Abstract: Methods and systems for characterizing dimensions and material properties of semiconductor devices by transmission small angle x-ray scatterometry (TSAXS) systems having relatively small tool footprint are described herein. The methods and systems described herein enable Q space resolution adequate for metrology of semiconductor structures with reduced optical path length. In general, the x-ray beam is focused closer to the wafer surface for relatively small targets and closer to the detector for relatively large targets. In some embodiments, a high resolution detector with small point spread function (PSF) is employed to mitigate detector PSF limits on achievable Q resolution. In some embodiments, the detector locates an incident photon with sub-pixel accuracy by determining the centroid of a cloud of electrons stimulated by the photon conversion event. In some embodiments, the detector resolves one or more x-ray photon energies in addition to location of incidence.

Abstract: An x-ray scanning system includes an x-ray source that produces a collimated fan beam of incident x-ray radiation. The system also includes a chopper wheel that can be irradiated by the collimated fan beam. The chopper wheel is oriented with a wheel plane containing the chopper wheel substantially non-perpendicular relative to a beam plane containing the collimated fan beam. In various embodiments, a disk chopper wheel's effective thickness is increased, allowing x-ray scanning with end point energies of hundreds of keV using relatively thinner, lighter, and less costly chopper wheel disks. Backscatter detectors can be mounted to an exterior surface of a vehicle housing the x-ray source, and slits in the disk chopper wheel can be tapered for more uniform target irradiation.

Abstract: A processing liquid supplying apparatus is arranged to discharge a processing liquid from a discharge port to supply the processing liquid to a processing object, and the processing liquid supplying apparatus includes a first piping, through the interior of which the processing liquid can flow, the interior of the first piping being in communication with the discharge port, and an X-ray irradiating means irradiating X-rays onto the processing liquid present inside the first piping. The first piping has an opening in its pipe wall and the opening is closed by a window member formed using a material that can transmit the X-rays, and the X-ray irradiating means irradiates the X-rays onto the processing liquid present inside the first piping via the window member.

Abstract: A quick vehicle check system comprises a radiation source which produces a first X ray with a first dose and a second X ray with a second dose, wherein the first dose is smaller than the second dose, and the first X ray is used for checking a first part of a checked vehicle and the second X ray is used for checking a second part of the checked vehicle; a first sensor for detecting a set position of the checked vehicle; a second sensor for detecting a passing distance of the checked vehicle; and a control unit coupled with the first sensor and the second sensor, which receives the set position of the checked vehicle from the first sensor and receives the passing distance of the checked vehicle from the second sensor.

Abstract: The present approach relates to generating one or both of a failure prediction indication for an X-ray tube or a remaining useful life estimate for the X-ray tube. In one implementation, a trained static tube model is used in estimating health (e.g., thickness) of the electron emitter of the X-ray tube, which in turn may be used in predicting remaining useful life of an electron emitter of the X-ray tube.

Abstract: A distance SRD can be obtained from sizes of projection images of a calibration instrument on a table at a first point (that is an imaging position) and a second point and a distance between rotation center axes of the table at the first point and the second point. Furthermore, a distance SDD can be obtained by adding up the distance SRD thus obtained and a distance between an X-ray detector and the rotation center axis of the table at the first point, and a ratio between the distances SRD, SDD is taken as an imaging magnification of imaging at the first point.

Abstract: Methods and systems for realizing a high brightness, liquid based x-ray source suitable for high throughput x-ray metrology are presented herein. A high brightness x-ray source is produced by bombarding a rotating liquid metal anode material with a stream of electrons to generate x-ray radiation. A rotating anode support structure supports the liquid metal anode material in a fixed position with respect to the support structure while rotating at the constant angular velocity. In another aspect, a translational actuator is coupled to the rotating assembly to translate the liquid metal anode in a direction parallel to the axis of rotation. In another aspect, an output window is coupled to the rotating anode support structure. Emitted x-rays are transmitted through the output window toward the specimen under measurement. In another further aspect, a containment window maintains the shape of the liquid metal anode material independent of rotational angular velocity.

Abstract: A scintillator panel has a barrier rib structure, whereby opposing light-receiving substrates can be aligned with high precision and bonded with a photoelectric conversion element. In the scintillator panel, cells demarcated by lattice shaped barrier ribs formed on a sheet-shaped base member are filled with a phosphor for receiving radiation and emitting light, thereby configuring a pixel structure. The scintillator panel has portions in which the lattice-shaped barrier ribs are exposed on both a front surface and a back surface in a portion of a non-display region of the panel external periphery. The exposed parts are optically transparent.

Abstract: An x-ray device is presented. The x-ray device includes a cathode configured to emit an electron beam. Also, the x-ray device includes an anode configured to rotate about a longitudinal axis of the x-ray device and positioned to receive the emitted electron beam, where the anode includes a target element disposed on an anode surface of the anode and a track element embedded in the target element, where the track element is configured to generate x-rays in response to the emitted electron beam impinging on a focal spot on the track element, where at least a portion of the track element is configured to transition from a first phase to a second phase based on heat generated in at least a portion of the track element, and where at least the portion of the track element is configured to distribute the generated heat across the anode.

Abstract: A system and a method for acquiring image data of a subject with an imaging system is provided. The system can include a gantry that completely annularly encompasses at least a portion of the subject, with a source positioned within and movable relative to the gantry. The source can be responsive to a signal to output at least one pulse. The system can include a detector positioned within and movable relative to the gantry to detect the pulse emitted by the source. The system can also include a detector control module that sets detector data based on the detected pulse, and an image acquisition control module that sets the signal for the source and receives the detector data. The image acquisition control module can reconstruct image data based on the detector data. The signal can include a signal for the source to output a single pulse or two pulses.

Abstract: An automation method is disclosed for an X-ray tube scanner having an X-ray tube and an X-ray detector. The method allows the X-ray tube scanner to detect the X-ray detector's plane with an object to be imaged placed on the X-ray detector; determine a boundary box of the object to be imaged on the X-ray detector; determine the object's center position and orientation on the X-ray detector's plane; transfer the object's center position from the object's coordinate system to the X-ray tube's coordinate system; and estimate the X-ray tube control parameters for aligning the X-ray field emitted from the X-ray tube's collimator to the object's center position and the object's orientation on the X-ray detector.

Abstract: A method for conveying one or more predictive indicators of an imaging control parameter is provided. The method includes: obtaining an initial image acquisition via an imaging system based at least in part on an initial configuration of the imaging system; collecting data regarding the imaging control parameter during the initial image acquisition; and generating the one or more predictive indicators based at least in part on the collected data. Each of the one or more predictive indicators corresponds to a calculated value of the imaging control parameter associated with a potential configuration of the imaging system different from the initial configuration.

Abstract: A method of making X-ray fluorescence, XRF, measurements of a layered sample is described. At least two measurements are made, one through one surface of the sample and another through the opposite surface. This may be conveniently done by inverting the sample between the measurements. The data from the additional measurements may be used to calculate multiple parameters of the sample, such as the concentration, density or thickness of each of the layers.

Abstract: The present disclosure relates to systems and methods for image data processing. A first correction coefficient corresponding to a first collimation width of a collimator of a scanner may be obtained. The collimator may have a collimation width being adjustable. A relationship between scattered radiation intensities and collimation widths may be obtained. A relationship between correction coefficients and collimation widths may be determined based on the first correction coefficient, the first collimation width, and the relationship between scattered radiation intensities and collimation widths. A target collimation width of the collimator may be obtained. A target correction coefficient may be determined based on the target collimation width and the relationship between correction coefficients and collimation widths.

Abstract: An X-ray apparatus includes a two-dimensional pixel array having rectangular pixels outputting an electrical signal responsively to an incident X-ray photon. This array has a row direction oblique to a scan direction. When viewing in the scan direction, a pixel group is provided solely or repeatedly, the pixel group being composed of “M rows × N pieces” of pixels (M is a positive integer equal to or larger than 1, N is a positive integer equal to or larger than 2, and M and N have a relationship of prime numbers). The pixel group occupies a quadrangle whose diagonal line is parallel with the scan direction. In a memory space, the frame data from the pixels are converted to frame data in a Cartesian coordinate system having a row direction which is in parallel with the scan direction and a column direction orthogonal to the row direction.

Abstract: A method for use in medical imaging of a patient including, with the patient immobilized with respect to an imaging reference frame, acquiring first digital imaging information including a first region of interest using a first imaging modality; processing the first digital imaging information to identify a feature for analysis; and using a second imaging modality to acquire targeted second imaging information for a second region of interest, the second region of interest corresponding to a subset of the first region of interest, wherein the second region of interest includes the feature for analysis.

Abstract: Disclosed is an X-ray image forming device is disclosed. The device includes an X-ray imaging unit including a rotating member rotatable about a rotating shaft and linearly movable, and an X-ray source and an X-ray sensor disposed at opposite ends of the rotating member to face each other with a region of interest therebetween, a penetration data acquisition unit configured to acquire X-ray penetration data from multiple directions crossing through an image layer in the region of interest by controlling the X-ray imaging unit and an image reconstructor configured to generate projection data in a predetermined angle range at each section of the image layer from the X-ray penetration data, and reconstruct a two-dimensional X-ray panoramic image of the image layer based on the projection data.

Abstract: A position sensor has one or more fiducials formed of radio-opaque material and mounted along a surface of a radio-translucent body. A sensor element is coupled to the radio-translucent body and is spaced apart from the one or more fiducials and is energizable to acquire image content during receipt of exposure energy from an X-ray source to the position sensor. The sensor element is in signal communication with a processor and is energizable to generate data that is indicative of a relative position of the X-ray source. A radio-opaque covering is coupled against an outer surface of the radio-translucent body.

Abstract: A radiographic imaging apparatus comprises: a leg unit that is capable of traveling on an apparatus-placement surface by a wheel unit; a body unit that is held on the leg unit; an arm unit that is connected to the body unit and is capable of protruding upward from the body unit; and a radiation source that is mounted on the arm unit, wherein the arm unit includes a body-side part that is capable of extending and retracting in a direction of the protruding of the arm unit and is connected to the body unit, and a radiation source-side part on which the radiation source is mounted, the radiation source-side part is connected to a distal end side of the body-side part so as to be revolvable in a direction where an angle between the radiation source-side part and the body-side part changes, and revolution regulating unit.

Abstract: The present invention is a self-contained mobile inspection system and method and, more specifically, improved methods and systems for detecting materials concealed within a wide variety of receptacles and/or cargo containers. In particular, the present invention is an improved method and system with a novel boom structure that reduces the weight of the boom. The single, light-weight boom of the inspection system is relatively compact in a stowed configuration and has a low height and center of gravity lending to greater maneuverability.