Patents Examined by Hua Qi
  • Patent number: 11535952
    Abstract: A wafer carrier includes a pocket sized and shaped to accommodate a wafer, the pocket having a base and a substantially circular perimeter, and a removable orientation marker, the removable orientation marker comprising an outer surface and an inner surface, the outer surface having an arcuate form sized and shaped to mate with the substantially circular perimeter of the pocket, and the inner surface comprising a flat face, wherein the removable orientation marker further comprises a notch at a first end of the flat face.
    Type: Grant
    Filed: September 24, 2020
    Date of Patent: December 27, 2022
    Assignee: Infineon Technologies Americas Corp.
    Inventors: Mihir Tungare, Peter Kim, Jianwei Wan, Chankyung Choi
  • Patent number: 11505876
    Abstract: A method of producing silicon carbide is disclosed. The method comprises the steps of providing a sublimation furnace comprising a furnace shell, at least one heating element positioned outside the furnace shell, and a hot zone positioned inside the furnace shell surrounded by insulation. The hot zone comprises a crucible with a silicon carbide precursor positioned in the lower region and a silicon carbide seed positioned in the upper region. The hot zone is heated to sublimate the silicon carbide precursor, forming silicon carbide on the bottom surface of the silicon carbide seed. Also disclosed is the sublimation furnace to produce the silicon carbide as well as the resulting silicon carbide material.
    Type: Grant
    Filed: October 9, 2020
    Date of Patent: November 22, 2022
    Assignee: GTAT CORPORATION
    Inventors: Roman V. Drachev, Santhanaraghavan Parthasarathy, Andriy M. Andrukhiv, David S. Lyttle
  • Patent number: 11479874
    Abstract: The invention provides a semiconductor crystal growth device comprising a furnace body; a crucible; a pulling device; a horizontal magnetic field applying device; and a deflector, being barrel-shaped and disposed above the silicon melt in the furnace body in a vertical direction, and the pulling device pulls the silicon ingot through the deflector in the vertical direction; wherein the bottom of the deflector has different thermal reflection coefficients at different positions, and the thermal reflection coefficient of the bottom of the deflector in the direction of the horizontal magnetic field is smaller than that in the direction perpendicular to the horizontal magnetic field. According to the semiconductor crystal growth device of the present invention, the temperature distribution inside the melt silicon and quality of the semiconductor crystal are improved.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: October 25, 2022
    Assignee: Zing Semiconductor Corporation
    Inventors: Weimin Shen, Gang Wang, Xianliang Deng, Hanyi Huang, Wee Teck Tan
  • Patent number: 11473211
    Abstract: A method of estimating an oxygen concentration in monocrystalline silicon, which is pulled up by a pull-up device having a hot zone with a plane-asymmetric arrangement with respect to a plane defined by a crystal pull-up shaft and an application direction of a horizontal magnetic field, includes, in at least one of a neck-formation step or a shoulder-formation step for the monocrystalline silicon: a step of measuring a surface temperature of a silicon melt at a point defining a plane-asymmetric arrangement of a hot zone, and a step of estimating the oxygen concentration in a straight body of the pulled-up monocrystalline silicon based on the measured surface temperature of the silicon melt and a predetermined relationship between the surface temperature of the silicon melt and the oxygen concentration in the monocrystalline silicon.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: October 18, 2022
    Assignee: SUMCO CORPORATION
    Inventors: Shin Matsukuma, Kazuyoshi Takahashi, Toshinori Seki, Tegi Kim, Ryusuke Yokoyama
  • Patent number: 11473210
    Abstract: Provided is a heat shielding member, a single crystal pulling apparatus, and a method of producing a single crystal silicon ingot, which can expand the margin of the crystal pulling rate with which a defect-free single crystal silicon can be obtained. A heat shielding member is provided in a single crystal pulling apparatus, the heat shielding member including a cylindrical tubular portion surrounding an outer circumferential surface of the single crystal silicon ingot; and a ring-shaped projecting portion under the tubular portion. The projecting portion has an upper wall, a bottom wall, and two vertical walls, a heat insulating material with a ring shape is provided in the space surrounded by those walls; and a gap between the vertical wall adjacent to the single crystal silicon ingot and the heat insulating material.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: October 18, 2022
    Assignee: SUMCO CORPORATION
    Inventors: Kaoru Kajiwara, Ryota Suewaka, Shunji Kuragaki, Kazumi Tanabe
  • Patent number: 11466381
    Abstract: A quartz glass crucible 1 includes: a quartz glass crucible body 10 having a cylindrical side wall portion 10a, a curved bottom portion 10b, and a corner portion 10c which has a larger curvature than that of the bottom portion 10b and connects the side wall portion 10a and the bottom portion 10b to each other; and an inner-surface coating film 13A which contains a crystallization accelerator and is formed on an inner surface 10i of the quartz glass crucible body 10, in which the inner surface 10i of the quartz glass crucible body 10 is under compressive stress. The quartz glass crucible has high durability even at a high temperature during a single crystal pull-up step and is capable of reducing a generation ratio of pinholes in a silicon single crystal.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: October 11, 2022
    Assignee: SUMCO CORPORATION
    Inventors: Hiroshi Kishi, Kouta Hasebe, Takahiro Abe, Hideki Fujiwara
  • Patent number: 11443942
    Abstract: Described herein is a method for growing indium nitride (InN) materials by growing hexagonal and/or cubic InN using a pulsed growth method at a temperature lower than 300° C. Also described is a material comprising InN in a face-centered cubic lattice crystalline structure having an NaCl type phase.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: September 13, 2022
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Neeraj Nepal, Charles R. Eddy, Jr., Nadeemullah A. Mahadik, Syed B. Qadri, Michael J. Mehl
  • Patent number: 11427926
    Abstract: A silicon-based molten composition according to an exemplary embodiment is used for a solution growth method for forming a silicon carbide single crystal, and represented by Formula 1 including silicon (Si), a first metal M1, a second metal M2 and a third metal M3, wherein the first metal M1 is one or more selected from the group consisting of nickel (Ni) and manganese (Mn), the second metal M2 is one or more selected from the group consisting of scandium (Sc) and titanium (Ti), and the third metal M3 is one or more selected from the group consisting of aluminum (Al) and gallium (Ga): SiaM1bM2cM3d??Formula 1 wherein a is 0.3 to 0.8, b is 0.1 to 0.5, c is 0.01 to 0.3, d is 0.01 to 0.2, and a+b+c+d is 1.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: August 30, 2022
    Inventors: Chan Yeup Chung, Ho Rim Lee, Kyoung Hoon Kim, Jung Min Ko
  • Patent number: 11427928
    Abstract: Embodiments described herein relate to a lower side wall for use in a processing chamber. a lower side wall for use in a processing chamber is disclosed herein. The lower side wall includes an inner circumference, an outer circumference, a top surface, a plurality of flanges, and a first concave portion. The outer circumference is concentric with the inner circumference. The plurality of flanges project from the inner circumference. The first concave portion includes a plurality of grooves arranged along a circumferential direction of the lower side wall. Each groove has an arc shape such that the plurality of grooves concentrate a gas when the gas contacts the plurality of grooves.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: August 30, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Akira Okabe, Yoshinobu Mori
  • Patent number: 11421343
    Abstract: A method of producing silicon carbide is disclosed. The method comprises the steps of providing a sublimation furnace comprising a furnace shell, at least one heating element positioned outside the furnace shell, and a hot zone positioned inside the furnace shell surrounded by insulation. The hot zone comprises a crucible with a silicon carbide precursor positioned in the lower region and a silicon carbide seed positioned in the upper region. The hot zone is heated to sublimate the silicon carbide precursor, forming silicon carbide on the bottom surface of the silicon carbide seed. Also disclosed is the sublimation furnace to produce the silicon carbide as well as the resulting silicon carbide material.
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: August 23, 2022
    Assignee: GTAT Corporation
    Inventors: Roman V. Drachev, Andriy M. Andrukhiv, David S. Lyttle, Santhanaraghavan Parthasarathy
  • Patent number: 11421339
    Abstract: A method of manufacturing a SiC single crystal includes: a storing step of storing a SiC source, which is a powder, in an inner bottom part of a crucible, wherein the crucible is configured to store the SiC source and to attach a seed crystal to a position of the crucible which faces the SiC source; a placing step of placing a porous material on at least a portion of a first surface of the SiC source, wherein the first surface is positioned on a side of the seed crystal; and a crystal growth step of sublimating the SiC source by heating to grow a crystal on the seed crystal, in which the porous material is formed of carbon or a carbide, and the hole diameter of the porous material is smaller than the average particle diameter of the SiC source.
    Type: Grant
    Filed: September 4, 2019
    Date of Patent: August 23, 2022
    Assignee: SHOWA DENKO K.K.
    Inventor: Yoshiteru Hosaka
  • Patent number: 11417545
    Abstract: A radiation shield and an assembly and a reactor including the radiation shield are disclosed. The radiation shield can be used to control heat flux from a susceptor heater assembly and thereby enable better control of temperatures across a surface of a substrate placed on a surface of the susceptor heater assembly.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: August 16, 2022
    Assignee: ASM IP Holding B.V.
    Inventor: Melvin Verbaas
  • Patent number: 11408089
    Abstract: The present disclosure provides a device for preparing a crystal and a method for growing a crystal. The device may include a growth chamber configured to execute a crystal growth; and a temperature control system configured to heat the growth chamber to cause that a radial temperature difference in the growth chamber does not exceed a first preset range of an average temperature in the growth chamber during the crystal growth. The method may include placing a seed crystal and a source material in a growth chamber to grow a crystal; and controlling a heating component based on information of a temperature sensing component, to cause that a radial temperature difference in the growth chamber does not exceed a first preset range of an average temperature in the growth chamber during a crystal growth.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: August 9, 2022
    Assignee: MEISHAN BOYA ADVANCED MATERIALS CO., LTD.
    Inventors: Yu Wang, Tian Yang, Zhenxing Liang, Min Li
  • Patent number: 11376822
    Abstract: A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a white corrosion-resistant non-porous outer layer associated with the ceramic insulating substrate, the white corrosion-resistant non-porous outer layer having a thickness of at least 50 ?m, a porosity of at most 1%, and a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, c) an L* value of at least 90 as measured on a planar surface of the white corrosion-resistant non-porous outer layer. Methods of making are also disclosed.
    Type: Grant
    Filed: May 12, 2017
    Date of Patent: July 5, 2022
    Assignee: CoorsTek, Inc.
    Inventors: Matthew Simpson, Ramesh Divakar, Alan Filer
  • Patent number: 11377752
    Abstract: A mono-crystalline silicon growth method includes: providing a furnace, a supporting base and a crucible which do not rotate relative to the furnace, and a heating module disposed at an outer periphery of the supporting base. After solidifying a liquid surface of a silicon melt in the crucible to form a crystal, the heating power of the heating module is successively reduced to appropriately adjust the temperature around the crucible to effectively control a temperature gradient of a thermal field around the crucible, so as to form a mono-crystalline silicon ingot by solidifying the silicon melt.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: July 5, 2022
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Chun-Hung Chen, Hsing-Pang Wang, Wen-Ching Hsu, I-Ching Li
  • Patent number: 11371160
    Abstract: A seed crystal holder for pulling up a single crystal is made of a carbon fiber-reinforced carbon composite material, and has a substantially cylindrical shape with a hollow space having a shape matching an outer shape of a substantially rod-shaped seed crystal. A direction of carbon fibers at a part in contact with at least an outer peripheral surface of the seed crystal has isotropy as viewed from a central axis of the hollow space.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: June 28, 2022
    Assignee: SUMCO CORPORATION
    Inventor: Eiichi Kawasaki
  • Patent number: 11365491
    Abstract: A method includes a graphene precursor formation process of: heating a SiC substrate to sublimate Si atoms in a Si surface of the SiC substrate so that a graphene precursor is formed; and stopping the heating before the graphene precursor is covered with graphene. A SiC substrate to be treated in the graphene precursor formation process is provided with a step including a plurality of molecular layers. The step has a stepped structure in which a molecular layer whose C atom has two dangling bonds is disposed closer to the surface than a molecular layer whose C atom has one dangling bond.
    Type: Grant
    Filed: April 27, 2017
    Date of Patent: June 21, 2022
    Assignee: KWANSEI GAKUIN EDUCATIONAL FOUNDATION
    Inventors: Tadaaki Kaneko, Yasunori Kutsuma, Daichi Dojima
  • Patent number: 11365492
    Abstract: A method for manufacturing substrate-transferred optical coatings, comprising: a) providing a first optical coating on a first host substrate as a base coating structure; b) providing a second optical coating on a second host substrate; c) bonding the optical coating of the base coating structure to the second optical coating, thereby obtaining one combined coating; d) detaching one of the first and the second host substrates from the combined coating; determining if the combined coating fulfills a predetermined condition; e) if the result of the determining step is negative, taking the combined coating together with the remaining host substrate as the base coating structure to be processed next and continuing with step b); f) if the result of the determining step is positive, providing an optical substrate and bonding the optical substrate to the combined coating; g) removing the other one of the first and the second host substrate.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: June 21, 2022
    Assignee: Thorlabs, Inc.
    Inventors: Garrett Cole, Christoph Deutsch
  • Patent number: 11355323
    Abstract: A dry etching apparatus plasma processes a wafer held by a carrier having a frame and an holding sheet. The carrier is placed on an electrode unit of a stage provided in a chamber. The electrode unit is cooled by a cooling section configured to cool the electrode unit. An upper face of the electrode unit is at least as large as the back side of the carrier. The holding sheet and the frame are cooled effectively by the heat transfer to the stage.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: June 7, 2022
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventor: Shogo Okita
  • Patent number: 11346018
    Abstract: A silicon carbide substrate production method includes: the step of providing covering layers 1b, 1b, each containing silicon oxide, silicon nitride, silicon carbonitride, or silicide, respectively on both surfaces of a base material substrate 1a carbon, silicon or silicon carbide, and turning the surface of each of the covering layers 1b, 1b into a smooth surface to prepare a support substrate 1; a step of forming a polycrystalline silicon carbide film 10 on both surfaces of the support substrate 1 by a gas phase growth method or a liquid phase growth method; and a step of separating the polycrystalline silicon carbide films from the support substrate while preserving, on the surface thereof, the smoothness of the covering layer surfaces 1b, 1b by chemically removing at least the covering layers 1b, 1b, from the support substrate 1. The silicon carbide substrate has a smooth surface and reduced internal stress.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: May 31, 2022
    Assignees: Shin-Etsu Chemical Co., Ltd., CUSIC Inc.
    Inventors: Hiroyuki Nagasawa, Yoshihiro Kubota, Shoji Akiyama