Patents Examined by Irakli Kikndze
  • Methods and apparatus for void characterization
    Patent number: 6801596
    Abstract: The present invention provides a system for characterizing voids in test samples. An x-ray emission inducer scans a target such as a via on a test sample. A metallization or thin film layer emits x-rays as a result of the scan. The x-ray emission intensity can be measured and compared against a control measurement. The information obtained can be used to characterize a void in the scan target.
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: October 5, 2004
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Mehran Nasser-Ghodsi, Anne Testoni, Steve Oestreich