Abstract: A radio frequency device is disclosed, which includes an isolation substrate, a ground layer, a first signal end, a second signal end, a radio frequency circuit, and an impedance unit. The isolation substrate includes a first plane and a second plane. The ground layer is disposed on the second plane of the isolation substrate for providing grounding. The first signal end is formed on the first plane of the isolation substrate. The second signal end is formed on the first plane of the isolation substrate and coupled to the ground layer. The radio frequency circuit is disposed on the first plane of the isolation substrate and coupled to the first signal end. The impedance unit is disposed on the first plane of the isolation substrate and coupled to the first signal end and the second signal end.