Patents Examined by Hwa S Lee
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Patent number: 8593639Abstract: The invention relates to a system and to a corresponding method for optical coherence tomography having an interferometer (10) for emitting light with which a specimen (1) is irradiated, the interferometer (10) comprising a beam splitter (13) and at least one reflector (12) the optical distance (I) of which from the beam splitter (13) can be changed by an optical path (L), and a detector (30) with a first number of detector elements arranged in a first area for collecting light which is reflected by the specimen (1). In order to be able to record images of a specimen, in particular in real time, more simply and quickly, the system is operated in a first mode in which light reflected by the specimen (1) is only collected by a second number of detector elements of the detector (30) and converted into corresponding detector signals, the second number of detector elements being smaller than the first number of detector elements.Type: GrantFiled: February 20, 2008Date of Patent: November 26, 2013Assignee: Agfa HealthCare NVInventor: Rainer Nebosis
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Patent number: 7679755Abstract: Optical filters tunable for both center wavelength and bandwidth, having applications such as in astronomy, remote sensing, laser spectroscopy, and other laser-based sensing applications, using Michelson interferometers or Mach-Zehnder interferometers modified with Gires-Tournois interferometers (“GTIs”) are disclosed. A GTI nominally has unity magnitude reflectance as a function of wavelength and has a phase response based on its resonator characteristics. Replacing the end mirrors of a Michelson interferometer or the fold mirrors of a Mach-Zehnder interferometer with GTIs results in both high visibility throughput as well as the ability to tune the phase response characteristics to change the width of the bandpass/notch filters. A range of bandpass/bandreject optical filter modes, including a Fabry-Perot (“FP”) mode, a wideband, low-ripple FP mode, a narrowband notch/bandpass mode, and a wideband notch/bandpass mode, are all tunable and wavelength addressable.Type: GrantFiled: August 28, 2008Date of Patent: March 16, 2010Assignee: Lockheed Martin CorporationInventors: Christopher W. Tischhauser, James E. Mason
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Patent number: 7652770Abstract: An optical nonlinear evaluation device (1) capable of accurately evaluating the optical nonlinearity of a Kerr medium in accordance with a phase difference caused by cross-phase modulation generated in the Kerr medium includes: a polarization Sagnac interference path (3) provided with a Kerr medium (4); an optical pulse light source (7) for supplying a signal beam (Dsig); a polarization beam splitter (PBS1) for splitting the signal beam (Dsig) into a signal beam (Hsig) and a signal beam (Vsig) polarized in a direction orthogonal to the signal beam (Hsig), for supplying the signal beam (Hsig) to a first side of the Kerr medium (4), and for supplying the signal beam (Vsig) to a second side of the Kerr medium (4); a glass plate (14) for entering, onto the signal beam (Hsig), a control beam (Vcont) for causing a change in phase difference between the signal beam (Hsig) and the signal beam (Vsig); separating means for separating the control beam (Vcont) from the signal beam (Hsig) having traveled through the KerrType: GrantFiled: December 6, 2006Date of Patent: January 26, 2010Assignee: Japan Science and Technology AgencyInventors: Keiichi Edamatsu, Ryosuke Shimizu, Nobuyuki Matsuda
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Patent number: 7652772Abstract: Systems, methods, and apparatuses of low-coherence enhanced backscattering spectroscopy are described within this application. One embodiment includes providing incident light comprising at least one spectral component having low coherence, wherein the incident light is to be illuminated on a target object in vivo. An intensity of one or more of at least one spectral component and at least one angular component of backscattering angle of backscattered light is recorded, wherein the backscattered light is to be backscattered from illumination of the incident light on the target object and wherein the backscattering angle is an angle between incident light propagation direction and backscattered light propagation direction. The intensity of the at least one spectral component and the at least one backscattering angle of backscattered light is analyzed, to obtain one or more optical markers of the backscattered light, toward evaluating said properties.Type: GrantFiled: May 11, 2007Date of Patent: January 26, 2010Assignees: Northwestern University, NorthShore University HealthSystemInventors: Vadim Backman, Hemant Roy, Young Kim, Yang Liu, Vladimir Turzhitsky, Jeremy Rogers
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Patent number: 7652771Abstract: An interferometer has a first reflective surface having a nominal orientation; a second reflective surface having a nominal orientation orthogonal to the nominal orientation of the first reflective surface; a retroreflector facing the first reflective surface; a double polarizing beam splitter (DPBS) between the first reflective surface and the retroreflector; and a respective quarter-wave plate between the DPBS and each of the reflective surfaces. The DPBS has first and second beam-splitting surfaces each having a nominal orientation with respect to the first reflective surface. At least part of at least one of the first reflective surface, the second reflective surface and the beam-splitting surfaces is effectively tilted relative to the respective nominal orientation of such surface, and constitutes a respective tilted surface.Type: GrantFiled: October 31, 2007Date of Patent: January 26, 2010Assignee: Agilent Technologies, Inc.Inventor: Greg C Felix
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Patent number: 7652773Abstract: A system and method of detecting acousto-photonic emissions in optically turbid media that provide increased levels of detection sensitivity. The detection system includes an ultrasonic transducer, a laser, a photo-detector for detecting ultrasound-modulated laser light, and circuitry for processing the detected signals for subsequent analysis. The ultrasonic transducer generates an ultrasonic wave that propagates within an optically turbid medium. The laser generates a coherent light beam, which is split to form signal and reference beams. The signal beam is sent through the turbid medium, where it is phase modulated by the ultrasound. The ultrasound-modulated signal beam is provided to a photo-refractive crystal for subsequent interference with the reference beam to convert the phase modulation to intensity modulation.Type: GrantFiled: January 20, 2005Date of Patent: January 26, 2010Assignees: Northeastern University, Trustees of Boston UniversityInventors: Charles A. DiMarzio, Ronald A. Roy, Todd W. Murray, Florian J. Blonigen, Luis A. Nieva, Lei Sui, Gopi Maguluri
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Patent number: 7649632Abstract: Apparatus for analyzing thin surface layers. An acoustic wave generating laser beam is amplitude modulated with continuous wave modulation of a frequency in the megahertz to gigahertz range and an optical system directs the modulated radiation to a surface of a thin surface layer. This in turn causes an acoustic wave that is sensed and analyzed to provide an indication of properties of thin surface layer.Type: GrantFiled: March 23, 2005Date of Patent: January 19, 2010Assignee: The Trustees of Boston UniversityInventor: Todd W. Murray
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Patent number: 7649634Abstract: Methods are provided for estimating a surface profile of a sample in an interferometer having a broad bandwidth light source. The interferometer detects interference pattern intensity data over a series of frames of a relative scan between the sample and a reference surface.Type: GrantFiled: October 30, 2007Date of Patent: January 19, 2010Assignees: Mountain View Optical Consultant Corp., Good Advance Industries (H.K.) LimitedInventor: Der-Shen Wan
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Patent number: 7643212Abstract: A rotationally tunable time delay line device for providing a continually adjustable time delay between two orthogonally polarized laser pulses is described. The device is comprised of one or more rotational delay crystals, each made of a flat uniaxially birefringent crystal with a special orientation of its internal optical axis. The time delay generated between the two orthogonally polarized laser pulses that travel through the rotationally tunable delay line can be continually adjusted by rotating the constituent rotational delay crystals around their surface normals. An application is demonstrated in detail where the rotationally tunable time delay line device is used to form an optical autocorrelator for measuring femtosecond or picosecond duration laser pulses.Type: GrantFiled: October 9, 2008Date of Patent: January 5, 2010Inventors: Jason P. Sokoloff, Lawrence Sokoloff
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Patent number: 7643150Abstract: An optical apparatus includes a first element, a second element, a support which supports the first element, a first measuring device which measures the position of the first element relative to the support, a second measuring device which measures the position of the second element relative to the support, a third measuring device which measures any deformation of the support, and a controller. The controller controls the relative position between the first element and the second element on the basis of the measurement results obtained by the first measuring device, the second measuring device, and the third measuring device.Type: GrantFiled: August 7, 2007Date of Patent: January 5, 2010Assignee: Canon Kabushiki KaishaInventor: Ryo Nawata
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Patent number: 7639363Abstract: An Electro-Optic Imaging Fourier Transform Spectrometer (EOIFTS) for Hyperspectral Imaging is described. The EOIFTS includes an input polarizer, an output polarizer, and a plurality of birefringent phase elements. The relative orientations of the polarizers and birefringent phase elements can be changed mechanically or via a controller, using ferroelectric liquid crystals, to substantially measure the spectral Fourier components of light propagating through the EIOFTS. When achromatic switches are used as an integral part of the birefringent phase elements, the EIOFTS becomes suitable for broadband applications, with over 1 micron infrared bandwidth.Type: GrantFiled: September 7, 2006Date of Patent: December 29, 2009Assignee: California Institute of TechnologyInventors: Tien-Hsin Chao, Hanying Znod
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Patent number: 7636165Abstract: A displacement measurement system configured to provide measurement of the relative displacement of two components in six degrees of freedom with improved consistency and without requiring excessive space.Type: GrantFiled: March 21, 2006Date of Patent: December 22, 2009Assignee: ASML Netherlands B.V.Inventors: Renatus Gerardus Klaver, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch
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Patent number: 7619742Abstract: A high-speed absorption spectrographic system employs a slit-less spectroscope to obtain high-resolution, high-speed spectrographic data of combustion gases in an internal combustion engine allowing precise measurement of gas parameters including temperature and species concentration.Type: GrantFiled: June 28, 2007Date of Patent: November 17, 2009Assignee: Wisconsin Alumni Research FoundationInventor: Scott T. Sanders
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Patent number: 7616318Abstract: An electric field waveform of an optical signal is precisely measured with high time resolution. Particularly, determination of inter-symbol interference has been difficult. Output light from the laser source is divided into first and second portions. The first portion is modulated by an optical modulator. The second portion is delayed by a delay line for the same quantity of delay as that of the first portion. The first and second portions are fed to a phase diversity circuit to configure a homodyne interferometer. An optical input sampling oscilloscope stabilizes a variable optical phase shifter to set an optical phase at a particular point of time to a fixed value using a pattern sync signal as a reference. An optical input sampling oscilloscope repeatedly averages optical waveforms and a CPU conducts three-dimensional display of the optical electric field waveform from which noise has been removed.Type: GrantFiled: August 29, 2006Date of Patent: November 10, 2009Assignee: Hitachi Communication Technologies, Ltd.Inventor: Nobuhiko Kikuchi
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Patent number: 7612890Abstract: The invention is directed to a system and method for implementing process control for temperature of a semiconductor wafer using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test object during the manufacturing process. A detector such as an interferometer may be used to detect the ultrasound waves. An interpreter or analyzer may determine the temperature of the semiconductor wafer from the waves. Then, a control system may determine and implement an appropriate control action on the process.Type: GrantFiled: May 9, 2002Date of Patent: November 3, 2009Assignee: Lockheed Martin CorporationInventor: Thomas E. Drake, Jr.
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Patent number: 7609388Abstract: A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134) wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.Type: GrantFiled: October 16, 2002Date of Patent: October 27, 2009Assignee: ICOS Vision Systems NVInventors: Yoel Arieli, Shay Wolfling, David Banitt, Yosi Weitzman, Yoram Saban, Emmanuel Lanzmann, Shay Levavi
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Patent number: 7602503Abstract: A method for measuring a wavefront of an optical system. A first step of the method includes directing electromagnetic radiation uniformly at an object plane having a first grating positioned therein. Lines of the first grating comprise a plurality of dots. A second step of the method includes projecting an image of the first grating onto a focal plane having a second grating positioned therein. A third step of the method includes measuring the wavefront of the optical system based on a fringe pattern produced by the second grating.Type: GrantFiled: February 21, 2007Date of Patent: October 13, 2009Assignee: ASML Holdings N.V.Inventor: Sherman K. Poultney
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Patent number: 7602498Abstract: A dome-shaped chemical sensing probe comprises an optical fiber or may be mounted on an optical fiber. The probe has a chemically sensitive measuring material which exhibits a change in volume and/or a change in refractive index in the presence of a given chemical. The change in volume and/or refractive index gives a change in an optical path length through the probe which can be measured interferometrically.Type: GrantFiled: March 14, 2006Date of Patent: October 13, 2009Assignee: Invivosense ASAInventors: Dag R. Hjelme, Arne Berg, Reinold Ellingsen, Berit Falch, Astrid Bjørkøy, Dan Østling
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Patent number: 7580134Abstract: This invention provides a method and an apparatus of measuring a micro-structure, capable of evaluating a geometry of a micro-structure formed typically on the surface of a semiconductor substrate, in a non-destructive, easy, precise and quantitative manner. A reflection spectrum of a sample having a known dimension of a target micro-geometry is measured (A1), features (waveform parameters) which strongly correlate to a dimension of the measured micro-geometry are determined (A2), a relation between the dimension of the micro-geometry and the waveform parameters is found (A3), and a dimension of the micro-structure having an unknown dimension is finally determined using this relation and based on the reflection spectrum obtained therefrom (A4, A5).Type: GrantFiled: August 27, 2008Date of Patent: August 25, 2009Assignee: NEC Electronics CorporationInventor: Yoshiharu Muroya
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Patent number: 7576864Abstract: An interferometric measuring device for recording geometric data for surfaces of at least one object, including a beam supply section including a modulation interferometer fed by a light source including temporarily coherent broadband radiation, a measuring interferometer system that is connected thereto and includes a plurality of probe units for emitting radiation of measuring beams onto the assigned surface locations and recording the radiation reflected by the surface locations, the radiation forming interference with radiation reflected by a related reference element system, and including a downstream receiving and evaluation device for determining geometric data on the basis of the interfering radiation.Type: GrantFiled: August 17, 2004Date of Patent: August 18, 2009Assignee: Robert Bosch GmbHInventors: Michael Lindner, Bernd Schmidtke