Abstract: In a spectroscopic module, a light shielding member is disposed between a plurality of bandpass filters and a light detector. The light shielding member includes a plurality of wall portions. The plurality of wall portions are arranged along an X direction with a light passage opening interposed therebetween, each of a plurality of optical paths from the plurality of bandpass filters to a plurality of light receiving regions passing through the light passage opening. A first wall portion and a second wall portion adjacent to each other among the plurality of wall portions are in contact with the bandpass filter, the bandpass filter corresponding to the light passage opening between the first wall portion and the second wall portion. A width in a Y direction of the light passage opening is larger than a width in the Y direction of the bandpass filter.

Abstract: A system includes a first spectral modulator, a second spectral modulator, a light guide optically, a photodetector, and an electronic control device. The first spectral modulator receives sample light, and modulates the sample light according to a first spectral response pattern to produce first modulated light. The second spectral modulator receives the first modulated light from the first spectral modulator via the light guide, modulates the first modulated light according to a second spectral response pattern to produce second modulated light, and transmits the second modulated light to the photodetector. The photodetector measures an intensity of the second modulated light incident on the photodetector, and generates one or more signals corresponding to the intensity of the second modulated light. The electronic control device determines a spectral distribution of the sample light based on the one or more signals.

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

Abstract: The disclosure relates to an image sensor comprising pixels for acquiring color information from incoming visible light, wherein said image sensor comprising at least two pixels being partially covered by a color splitter structure comprising a first part and a second part, each of said first and second parts being adjacent to a dielectric part, each of said dielectric part having a first refractive index n1 (said first part having a second refractive index n2, and said second part having a third refractive index n3, wherein n1<n3<n2, and wherein according to a cross section, the first part of said color splitter structure has a first width W1, a height H and the second part of said color splitter structure has a second width W2, and the same height H, and wherein said color splitter structure has a first, a second and a third edges at the interfaces between parts having different refractive indexes, each edge generating beams or nanojets, and wherein said height H is close to a value Formul (I), where

Abstract: A hyperspectral imager (HSI) includes a first thin film filter, the first thin film filter including a first quarter wave mirror, a second quarter wave mirror, and a low-refractive-index wedge between the first quarter wave mirror and the second quarter wave mirror. The low-refractive-index wedge has a height dimension such that a distance between the first quarter wave mirror and the second quarter wave mirror increases linearly along a length of the low-refractive-index wedge.

Abstract: In an embodiment a measuring unit includes a light emitting LED component including a housing occupying a housing surface G and an LED chip located within the housing, the LED chip including a light emitting light surface L and being configured to emit light; a photodetector configured to detect reflected light reflected from a measured object originating from the LED component and output a measurement signal dependent on a detection of the reflected light; and an integrated circuit configured to evaluate the measurement signal, wherein the LED component, the photodetector, and the integrated circuit are combined into an integrated unit; and a conversion layer disposed in the housing and located above the LED chip, the conversion layer configured to convert the light into multiband light, wherein a ratio L/G of is greater than or equal to 0.8, and wherein the measuring unit is configured to optically measure at least one property of the measured object.

Abstract: The optical device for measuring at least one of reflected light (BRDF) and transmitted light (BTDF) from a sample, in all spherical directions of space around the sample, for each spherical direction of incident light includes a light source, and a goniophotometer configured to measure at least one of: directions of the incident light in spherical coordinates, and directions of the reflected light in spherical coordinates. The device further includes a dispersive screen, and a multi-sensor imaging device. The goniophotometer includes a first articulated arm supporting the light source; and a second articulated arm supporting the sample or a sample holder.

Abstract: A spectroscopic module includes a plurality of beam splitters; a plurality of bandpass filters disposed on one side in a Z direction with respect to the plurality of beam splitters; a light detector disposed on the one side in the Z direction with respect to the plurality of bandpass filters and includes a plurality of light receiving regions; a first support body supporting the plurality of beam splitters; a second support body supporting the plurality of bandpass filters; and a casing including a third wall portion integrally formed with the second support body. The first support body is attached to the third wall portion such that an outer surface of the first support body is in contact with an inner surface of the third wall portion in a state where the position is defined by a plurality of positioning pins and a plurality of positioning holes.

Abstract: To implement, when a plurality of patterns are included in a field of view during measurement of scattered light in spectral scatterometry, removal of an influence of a pattern outside a dimension (three-dimensional shape) management target from spectral reflection intensity in the field of view without modeling the pattern outside the dimension management target. A three-dimensional shape detection apparatus 100 includes a spectral reflection intensity measurement unit configured to measure spectral reflection intensity in a field of view of a light spot by irradiating a sample 103 as a target with the light spot, and detects a three-dimensional shape in the field of view of the light spot based on the measured spectral reflection intensity.

Abstract: A fine ratio measuring device that measures a ratio of fines adhering to the surface of a material in the form of lumps, the fine ratio measuring device includes: an illumination unit that illuminates the material in the form of lumps; a spectrometer that performs spectral analysis on light reflected from the material in the form of lumps to measure spectral reflectance; and an arithmetic device that extracts at least one feature quantity from the spectral reflectance measured by the spectrometer and computes the fine ratio from the extracted at least one feature quantity.

Abstract: Systems, methods, and computer-readable media are disclosed for a systems and methods for intra-shot dynamic LIDAR detector gain. One example method my include receiving first image data associated with a first image of an object illuminated at a first wavelength and captured by a camera at the first wavelength, the first image data including first pixel data for a first pixel of the first image and second pixel data for a second pixel of the first image. The example method may also include calculating a first reflectance value for the first pixel using the first pixel data. The example method may also include calculating a second reflectance value for the second pixel using the second pixel data. The example method may also include generating, using first reflectance value and the second reflectance value, a first reflectance distribution of the object.

Abstract: A method and a device for detecting a focal position of a laser beam, particularly a machining laser beam in a laser machining head, includes an optical element which is arranged in the laser beam converging toward the focal point and which is designed to outcouple a reflection from the laser beam path, and a sensor arrangement which is designed to detect beam characteristics of said laser beam in the region of the focal point in the laser extension direction, and which measures the outcoupled reflection of the laser beam at at least two locations that are offset to one another in the extension direction, in order to determine the current focal position.

Abstract: Systems, devices, and methods for detecting agrochemicals in environments associated with agricultural equipment are described. Certain agrochemicals that are formulated for being detected using the systems, devices, and methods disclosed herein are also described. The devices, systems, and methods disclosed herein are generally configured to use spectral characteristics to detect agrochemicals in an environment associated with agricultural equipment. The spectral characteristics can be analyzed in various ways to provide different types of information about the agrochemicals and/or the environment.

Abstract: An optical system and method are presented for use in measurements on an upper surface of a layered sample when located in a measurement plane. The optical system is configured as a normal-incidence system having an illumination channel and a collection channel, and comprises an objective lens unit and a light propagation affecting device. The objective lens unit is accommodated in the illumination and collection channels, thereby defining a common optical path for propagation of illuminating light from the illumination channel toward an illuminating region in the measurement plane and for propagation of light returned from measurement plane to the collection channel. The light propagation affecting device comprises an apertured structure located in at least one of the illumination and collection channels, and configured to provide angular obscuration of light propagation path for blocking angular segments associated with light propagation from regions outside the illuminated region.

Abstract: Embodiments disclosed herein include an optical sensor system for use in plasma processing tools. In an embodiment, the optical sensor system, comprises an optically clear body with a first surface and a second surface facing away from the first surface. In an embodiment, the optically clear body further comprises a third surface that is recessed from the second surface. In an embodiment, the optical sensor system further comprises a target over the third surface and a first reflector to optically couple the first surface to the target.

Abstract: Provided is a measurement device including a spectroscope, a movement mechanism configured to relatively move the spectroscope in one direction, and one or more processors configured to determine whether a measurement position measured by the spectroscope is moved into a color patch, in which the one or more processors cause the spectroscope to execute measurement processing for a plurality of wavelengths set in advance while relatively moving the spectroscope in the one direction, and when at least one of amounts of variation of measured values with respect to each of the plurality of wavelengths obtained in the measurement processing exceeds a first threshold value and then each of the amounts of variation of the measured values of the plurality of wavelengths falls below a second threshold value which is less than or equal to the first threshold value, determine that the measurement position is moved into the color patch.

Abstract: A method for use in optical measurements on patterned structures, the method including performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure, the measurements including detecting light reflected from the at least part of the at least two different regions within the measurement spot, the detected light including interference of at least two complex electric fields reflected from the at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.

Abstract: Provided is a spectroscopic analysis apparatus including: an optical probe; and a spectroscopic analysis portion to which the optical probe is attached. The optical probe includes an optical fiber that guides illumination light coming from a light source and signal light coming from an observation target and an optical member that is disposed at least at a distal end of the optical fiber. The spectroscopic analysis portion includes an information separation portion that generates wavelength dependent characteristics by optically dispersing the signal light and that separates, from information about the signal light, information about first return light returning from the optical member and information about second return light returning from the optical fiber, a problem determining portion that determines a problem occurring at the optical probe based on the separated first return light and second return light, and a notification portion that notifies information about the determined problem.

Abstract: A spatial Fourier transform spectrometer is disclosed. The Fourier transform spectrometer includes a Fabry-Perot interferometer with first and second optical surfaces. The gap between the first and second optical surfaces spatially varies in a direction that is orthogonal to the optical axis of the Fourier transform spectrometer. The Fabry-Perot interferometer creates an interference pattern from input light. An image of the interference pattern is captured by a detector, which is communicatively coupled to a processor. The processor is configured to process the interference pattern image to determine information about the spectral content of the input light.

Abstract: An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.