Abstract: A lens moving mechanism includes a lens frame holding a lens; a guide shaft for slidably supporting the lens frame, the guide shaft extending parallel with the optical axis, a lead screw extending parallel to the guide shaft for moving the lens frame linearly via rotation of the lead screw; a pair of bearing arms provided on the lens frame spaced from one another in a direction parallel with the guide shaft; and a screw-engagement follower located between the bearing arms and provided separately from the lens frame, the screw-engagement follower provided with a screw-engagement portion engaging with the lead screw. The guide shaft is inserted in the bearing arms and the screw-engagement follower. The screw-engagement follower is integrally provided with an elastically deformable leg which abuts against an inner surface of a bearing arm to absorb play between the screw-engagement follower and the bearing arms.

Abstract: A MEMS device having a deformable segmented mirror. The mirror includes a plurality of movable segments supported on a substrate using spring vertices, each vertex having a fixed plate and one or more springs. In a representative embodiment, three springs support each movable segment, where each spring connects the movable segment to a different spring vertex. The MEMS device also has a plurality of electrodes, each of which can be individually biased. A movable segment moves in response to a voltage applied to an electrode located beneath that segment while the deformed springs attached to the segment provide a restoring force. Due to the fixed plates, motion of each movable segment is substantially decoupled from that of the adjacent segments, which makes the shape of the segmented mirror relatively easy to control.