Patents Examined by Gregory Mill
  • Patent number: 6913669
    Abstract: A retaining ring to be fitted on a chemical mechanical polishing apparatus for semiconductor wafers is disclosed, the retaining ring comprising a carrier ring made of a first material and having fitting elements for fitting the carrier ring on the polishing apparatus; and a bearing ring comprising a plastic material, arranged concentrically on the carrier ring, the bearing ring resting with a first front side on a polishing surface of the polishing apparatus and being held on its side axially opposed to the first front side releasably, non-rotatably, with a positive and/or frictional connection and without adhesive on the carrier ring; wherein the first material has a higher rigidity than the plastic material of the bearing ring.
    Type: Grant
    Filed: December 19, 2002
    Date of Patent: July 5, 2005
    Assignee: Ensinger Kunststofftechnologie GBR
    Inventor: Wilfried Ensinger