptacle for the object and an axially projecting guidance means which cooperates with a hole in the object to center the object. When the object is positioned on the conveyance means above the receptacle, the object can be connected to the receptacle free of rotational play by a releasable fixation means. The receptacle is arranged on a rotatable plunger that can be moved back and forth so that elaborate pivoting and lowering motions of the conveyance means is not required.
    Type: Grant
    Filed: March 3, 1997
    Date of Patent: February 8, 2000
    Assignee: Basler AG
    Inventor: Jens Reichenbach
  • Patent number: 6010296
    Abstract: A seat stowage cart enables loading, transporting, and stowing a removable vehicle seat of the type found in sport utility vehicles. The seat is drawn manually upon a pair of ramps which pivot on a frame. The seat passes over the pivot axis, urging the ramps toward a seat stowage position, therein supported by a pair of support members. The ramps are adjustable for seats of varying width. The frame is selectively variable in height, and includes wheels. A pawl is provided for releasably locking the ramps against pivoting, and for blocking the seat wheels from rolling.
    Type: Grant
    Filed: December 2, 1997
    Date of Patent: January 4, 2000
    Inventor: Bruce G. Enders
  • Patent number: 6000905
    Abstract: Transport of a workpiece into and out of high vacuum conditions is achieved using a vacuum handler having an ante-chamber which buffers a vacuum lock and other mechanically vulnerable components from high pressure differences. During loading of the workpiece, the ante-chamber is vented to atmospheric pressure while the vacuum lock door is sealed closed. The antechamber is then opened and receives the incoming workpiece from the exterior of the vacuum handler. The ante-chamber is then closed and evacuated to the pressure level of the vacuum lock, which is only opened once this pressure level is achieved. The vacuum lock receives the workpiece and is evacuated to the pressure of the main vacuum chamber of the vacuum handler and then opened thereto. An elevator assembly transports the workpiece into the vacuum chamber for processing. The process is reversed during unloading of the workpiece from the vacuum handler following processing completion.
    Type: Grant
    Filed: March 13, 1998
    Date of Patent: December 14, 1999
    Inventor: Guillermo L. Toro-Lira
  • Patent number: 5993136
    Abstract: A mobile lift and storage apparatus for lifting, lowering, moving, and storing objects. A combination of the mobile lift and a stationary storage apparatus forming a stationary storage system for securing the mobile lift and the stored objects.
    Type: Grant
    Filed: February 25, 1999
    Date of Patent: November 30, 1999
    Inventor: Coleman W. Vickary