Abstract: The invention relates to a system and to a corresponding method for optical coherence tomography having an interferometer (10) for emitting light with which a specimen (1) is irradiated, the interferometer (10) comprising a beam splitter (13) and at least one reflector (12) the optical distance (I) of which from the beam splitter (13) can be changed by an optical path (L), and a detector (30) with a first number of detector elements arranged in a first area for collecting light which is reflected by the specimen (1). In order to be able to record images of a specimen, in particular in real time, more simply and quickly, the system is operated in a first mode in which light reflected by the specimen (1) is only collected by a second number of detector elements of the detector (30) and converted into corresponding detector signals, the second number of detector elements being smaller than the first number of detector elements.

Abstract: A network is assessed, in particular, a network having a main line and a plurality of branch lines. The method includes the steps of: (i) introducing test signals into the main line, the main line being coupled to the branch lines; (ii) imposing a modulation on test signals which propagate along the branch line, and (iii) monitoring test signals returned along the main line. The imposed phase modulation is detected interferometrically such that the test signals from the designated branch line can be distinguished with respect to the signals returned from other branch lines.

Abstract: An optical sensor array includes a plurality of interferometric sensors that are disposed at a plurality of locations in a region of interest. To determine a physical parameter at the plurality of locations, the array is interrogated with a plurality of optical pulses covering a range of optical wavelengths. The signals returned in response to the interrogating pulses are analyzed to determine an optical path imbalance associated with each sensor, where the optical path imbalance bears a relationship to the physical parameter of interest. Each sensor's contribution to the returned signals is determined by measuring the transit time between the launching of the interrogating pulses and the detection of the returned signals. By determining each sensor's contribution, the physical parameter may be determined at each of the plurality of locations.

Abstract: A measurement method of measuring a wavefront aberration of an optical system to be measured, comprising a first measurement step of measuring wavefronts of the optical system to be measured with respect to linearly polarized light beams along at least three different azimuths, a first calculation step of calculating a wavefront of the optical system to be measured with respect to non-polarized light and a birefringent characteristic of the optical system to be measured, based on the wavefronts of the optical system to be measured, which are measured in the first measurement step, and a second calculation step of calculating a wavefront of the optical system to be measured with respect to arbitrary polarized light, based on the wavefront and the birefringent characteristic of the optical system to be measured, which are calculated in the first calculation step.

Abstract: Frequency domain optical coherence imaging systems have an optical source, an optical detector and an optical transmission path between the optical source and the optical detector. The optical transmission path between the optical source and the optical detector reduces an effective linewidth of the imaging system. The optical source may be a broadband source and the optical transmission path may include a periodic optical filter.

Abstract: An interferometer produces a first optical signal and a second optical signal interfering with each other. The optical signals are converted digital signals form addresses. A memory stores data values corresponding to the first and second optical signals, and in which the addresses are used to directly read the data values stored at the addresses. The data values stored in the memory can be dynamically adapting while converting the first and second optical signals and reading the data values.

Abstract: A lithographic apparatus includes a position measurement system to determine along a measurement path a position of a first part of the lithographic apparatus with respect to a position of a second part of the lithographic apparatus. The position determination system comprises a plurality of temperature sensors to measure a temperature of a medium along the measurement path. The position measurement system corrects the determined position making use of the temperature as measured by the temperature sensors.

Abstract: An optical perturbation sensing system includes a probing beam incident on a medium with perturbations and a sensing beam redirected from the medium and incident on a surface area of a photodetector. A reference beam directed onto the photodetector surface forms, with the sensing beam, an interference pattern on the photodetector surface and a phase patterner with at least two phase regions across its section, generates different phases in different regions of the interference pattern. An array of photodetector elements detects each phase region of the interference pattern and a constructive combiner subtract pairs of the detected signals, squares the subtracted signal squares, and sums the squared signals to form a stronger detected signal with reduced intensity noise, reduced background noise, and reduced sensitivity to phase drifts.

Abstract: This invention relates to an interference filter, especially for use in gas detection with infrared light within a chosen range, comprising at least two essentially parallel and partially reflective surfaces with a chosen distance between them thus defining a cavity delimited by the reflecting surfaces between which the light may oscillate, and wherein at least one of said surfaces is partially transparent for transmission of light to or from said cavity. The filter comprises a first transparent material having a high refractive index, e.g. silicon, positioned in at least a part of said cavity, and at least one of said reflective surfaces being divided into a three dimensional pattern with varying shift relative to its plane, thus to provide a position dependent resonance condition between them for separation of different wavelengths in the light.

Abstract: An apparatus and method for sensing hazardous materials utilizes first and second optical fibers and a recirculator coupled to a substrate. The first optical fiber is coupled to the substrate and has first and second opposing ends and a first substance embedded therein. The first substance is reactive to a first hazardous material type. The second optical fiber is coupled to the substrate and has first and second opposing ends and a second substance embedded therein. The second substance is reactive to a second hazardous material type. The at least one recirculator is coupled to the substrate and configured such that when light propagates from one of the ends of at least one of the first and second optical fibers, at least some of the light is directed by the at least one recirculator into the opposing end of the respective optical fiber.

Abstract: Optical filters tunable for both center wavelength and bandwidth, having applications such as in astronomy, remote sensing, laser spectroscopy, and other laser-based sensing applications, using Michelson interferometers or Mach-Zehnder interferometers modified with Gires-Tournois interferometers (“GTIs”) are disclosed. A GTI nominally has unity magnitude reflectance as a function of wavelength and has a phase response based on its resonator characteristics. Replacing the end mirrors of a Michelson interferometer or the fold mirrors of a Mach-Zehnder interferometer with GTIs results in both high visibility throughput as well as the ability to tune the phase response characteristics to change the width of the bandpass/notch filters. A range of bandpass/bandreject optical filter modes, including a Fabry-Perot (“FP”) mode, a wideband, low-ripple FP mode, a narrowband notch/bandpass mode, and a wideband notch/bandpass mode, are all tunable and wavelength addressable.

Abstract: In certain aspects, disclosed methods include combining reference light reflected from a reference surface with test light reflected from a test surface to form combined light, the test and reference light being derived from a common source, sinusoidally varying a phase between the test light and reference light, where the sinusoidal phase variation has an amplitude u, recording at least one interference signal related to changes in an intensity of the combined light in response to the sinusoidal variation of the phase, determining information related to the phase using a phase shifting algorithm that has a sensitivity that varies as a function of the sinusoidal phase shift amplitude, where the sensitivity of the algorithm at 2 u is 10% or less of the sensitivity of the algorithm at u.

Abstract: When reflection light, reflected from a measurement target that has been irradiated with measurement light in such a manner to scan the measurement target, and reference light are combined in each wavelength sweep, interference light is detected as interference signals. When a thinning region in which the interference signals obtained by detecting the interference light in each wavelength sweep are thinned so that the interference signals that are used to produce the tomographic image remain is set, thinning is performed on the plurality of interference signals in the thinning region. Light intensity information about the measurement target in the thinning region is obtained, based on the interference signals for the respective wavelength sweeps, the interference signals remaining after thinning. The tomographic image in the thinning region is produced based on the obtained light intensity information.

Abstract: A device can include both a photosensing component and an optical cavity structure, with the optical cavity structure including a part that can operate as an optical cavity in response to input light, providing laterally varying output light. For example, the optical cavity can be a graded linearly varying filter (LVF) or other inhomogeneous optical cavity, and the photosensing component can have a photosensitive surface that receives its output light without it passing through another optical component, thus avoiding loss of information. The optical cavity part can include a region that can contain analyte. Presence of the analyte affects the optical cavity part's output light, and the photosensing component can respond to the output light, providing sensing results indicating the analyte's optical characteristics.

Abstract: A method and system are disclosed for detecting the presence of a perturbation of a microresonator including the step of exciting at least first and second resonant guided optical modes of a microresonator with a light source that is in optical communication with the microresonator. The method further includes inducing a first frequency shift in the first resonant guided optical mode and a second frequency shift in the second resonant guided optical mode, wherein the second frequency shift can be zero. Another step of the method is comparing the first frequency shift and the second frequency shift.

Abstract: Disclosed is a method that includes combining a first light beam and at least a second light beam to form a combined light beam, introducing a sinusoidal phase shift with a frequency f between a phase of the first light beam and a phase of the second light beam, recording at least one interference signal based on a modulation of the combined light beam in response to the sinusoidal phase shift, where the interference signal includes at least three different frequency components, and outputting the information. For each interference signal, information related to the difference in optical path lengths of the first and second light beam is determined by comparing the intensity of the at least three different frequency components of the interference signal.

Abstract: An integrated interferometric gyroscope and accelerometer device. An example device includes a cantilever beam, a package having a post connected to one end of the beam, a piezoresistor driver, a piezoresistor sensor, and a semiconductor interferometric optical gyro. The piezoresistor driver is incorporated within the beam at a first area proximate to the post. The driver electro-thermally resonates the beam. The piezoresistor sensor is incorporated within the beam at the first area. The sensor piezoresitively senses a signal that relates to an acceleration force out-of-plane of the beam. The semiconductor interferometric optical gyro is also incorporated within the beam at a second area of the beam. The gyro senses rotational motion about an axis approximately equivalent to the acceleration force out-of-plane of the beam. The gyro includes a waveguide, a laser source and a light detector. The beam is formed from a semiconductor substrate.

Abstract: A method of measuring properties of particles includes generating a beam of radiation (IW); illuminating with the beam (IW) an observation region (MR) which is transited by a particle (B). A portion of the beam (IW) gives rise to radiation (SW) which is scattered by scattering interaction with the particle (B), and another portion (TW) is transmitted substantially undisturbed through the observation region (MR). In a detection plane (M), a plurality of radiation intensity values are detected which are determined by the interference between the scattered radiation (SW) and the transmitted radiation (TW). The detection of the radiation intensity values in the detection plane (M) is carried out according to a time sequence of acquisitions corresponding to successive transit positions of the particle through the observation region (MR).

Abstract: An apparatus and method for obtaining depth-resolved spectra for the purpose of determining the size of scatterers by measuring their elastic scattering properties. Depth resolution is achieved by using a white light source in a Michelson interferometer and dispersing a mixed signal and reference fields. The measured spectrum is Fourier transformed to obtain an axial spatial cross-correlation between the signal and reference fields with near 1 ?m depth-resolution. The spectral dependence of scattering by the sample is determined by windowing the spectrum to measure the scattering amplitude as a function of wavenumber.

Abstract: A method is described for determining depth-resolved backscatter characteristics of scatterers within a sample, comprising the steps of: acquiring a plurality of sets of cross-correlation interferogram data using an interferometer having a sample arm with the sample in the sample arm, wherein the sample includes a distribution of scatterers therein, and wherein the acquiring step includes the step of altering the distribution of scatterers within the sample with respect to the sample arm for substantially each acquisition; and averaging, in the Fourier domain, the cross-correlation interferogram data, thereby revealing backscattering characteristics of the scatterers within the sample.