Abstract: The invention is a non contact laser inspection self centering device to inspect the counter sink portion of a counter sunk fastener hole on a surface. In detail, the self centering and seating device includes a combination laser transmitter and receiver for transmitting a laser bean across a surface and for receiving the return signal from the surface. A self centering device is attached to the combination laser transmitter and receiver for aligning the laser transmitter with the fastener hole such that the transmitted and received laser beam passes across the center of the counter sink portion of the fastener hole. A computer system is connected to the combination laser transmitter and receiver for analyzing the transmitted and returned laser signal from the surface and determining if the counter sink portion of the hole is within tolerance.

Abstract: Method and systems related to obstructing a first predefined portion of at least one defined wavelength of light incident upon a first photo-detector array; and detecting the at least one defined wavelength of light with a photo-detector in a second photo-detector array.

Abstract: A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam of light towards the traveling lens while the traveling lens propagates; a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating light beams; multiple detectors; and an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beams towards multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the multiple collected light beams towards the multiple detectors; wherein each detector is associated with an area of the multiple areas.

Abstract: Disclosed are apparatus and methods for measuring a characteristic, such as overlay, of a semiconductor target. In general, order-selected imaging and/or illumination is performed while collecting an image from a target using a metrology system. In one implementation, tunable spatial modulation is provided only in the imaging path of the system. In other implementations, tunable spatial modulation is provided in both the illumination and imaging paths of the system. In a specific implementation, tunable spatial modulation is used to image side-by-side gratings with diffraction orders ±n. The side-by-side gratings may be in different layers or the same layer of a semiconductor wafer. The overlay between the structures is typically found by measuring the distance between centers symmetry of the gratings. In this embodiment, only orders ±n for a given choice of n (where n is an integer and not equal to zero) are selected, and the gratings are only imaged with these diffraction orders.

Abstract: A receiver including an analyzer and a detector coupled to the output of the analyzer. The analyzer selects a polarized component of a return beam for input to the detector. The analyzer may be linear, circular or elliptical. Coupled with a laser adapted to output a polarized beam, the receiver provides an active optical target detector. An arrangement may be included for compensating for rotation and ellipticity in the returned beam. In one embodiment, the arrangement for compensating for rotation of the orientation of linear polarization in the returned beam includes a Faraday rotator positioned between the transmitter and the analyzer. An arrangement is disclosed for varying the rotation in the returned beam using a Faraday rotator until a maximum transmittance is achieved. In an alternative embodiment, the arrangement for compensating for ellipticity in the returned beam includes an electro-optical modulator positioned between the transmitter and the analyzer.

Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.

Abstract: A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.

Abstract: Photography is employed to objectively quantify opacity of fluids such as smoke plumes and dust via a method termed the Digital Optical Method (DOM™). The DOM™ quantifies the ratio of radiance values by means of a camera response curve obtained using objective measures. The radiance ratios are then used to calculate opacity of target fluids such as smoke plumes. The DOM™ quantifies opacity during both daytime and nighttime conditions with a much broader range of subject types, e.g., white, gray and black smoke plumes, and environmental conditions, e.g., non-blue-sky, building, and mountain backgrounds, than existing systems while not requiring human interpretation for any application. In one embodiment, the DOM™ quantifies opacity from digital photos using a pre-designed algorithm and an inexpensive digital camera. Very little training is needed to implement the DOM™ and it yields consistent objective quantitative results, while providing a permanent photographic record easily digitally archived.

Abstract: A method and apparatus is described for contact-free 3 dimensional-measuring of a moving object with periodic motion. The method and apparatus makes use of the projection of a defined intensity pattern onto the moving object and the recording and analysis of a reflected pattern from the object wherein the intensity pattern projection is synchronized to a characteristic periodic frequency period or sub-period of the moving object.

Abstract: An optical droplet sensor can include a light emitter, a light receiver and a light guide, and can be adhered onto an inner surface of a windshield via a light transmissive adhesive layer. The light guide can include a light entry surface and a light exit surface formed of respective convex-shaped arbitrary curved surfaces, a light entry/exit surface formed of a flat plane, and a reflecting surface that can be made of a metal film. The light emitted from the light emitter is given an optimized light distribution at the light entry surface and introduced into the light guide. The light is then reflected from the metal film-applied reflecting surface toward an outer surface of the windshield. The light totally reflected at the outer surface returns to the light exit surface and is given an optimized light distribution at the light exit surface. The light is then externally transmitted/released from the light guide and collected on a light-receiving surface of the light receiver.

Abstract: A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.

Abstract: In a sensor head, parallel rays or approximately parallel rays are generated by a pair of condenser lenses that reciprocate according to vibrations of a collimate lens and a tuning fork, and go out from a light port. To the light port, a lens holder in which an objective lens is supported is detachably attached. The light from the light port is processed to measurement beams that are condensed by the objective lens to a predetermined position.

Abstract: The present invention provides a method for the wavelength independent measurement or testing of the dispersion penalty, or dispersion tolerance, of optical transmitters that comprises a single setup, measures or tests the components only to a specified amount of dispersion, and not beyond, improves yield, and reduces component cost. This method utilizes a predetermined physical length of non-dispersion shifted fiber (NDSF) combined with a dispersion compensating module (DCM) that is designed for use with non-zero dispersion shifted fiber (NZDSF). As the dependence of the dispersion with wavelength of NZDSF is different from that of NDSF, by combining the proper physical length of NDSF and DCM designed for use with NZDSF, the total dispersion of the two elements can be made constant as a function of wavelength.

Abstract: A sensor measuring properties of a substrate in which radiation is projected onto the substrate by a radiation projector that has a first part configured such that the radiation projection can project onto the substrate linearly polarized radiation oriented in a first direction and a second part configured such that the radiation projector can project onto the substrate linearly polarized radiation oriented in a second direction orthogonal to the first direction.

Abstract: A system for measuring an object and for monitoring the surface of the object. The system comprises at least a first subsystem for determining one or more dimensions of the object and a position of the object within the first subsystem, and at least a second subsystem for determining a surface structure of the object. Further, the system comprises a control unit generating control signals (iii) for operation of the second subsystem as a function of data (i) of the first subsystem with respect to a position of the object in the first subsystem and/or the dimension of the object, and of data (ii) of the second subsystem with respect to a position of the camera device in the second subsystem.

Abstract: A particle-optical apparatus comprising: A first source, for generating a first irradiating beam (E) along a first axis (A1); A second source, for generating a second irradiating beam (I) along a second axis (A2) that intersects the first axis at a beam intersection point, the first and second axes (A1, A2) defining a beam plane, A stage assembly (3) for positioning a sample in the vicinity of the beam intersection point, provided with: A sample table (21) to which the sample can be mounted; A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point, wherein the set of actuators is further arranged to effect: rotation of the sample table about a rotation axis (RA) substantially parallel to the Z-axis, and; rotation of the sa

Abstract: A method of dynamically imaging, calibrating and measuring bump height and coplanarity of a plurality of bumps on a surface is disclosed. The method includes illuminating the plurality of bumps with multispectral light from at least one light source, and receiving light of a first wavelength at an imaging device such that a top view image of at least a portion of the plurality of bumps is captured. The light of the first wavelength is reflected off the plurality of bumps at a first angle from the surface. Light of a second wavelength is received at the imaging device such that at least one oblique side view image of at least a portion of the plurality of bumps is captured. The light of the second wavelength is reflected off the plurality of bumps at a second angle from the surface. The captured images are processed to determine absolute bump height and coplanarity. A corresponding apparatus is also disclosed.

Abstract: An optical gas sensing apparatus for sensing gas includes a tubular housing member, a column light source member, a column light sensing element member and an adhesive. The tubular housing member has a light-reflecting inner surface. The column light source member is provided to a first end portion of the housing member, wherein the light source member has a light source, which emits light. The column light sensing element member is provided to a second end portion of the housing member, wherein the light sensing element member has a light sensing element, which senses the light emitted by the light source. The adhesive connects the housing member to at least one of the light source member and the light sensing element member.

Abstract: The present invention relates to a three-dimensional image measuring apparatus comprising: an XYZ shaft transfer means mounted onto a base member; a work stage mounted to the base member, for moving a measuring object to a measuring position and thereafter supporting it and having a predetermined reference surface set at a side thereof; an image obtaining means in which it is moved toward X, Y and Z shafts by the XYZ shaft transfer means, scans a grating image by the frequency of N times to a side of the measuring object supported and fixed to the work stage, obtains the changed grating image by the measuring object by N times; a light emitting means mounted to a side of the image obtaining means for generating and emitting light with a predetermined wavelength; and a control unit which irradiates light generated from the light emitting means mounted to a side of the image obtaining means to the reference surface set the side of the work stage, receives the changed grating image obtained from the image obtain

Abstract: A light scattering sensor is provided with a cylindrical lens focusing received light along substantially parallel lines, or bands, that correspond to a range of scattering angles and a linear detector that detects the light intensity along the substantially parallel lines. By using a cylindrical lens, the lens serves as an auto-collimator, whereby light scattered at a specific angle from the collimated light beam strikes the linear detector at a corresponding specific location regardless of the location from where the light was scattered. Embodiments of the cylindrical lens-based light sensor can be applied to a number of different applications and industries that analyze light scattering intensity as a function of scattering angle. For example, embodiments of the cylindrical lens-based light scattering sensor can be used for monitoring a target fluid for contaminants.