Patents Examined by Hoai Pham
  • Patent number: 7064425
    Abstract: A tip of a first wire is bonded to a first electrode. The first wire is drawn from the first electrode to a bump on a second electrode. A part of the first wire is deformed and bonded to the bump. A tip of a second wire formed in the shape of a ball is bonded to the bump by using a tool in a state in which at least a part of the tip is superposed on the first wire. A part of the first wire which is not deformed by bonding is prevented from being deformed by the tip of the second wire and the tool.
    Type: Grant
    Filed: January 21, 2003
    Date of Patent: June 20, 2006
    Assignee: Seiko Epson Corporation
    Inventors: Takuya Takahashi, Hiroyuki Tomimatsu
  • Patent number: 7064374
    Abstract: A hydrogen diffusion barrier in an integrated circuit is located to inhibit diffusion of hydrogen to a thin film of a metal oxide, such as a ferroelectric layered superlattice material, in an integrated circuit. The hydrogen diffusion barrier comprises at least one of the following chemical compounds: strontium tantalate, bismuth tantalate, tantalum oxide, titanium oxide, zirconium oxide and aluminum oxide. The hydrogen barrier layer is amorphous and is made by a MOCVD process at a temperature of 450° C. or less. A supplemental hydrogen barrier layer comprising a material selected from the group consisting of silicon nitride and a crystalline form of one of said hydrogen barrier layer materials is formed adjacent to said hydrogen diffusion barrier.
    Type: Grant
    Filed: June 21, 2004
    Date of Patent: June 20, 2006
    Assignee: Symetrix Corporation
    Inventors: Narayan Solayappan, Jolanta Celinska, Vikram Joshi, Carlos A. Paz de Araujo, Larry D. McMillan
  • Patent number: 7064395
    Abstract: The semiconductor device comprises a gate interconnection 24a including a gate electrode formed over a semiconductor substrate 14 with a gate insulation film 22 formed therebetween; a first source/drain diffused layer 28 formed near the end of the gate interconnection 24a; a second source/drain diffused layer 34 formed remote from the gate interconnection 24a and the first source/drain diffused layer 28; and an insulation film 40 formed over the gate interconnection 24a, the first source/drain diffused layer 28 and the second source/drain diffused layer 34, and having a groove-shaped opening 42a formed in, which integrally exposes the gate interconnection 24a, one of the first source/drain diffused layer 28, and one of the second source/drain diffused layer 34; and a contact layer 48a buried in the groove-shaped opening 42a. The groove-shaped openings 42a for the contact layers 48a to be buried in can be formed without failure.
    Type: Grant
    Filed: March 1, 2004
    Date of Patent: June 20, 2006
    Assignee: Fujitsu Limited
    Inventors: Takayoshi Minami, Yuji Setta
  • Patent number: 7060536
    Abstract: A semiconductor package is provided. A leadframe including a die attach paddle, a number of inner leads, and a number of outer leads, and a number of extended lead tips on the number of outer leads. The inner edges of the number of extended lead tips are in substantial alignment with the inner edges of the number of inner leads. A die is attached to the die attach paddle. A number of bonding wires is used to connect the die to the number of inner leads and the extended lead tips on the number of outer leads, and an encapsulant is formed over the leadframe and the die.
    Type: Grant
    Filed: May 13, 2004
    Date of Patent: June 13, 2006
    Assignee: St Assembly Test Services Ltd.
    Inventors: Jeffrey D. Punzalan, Jose Alvin Caparas, Jae Hun Ku
  • Patent number: 7060575
    Abstract: A method of forming self-aligned contact holes exposing source/drain regions in a semiconductor substrate using only etch mask layers is provided. In the method, sacrificial spacers are formed of a material having an excellent etching selectivity to the etch mask layers at sidewalls of gate electrodes in a cell area. Also, an interlevel dielectric layer is formed of a material having an excellent etching selectivity to the etch mask layers. The sacrificial spacers are removed when forming the self-aligned contact holes. Dielectric spacers are formed of a material having a low dielectric constant, without considering its etching selectivity to the interlevel dielectric layer. Thus, a reduction in the operational speed of a semiconductor device having transistors can be prevented.
    Type: Grant
    Filed: April 30, 2003
    Date of Patent: June 13, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Beom-jun Jin, Byeong-yun Nam, Young-pil Kim
  • Patent number: 7060540
    Abstract: A method of fabricating a thin film transistor array is provided. A first patterned conductive layer that distributes over an area range exceeding the designated display region is formed over a substrate. A first dielectric layer is formed over the substrate, wherein the first dielectric layer has the thickness getting smaller toward the edge, so that the first patterned conductive layer outside the designated display region is exposed. A second patterned conductive layer is formed over the first dielectric layer. The second patterned conductive layer and the exposed first patterned conductive layer are electrically connected. A second dielectric layer having a plurality of contact openings therein is formed over the substrate. A plurality of pixel electrodes is formed over the second dielectric layer such that the pixel electrode and the second patterned conductive layer are electrically connected through the contact openings. Finally, various layers outside the designated display regions are removed.
    Type: Grant
    Filed: April 2, 2003
    Date of Patent: June 13, 2006
    Assignee: Quanta Display Inc.
    Inventor: Meng-Yi Hung
  • Patent number: 7060553
    Abstract: Device designs and methods are described for incorporating capacitors commonly used in planar CMOS technology into a FinFET based technology. A capacitor includes at least one single-crystal Fin structure having a top surface and a first side surface opposite a second side surface. Adjacent the top surface of the at least one Fin structure is at least one insulator structure. Adjacent the at least one insulator structure and over a portion of the at least one Fin structure is at least one conductor structure. Decoupling capacitors may be formed at the circuit device level using simple design changes within the same integration method, thereby allowing any number, combination, and/or type of decoupling capacitors to be fabricated easily along with other devices on the same substrate to provide effective decoupling capacitance in an area-efficient manner with superior high-frequency response.
    Type: Grant
    Filed: August 31, 2005
    Date of Patent: June 13, 2006
    Assignee: International Business Machines Corporation
    Inventors: David M. Fried, Edward J. Nowak
  • Patent number: 7060525
    Abstract: A semiconductive chip having at least one active device, and at least one bond pad located on said active device. The bond pad has at least one deformable member, and the deformable member is deformable when conductive stud is bonded to said bond pad so as to prevent damage to the active device during the bonding of the conductive stud to the bond pad, such as by an ultrasonic bonding technique. A plurality of the deformable members may define a pattern on the bond pad that deforms when the conductive stud is bonded to the bond pad.
    Type: Grant
    Filed: May 15, 2000
    Date of Patent: June 13, 2006
    Assignee: Telefonaktiebolaget L M Ericsson (publ)
    Inventor: Lars Tilly
  • Patent number: 7056818
    Abstract: A semiconductor device with under bump metallurgy (UBM) and a method for fabricating the semiconductor device are provided, wherein a passivation layer is deposited on a surface of the semiconductor device where a plurality of bond pads are disposed, and formed with a plurality of openings for exposing the bond pads. A first metal layer is deposited over part of each of the bond pads and a portion of the passivation layer around the bond pad; then, a second metal layer is formed over the first metal layer and part of the bond pad uncovered by the first metal layer; subsequently, a third metal layer is formed over the second metal layer to thereby fabricate a UBM structure. Finally, a solder bump is formed on the UBM structure so as to achieve good bondability and electrical connection between the solder bump and UBM structure.
    Type: Grant
    Filed: July 27, 2004
    Date of Patent: June 6, 2006
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventor: Ke-Chuan Yang
  • Patent number: 7056814
    Abstract: Methods of manufacturing MOS transistors which are capable of suppressing a short channel effect are disclosed. The short channel effect is suppressed by forming source/drain regions of a shallow junction and sufficiently doping a gate. An illustrated method includes: forming a gate insulating layer and a gate on a semiconductor substrate of a first conductivity type; forming lightly doped drain regions of a second conductivity type within the substrate at opposite sides of the gate; forming spacers on side walls of the gate; forming an insulating buffer layer; exposing a top surface of the gate by performing a planarization process on the insulating buffer layer; doping the gate by implanting impurity ions of the second conductivity type into the top surface of the gate; removing the insulating buffer layer; and forming source/drain regions of the second conductivity type within the substrate at opposite sides of the spacers.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: June 6, 2006
    Assignee: DongbuAnam Semiconductor Inc.
    Inventor: Hak-Dong Kim
  • Patent number: 7057229
    Abstract: A semiconductor nonvolatile memory device for storing multi-bit data has a memory cell having a source region S and a drain region D formed at the surface of a semiconductor substrate, a gate insulator film and a control gate CG formed on a channel region CH between the source region S and the drain region D and a nonconductive trap gate in the gate insulator film. An indentation 4 is provided at the surface of the semiconductor substrate covering a region from a position in the vicinity of the drain region in the channel region to the drain region. By providing the indentation 4 on the drain region side of the channel region, the trap gate is positioned in the direction of a channel current flowing from the source region S to the drain region D. Then, the a charge having run through the channel region CH is injected efficiently into the trap gate on the indentation.
    Type: Grant
    Filed: January 14, 2003
    Date of Patent: June 6, 2006
    Assignee: Fujitsu Limited
    Inventor: Tsutomu Nakai
  • Patent number: 7057287
    Abstract: A dual damascene interconnect structure having a patterned multilayer of spun-on dielectrics on a substrate is provided. The structure includes: a patterned multilayer of spun-on dielectrics on a substrate, including: a cap layer; a first non-porous via level low-k dielectric layer having thereon metal via conductors with a bottom portion and sidewalls; an etch stop layer; a first porous low-k line level dielectric layer having thereon metal line conductors with a bottom portion and sidewalls; a polish stop layer over the first porous low-k dielectric; a second thin non-porous low-k dielectric layer for coating and planarizing the line and via sidewalls; and a liner material between the metal via and line conductors and the dielectric layers. Also provided is a method of forming the dual damascene interconnect structure.
    Type: Grant
    Filed: August 21, 2003
    Date of Patent: June 6, 2006
    Assignee: International Business Machines Corporation
    Inventors: Kaushik A Kumar, Kelly Malone, Christy S Tyberg
  • Patent number: 7056822
    Abstract: An interconnect structure and fabrication method are provided to form air gaps between interconnect lines and between interconnect layers. A conductive material is deposited and patterned to form a first level of interconnect lines. A first dielectric layer is deposited over the first level of interconnect lines. One or more air gaps are formed in the first dielectric layer to reduce inter-layer capacitance, intra-layer capacitance or both inter-layer and intra-layer capacitance. At least one support pillar remains in the first dielectric layer to promote mechanical strength and thermal conductivity. A sealing layer is deposited over the first insulative layer to seal the air gaps. Via holes are patterned and etched through the sealing layer and the first dielectric layer. A conductive material is deposited to fill the via holes and form conductive plugs therein. Thereafter, a conductive material is deposited and patterned to form a second level of interconnect lines.
    Type: Grant
    Filed: October 9, 2000
    Date of Patent: June 6, 2006
    Assignee: Newport Fab, LLC
    Inventor: Bin Zhao
  • Patent number: 7057218
    Abstract: An antifuse including a bottom plate having a plurality of longitudinal members arranged substantially parallel to a first axis, a dielectric layer formed on the bottom plate, and a top plate having a plurality of longitudinal members arranged substantially parallel to a second axis, the top plate formed over the dielectric layer. Multiple edges formed at the interfaces between the top and bottom plates result in regions of localized charge concentration when a programming voltage is applied across the antifuse. As a result, the formation of the antifuse dielectric over the corners of the bottom plates enhance the electric field during programming of the antifuse. Reduced programming voltages can be used in programming the antifuse and the resulting conductive path between the top and bottom plates will likely form along the multiple edges.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: June 6, 2006
    Assignee: Micron Technology, Inc.
    Inventor: Jigish D. Trivedi
  • Patent number: 7053433
    Abstract: A ferroelectric layer within an array of ferroelectric FETs is encapsulated between a bottom barrier dielectric layer and a top barrier dielectric layer extending beyond the ferroelectric layer. The ferroelectric FETs are formed on first conductivity type silicon, each having two second conductivity type silicon regions within the first conductivity type silicon separated by some distance. The two second conductivity type silicon regions forming a source and a drain with a channel region therebetween. A silicon dioxide layer is formed on the channel region, a bottom barrier dielectric layer is formed on the silicon dioxide layer, a ferroelectric layer is formed on the bottom barrier dielectric layer, a top barrier dielectric layer is formed on the ferroelectric layer, and an electrode layer is formed on the ferroelectric layer.
    Type: Grant
    Filed: April 29, 2002
    Date of Patent: May 30, 2006
    Assignee: Celis Semiconductor Corp.
    Inventor: Gary F. Derbenwick
  • Patent number: 7053401
    Abstract: Soluble, photosensitive precursors of pentacene are synthesized by a one-step Diels-Alder reaction of pentacene with N-sulfinylamides. These precursors may include a photopolymerizable group, which renders the pentacene precursor as a negative tone resist. The pentacene precursor may also include an acid-sensitive protecting group, which in the presence of a photoacid generator and upon exposure to UV light, is removed and the product becomes base soluble. Patterned pentacene thin films may be obtained by exposure to UV light through a mask and/or heating, and used as an active channel material for an organic field effect transistor.
    Type: Grant
    Filed: December 20, 2002
    Date of Patent: May 30, 2006
    Assignee: International Business Machines Corporation
    Inventors: Ali Afzali Ardakani, Christos D. Dimitrakopoulos, Teresita O. Graham, David R. Medeiros
  • Patent number: 7052935
    Abstract: A flip-chip package is described. The flip-chip package includes a chip, a substrate, supporters and electrically conductive adhesive bumps. The electrically conductive adhesive bumps are located between the chip and the substrate electrically connecting the bonding pads on the former and the bump pads on the latter, wherein each electrically conductive adhesive bump has a smaller diameter at the central portion thereof than at the end portions thereof. The supporters are also disposed between the chip and the substrate surrounding the active area of the chip, so that the chip can be supported on the substrate.
    Type: Grant
    Filed: February 26, 2004
    Date of Patent: May 30, 2006
    Assignee: Advanced Semiconductor Engineering, Inc.
    Inventors: Tsung-Ming Pai, Shin-Shyan Hsieh
  • Patent number: 7052948
    Abstract: The invention relates to a film or a layer made of semi-conducting material with low defect density in the thin layer, and a SOI-disk with a thin silicon layer exhibiting low surface roughness, defect density and thickness variations. The invention also relates to a method for producing a film or a layer made of semi-conductive material. Said method comprises the following steps: a) producing structures from a semi-conductive material with periodically repeated recesses which have a given geometrical structure, b) thermally treating the surface structured material until a layer with periodically repeated hollow spaces is formed under a closed layer on the surface of the material, c) separating the closed layer on the surface along the layer of hollow spaces from the remainder of the semi-conductive material.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: May 30, 2006
    Assignee: Siltronic AG
    Inventors: Brian Murphy, Reinhold Wahlich, Rüdiger Schmolke, Wilfried Von Ammon, James Moreland
  • Patent number: 7053404
    Abstract: A semiconductor component in which the active junctions extend along at least one cylinder perpendicular to the main surfaces of a semiconductor chip substantially across the entire thickness thereof, said cylinder(s) having a cross-section with an undulated closed curve shape.
    Type: Grant
    Filed: January 22, 2004
    Date of Patent: May 30, 2006
    Assignee: STMicroelectronics S.A.
    Inventor: Jean-Luc Morand
  • Patent number: 7053441
    Abstract: A nonvolatile semiconductor memory device having a small layout area includes a memory cell array in which a plurality of memory cells are arranged in a row direction and a column direction. The memory cell array includes: source line diffusion layers each of which is formed by connecting part of the memory cells in the row direction; bitline diffusion layers, isolation regions each of which divides one of the bitline diffusion layers, and word gate common connection sections. Each of the memory cells includes a word gate and a select gate. Each of the bitline diffusion layers is disposed between two of the word gates which are adjacent to each other in the column direction. Each of the word gate common connection sections connects the two adjacent word gates above the isolation regions.
    Type: Grant
    Filed: February 23, 2004
    Date of Patent: May 30, 2006
    Assignee: Seiko Epson Corporation
    Inventor: Yoshihito Owa