Abstract: Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements are provided. One illumination subsystem includes a light source configured to generate coherent pulses of light and a dispersive element positioned in the path of the coherent pulses of light, which is configured to reduce coherence of the pulses of light by mixing spatial and temporal characteristics of light distribution in the pulses of light. The illumination subsystem also includes an electro-optic modulator positioned in the path of the pulses of light exiting the dispersive element and which is configured to reduce the coherence of the pulses of light by temporally modulating the light distribution in the pulses of light. The illumination subsystem is configured to direct the pulses of light from the electro-optic modulator to a specimen positioned in the metrology system.

Abstract: A smoke detector (1) includes: a light emitting section (6); a light receiving section (7); a smoke detecting section (12), the smoke detector (1) being configured to detect smoke or the like in a manner that the light receiving section (7) receives, via a light transmissive member (11), scattered light generated when light emitted from the light emitting section (6) is scattered in the smoke detecting section (12) due to particles of the smoke or the like; and a test light source (22) provided for detecting light receiving sensitivity of the light receiving section. The smoke detector (1) is further configured to detect a reduction in the light receiving sensitivity of the light receiving section (7) through detection of an increase in received light intensity of test light, which is emitted from the test light source (22) and is received by the light receiving section (7).

Abstract: A system for inspecting chips in a tray comprises a three-dimensional sensor, a focus computing unit, an image sensor and a focusing device. The three-dimensional sensor is used to obtain the height signals of surfaces of the chips. The focus computing unit calculates the focusing positions of chips. The surface inspection sensor is used to inspect the surfaces of the chips. The focusing device is used to bring the images of the surfaces of the chips into the focus of the image sensor.