Abstract: A load lock chamber and method for transferring large area substrates is provided. In one embodiment, a load lock chamber suitable for transferring large area substrates includes a plurality of vertically stacked single substrate transfer chambers. The configuration of vertically stacked single substrate transfer chambers contributes to reduced size and greater throughput as compared to conventional state of the art, dual slot dual substrate designs. Moreover, the increased throughput has been realized at reduced pumping and venting rates, which corresponds to reduced probability of substrate contamination due to particulates and condensation.

Abstract: A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats one at a time, each boat holding one or more substrates; a boat transfer mechanism for transferring the boats among the first, second and third stages; and a substrate transfer mechanism for transferring the substrate(s) from the carrier to the boat held by the first stage. A controller controls the first stage, the boat transfer mechanism and the substrate transfer mechanism so that the boat transfer mechanism transfers one of the boats from the second stage to the first stage, the substrate transfer mechanism then transfers the substrate(s) from the carrier to the boat held by the first stage, and the first stage then moves the boat into the processing chamber for processing.

Abstract: A material handling vehicle including a truck body and a fork assembly adjacent the truck body. A link arm extending between the truck body and the fork assembly has a proximal end and a distal end. A first pivot pin is fixed to the body and pivotally links the proximal end of the link arm to the body. A second pivot pin is fixed to the fork assembly and pivotally links the distal end of the link arm to the fork assembly. At least one of the first and second pivot pins includes an eccentric body interposed between ends. The eccentric body defines a first axis, and the ends define a second axis, wherein the link arm pivots about the first axis and rotation of the pivot pin about the second axis moves the first axis relative to the truck body to change the position of the fork assembly relative to the truck body.

Abstract: A loading assembly is provided that is configured to load transport containers with bulk material quickly and efficiently. The assembly includes a load bin having a cross section conforming to an open end of a container and a drive mechanism configured to urge the load bin into and out of the container. When fully inserted, the contents of the load bin are completely disposed within the container. The loading assembly further includes a barrier configured to keep the load confined within the container, while the load bin opens to allow the load to remain within the container upon retraction of the load bin. In this manner, the container can be filled to capacity in a single operation.

Abstract: An apparatus for transporting and marking a substrate, such as a collapsed corrugated cardboard carton. A feeder station is configured to receive a substantially vertically aligned stack of substrates. An advancement assembly of the feeder station successively moves the lower portions of the substrates in an inboard direction and a tensioner assembly applies a clamping force to the upper portions of the substrates. A transfer assembly engages the innermost substrate in the stack to rotate and remove the substrate from the rest of the stack and provide the substrate to a transport and marking station, which drives the substrate past a marking mechanism. The transport and marking station advances the substrate into a gravity discharge station which induces sufficient tilt in the substrate so that, upon exiting of the substrate from the transport, gravity induces the substrate to rotate and fall in a controlled fashion into a completed stack.

Abstract: An apparatus for stacking incoming items includes a receiving mechanism for receiving incoming items, a stacking mechanism for receiving items from the receiving mechanism and stacking the items in a stacking area, a buffering mechanism for receiving incoming items when the stacking mechanism is full, and a stack unloading mechanism. Methods of operation include receiving an item in an item receiving mechanism, moving the item receiving mechanism to track the motion of a stacking mechanism, transferring the item from the receiving mechanism to the stacking mechanism, stacking the item in a stacking area, and unloading the stacking area when the stacking area is full of items.