Patents Examined by Hung Juan Dang
  • Patent number: 7068415
    Abstract: A deformable mirror according to the present invention includes a substrate 1, a plurality of micromirrors 20, which are supported by the substrate 1 while being segmented from each other, and a plurality of driving sections, which drive the micromirrors 20 independently of each other. Each of the driving sections includes a number of fixed electrodes 5 to 7, and the same number of movable electrodes 13 to 15, which are provided so as to face the fixed electrodes 5 to 7. Each of the micromirrors 20 is coupled to at least two of the movable electrodes 13 to 15, which are associated with the micromirror 20. The deformable mirror can displace each micromirror 20 perpendicularly to the substrate 1 and/or tilt the micromirror 20 with respect to the substrate.
    Type: Grant
    Filed: November 26, 2002
    Date of Patent: June 27, 2006
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventor: Yoshihiro Mushika