Abstract: A system for sensing vibration of a machine is provided. A light source directs a beam of light toward a light receiving system adapted to receive at least a portion of the beam of light. A light modulating system modulates the light beam received by the light receiving system so as to correspond to vibration of the machine. A processing system operatively coupled to the light receiving system processes data received from the light receiving system to facilitate determining vibration of the machine.

Abstract: The present invention provides an interferometric method and system to measure the height profile of reflecting objects with respect of a reference surface. The method comprises obtaining an image of the object along a specular reflection axis, wherein the image corresponds to an intensity pattern projected on the object along a projection axis, and wherein the specular reflection axis corresponds to a direction along which a portion of the intensity pattern is specularly reflected by the object. Then the method comprises calculating an object phase using the image and determining the height profile using the object phase and a reference phase associated to the reference surface.

Abstract: A molecular interferometric imaging system for detecting an analyte in a sample, that includes an illumination source providing a beam of radiation; a pixel array for detecting radiation in an image plane; a biolayer designed to react to the analyte when it comes in contact with the sample; a substrate designed to convert phase modulation into intensity modulation which can be detected and imaged directly by the pixel array, the biolayer being on the substrate; a reference surface; an image switching means for switching between a first position for collecting a sample image of the biolayer, and a second position for collecting a reference image of the reference surface; and a processing means for producing a composite image using the sample image and the reference image for illumination normalization.

Abstract: The profile of a structure having a region with a spatially varying property is modeled using an optical metrology model. A set of profile parameters is defined for the optical metrology model to characterize the profile of the structure. A set of layers is defined for a portion the optical metrology model that corresponds to the region of the structure with the spatially varying property, each layer having a defined height and width. For each layer, a mathematic function that varies across at least a portion of the width of the layer is defined to characterize the spatially varying property within a corresponding layer in the region of the structure.

Abstract: A laser radar system using collocated laser beams to unambiguously detects a range of a target and a range rate at which the target is moving relative to the laser radar system. Another aspect of various embodiments of the invention may relate to a laser radar system that uses multiple laser radar sections to obtain multiple simultaneous measurements (or substantially so), whereby both range and range rate can be determined without various temporal effects introduced by systems employing single laser sections taking sequential measurements. In addition, other aspects of various embodiments of the invention may enable faster determination of the range and rate of the target, a more accurate determination of the range and rate of the target, and/or may provide other advantages.

Abstract: The apparatus for sensing plural gases is substantially a gas sensor adopting planar lightwave circuit for constructing reference optical path and sensing optical path, which is a flat structure with abilities of high accuracy, long-term stability, and short response time. The gas sensor can be widely applied for monitoring the safety of a working environment, securing the safety of workers, alerting potential hazard in a factory, inspecting harmful materials in a specific area, testing leakage of a pipeline, inspecting waste gas exhausted from automobile/motorcycle, and monitoring the living quality of household environment.

Abstract: A system and method for in-line inspection of specimens such as semiconductor wafers is provided. The system provides scanning of sections of specimens having predetermined standardized characteristics using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for the transmitted light beam. Light energy is transmitted in a narrow swath across the portion of the surface having the standardized features. The wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio.

Abstract: An oblique incidence interferometer is provided for applying a light at a certain angle from the normal to a measurement surface of a target to be measured and measuring a light reflected from the target. A beam splitter element and beam synthesizer element splits the light from a light source into a measurement light to be applied to the target and a reference light serving as the measurement reference. It also orthogonalizes the polarization directions of the measurement light reflected from the target and the reference light and synthesizes the lights. A three-way split prism splits the synthesized light into a plurality of split lights. Imaging units are provided to capture a plurality of interference fringe images formed in accordance with the plurality of split lights. A ¼-waveplate is provided on either one of an entry side and an exit side of the three-way split prism. Polarizers are provided on imaging surfaces of the imaging units.

Abstract: A method for triggering a heterodyne interferometer having two acousto-optical modulators in separate light paths, a receiver generating an analog signal and a downstream A/D converter converting the analog signal into a digital signal is described. The one acousto-optical modulator is triggered at a modulation frequency f1 and the other acousto-optical modulator is triggered at another modulation frequency f2, the difference between modulation frequencies f1 and f2 forming a heterodyne frequency fHet and the analog signal being converted into the digital signal in the A/D converter at sampling frequency fa. In such a heterodyne interferometer, a fixed ratio of modulation frequencies is maintained, and they are prevented from shifting due to aging and drift by forming at least two of the frequencies of modulation frequencies f1, f2 and sampling frequency fa from a fundamental frequency fqartz of a common oscillator.

Abstract: Liquid crystal point diffraction interferometer (LCPDI) systems that can provide real-time, phase-shifting interferograms that are useful in the characterization of static optical properties (wavefront aberrations, lensing, or wedge) in optical elements or dynamic, time-resolved events (temperature fluctuations and gradients, motion) in physical systems use improved LCPDI cells that employ a “structured” substrate or substrates in which the structural features are produced by thin film deposition or photo resist processing to provide a diffractive element that is an integral part of the cell substrate(s). The LC material used in the device may be doped with a “contrast-compensated” mixture of positive and negative dichroic dyes.

Abstract: In general, in one aspect, the invention features an apparatus that includes an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a partially reflective surface defining a primary reference surface and a test surface. The interferometer is configured to direct a primary portion of input electromagnetic radiation to the main cavity and an auxiliary portion of the input electromagnetic radiation to reflect from the auxiliary reference surface, wherein a first portion of the primary portion in the main cavity reflects from the primary reference surface and a second portion of the primary portion in the main cavity passes through the primary reference surface and reflects from the test surface. The interferometer is further configured to direct the electromagnetic radiation reflected from the test surface, the primary reference surface, and the auxiliary reference surface to a multi-element detector to interfere with one another to form an interference pattern.

Abstract: An optical coherence tomography system includes an optical source has an emission wavelength in the range of 1.6 ?m to 2.0 ?m, in particular having an infrared emission predominantly at a wavelength of 1.8 ?m associated with a transition between an upper energy level and a lower energy level and the optical source comprises an excitation system which generates stimulated emission from a pump level to the upper energy level. The optical source may include a Tm-doped fiber in an optical cavity.

Abstract: An ellipsometer having a light source for generating a probe beam along a probe beam path. A polarizing beam splitter passes the probe beam along the probe beam path, at least in part, as the probe beam passes through the beam splitter in a first direction, and diverts the probe beam along a detection path, at least in part, as the probe beam passes through the beam splitter in a second direction that is substantially opposite of the first direction. A compensator variably retards at least portions of the probe beam along at least one axis of the compensator, thereby changing an orientation of the light passing through the compensator. Optics focus the probe beam on a spot on a substrate. A concave mirror receives the probe beam from the spot on the substrate as it travels along the probe beam path in the first direction, and sends the probe beam back along the probe beam path in the second direction. A detector receives the probe beam along the detection path.

Abstract: An apparatus and method are provided for conducting heterodyne frequency-comb spectroscopy. The apparatus includes a first and second frequency-comb generators for generating corresponding first and second continuous wave laser beams, respectively. The first beam defines a spectrum of light having a plurality of modes spaced by a first frequency. The second beam defines a spectrum of light having a plurality of modes spaced by a second frequency that is greater than the first frequency. The first and second beams are combined and the optical power of the combined beam is monitored with a data acquisition system to record a time trace. The recorded time trace is Fourier transformed such that each of spectrums of the first and second beams will exhibit a low-frequency comb. By superimposing the two combs, a beat frequency in a low-frequency region is assigned to an optical frequency.

Abstract: A Fourier-domain optical coherence tomography (OCT) imager is presented. An OCT imager according to the present invention can have an auto-alignment process. The auto-alignment process automatically adjusts at least one optical component of a spectrometer of the imager so that the spectrometer is aligned during an imaging session. In addition to the auto-alignment process, OCT spectra are normalized for background spectra and for noise characteristics in order to provide a more accurate and clear OCT image.

Abstract: A detection system includes a modulator to apply a circular polarization modulation to an incident beam of radiation, a sample holder through which the modulated beam is pass, a grating to diffract the beam of radiation, an array of solid state detectors arranged to receive different wavelengths of the beam, and a process arranged to synchronise detected signals with the modulation applied by the modulator, in order to measure the spectral circular dichroism of the sample.

Abstract: A system and a method for thickness measurement that comprises providing a first confocal microscope, emitting a first light beam from the first confocal microscope in a first direction, focusing the first beam at a first focal plane, providing a second confocal microscope, emitting a second light beam from the second confocal microscope in a second direction substantially opposed to the first direction, focusing the second beam at a second focal plane, and adjusting the relative position of the first and second microscopes by overlapping the first and second focal planes.

Abstract: The Miniature Fourier Transform Spectrophotometer provides the capability, in a miniaturized device, of determining the light absorption/transmission spectra of a collected sample of gas or liquid though Fourier Transform spectroscopy techniques. The device takes an optical input from an optical fiber, manipulates that light through miniature optical components, and launches it into a miniaturized Michelson interferometer with a scanning mirror that acquires the interferogram of the optical input. The interferogram can be processed to retrieve the spectrum of the input light. A novel multi-stepped micro-mirror operates as the optical path length modulator in the miniaturized interferometer. A unique monolithic beamsplitter/mirror combination provides for accurate alignment of the components and greatly simplifies product integration. The device is designed to cover various optical spectra of interest.

Abstract: The present invention for detecting ultasonic displacements includes a detection laser to generate a first pulsed laser beam to generate the ultrasonic surface displacements on a surface of the target. A seocond pulsed laser beam to detect the ultrasonic surface displacements on a surface of the target. Collection optics to collect phase modulated light from the first pulsed laser beam either reflected or scattered by the target. An interferometer which processes the phase modulated light and generate at least one output signal. A processor that processes the at least one output signal to obtain data representative of the ultrasonic surface displacements at the target.

Abstract: Certain embodiments of the invention provide a light sensor comprising at least one interferometric element that absorbs light in at least one wavelength. The interferometric element comprises a first surface and a second surface substantially parallel to the first surface. The second surface is spaced a gap distance from the first surface in a direction substantially perpendicular to the first surface. The light wavelength absorbed is dependent on the gap distance. The interferometric element further comprises a temperature sensor. The temperature sensor is responsive to changes in temperature of at least a portion of the interferometric element due to absorption of light by the interferometric element.