Abstract: A piezoelectric resonator includes; a lower electrode 24 formed on a substrate 11; a piezoelectric film 23 formed on the lower electrode 24; an upper electrode 25 formed on the piezoelectric film 23 and obtaining, in collaboration with the lower electrode 24, a signal having a predetermined resonance frequency by a propagation of a bulk acoustic wave inside the piezoelectric film 23; and an acoustic multilayer reflective film 28 including an SiO2 film 28a having a predetermined acoustic impedance and an AIN film 28b having an acoustic impedance higher than the SiO2 film 28a, and reflecting the bulk acoustic wave, the SiO2 film 28a and the AIN film 28b being alternately stacked on the upper electrode 25, and the SiO2 film 28a being in contact with the upper electrode 25.

Abstract: The invention provides a laminate-type piezoelectric element comprising a ceramic laminate 10 with ceramic layers 11 and internal electrode layers 12 respectively stacked alternately, and a pair of external electrodes respectively connecting with a pair of connecting areas 15 formed at an outer peripheral area of the ceramic laminate 10. The internal electrode layer comprises an internal electrode part 120 with electric conductivity, and a non-pole part 120 where the internal electrode part 120 does not exist at the inside near an outer peripheral area. The ceramic laminate 10 comprises stress relaxation parts 13 able to modify more easily their shapes than the ceramic layers 11, along at least a part of said internal electrode layers. This stress relaxation part 13 is placed so as to overlap with the non-pole part 129 of either of the internal electrode layers 12, in a stacking direction of the ceramic laminate 10.

Abstract: Ultrasonic processing apparatus and methods are disclosed, which includes multiple transducers of at least two different resonant frequencies supplying ultrasonic energy to a liquid filled tank containing components to be cleaned or processed ultrasonically. The transducers are arranged in equilateral triangular patterns along diagonal lines on a wall of the tank so that each transducer has an adjacent transducer of a different frequency. Alternatively, the apparatus includes one or more rod transducers having different resonant frequencies so that the apparatus provides a mixture of various frequencies of ultrasonic energy to the tank. Another aspect of the invention involves selecting transducers with different resonant frequencies that are outside an excluded subrange, and powering the transducers by a driving signal that sweeps through the resonant frequencies of the transducers and the excluded subrange.

Abstract: There is disclosed a diaphragm structure that includes: a ceramic substrate 3 in which at least one opening 2 is formed, and a thin diaphragm portion 4 having a shape protruding on a side opposite to the opening 2 and constituted of a ceramic fired integrally with the ceramic substrate 3 in such a manner as to cover the opening 2. An opening shape of the opening 2 is a shape including at least one tip portion 5 in a longitudinal direction, having a curved shape, and a tapered portion 6 whose opening width gradually narrows toward the tip portion 5 and which is constituted of a curve or a straight line, and a portion of the diaphragm portion 4 corresponding to the tapered portion 6 has such a shape that a protruding height gradually lowers toward the tip portion 5.

Abstract: A piezoelectric/electrostrictive including a pair of mutually opposing vibration plates, each having a first portion and a second portion, a fixation section joined to the first portion of each of the vibration plates, and at least one piezoelectric/electrostrictive element arranged on at least one of the vibration plates. A surface of the device between the fixation section and the second portion of at least one of the vibration plates is curved.

Abstract: A piezoelectric element of the present invention includes a substrate, a lower electrode layer, a piezoelectric layer, an upper electrode layer, a cavity portion formed below a piezoelectric vibrating portion, and at least two bridging portions. The at least two bridging portions are formed so as not to be line-symmetric with respect to any line segment traversing the piezoelectric vibrating portion and/or so as not to be point-symmetric with respect to any point in the piezoelectric vibrating portion in a projection of the piezoelectric vibrating portion in the laminating direction.

Abstract: A piezoelectric/electrostrictive device includes: a ceramic substrate having a thick portion and a thin diaphragm portion; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode, and the thin diaphragm portion of the ceramic substrate is constituted to vibrate in conjunction with the driving of the piezoelectric/electrostrictive element. Furthermore, shape and dimension relations defined in the following (A) to (C) are satisfied: (A) a shape of the thin diaphragm portion 12 is an outward protruding arch shape, and an outward protrusion height of the arch shape is in a range of 5 to 50 ?m; (B) a mounting width of the thin diaphragm portion is in a range of 600 to 2000 ?m; and (C) a ratio (height/width) of the height to the width of the thick portion is in a range of 0.25 to 3.

Abstract: A ferroelectric thin film element comprises a substrate and an epitaxial ferroelectric thin film provided on the substrate. The thin film satisfies z/z0>1.003 and 0.997?x/x0?1.003, where a crystal face of said thin film parallel to a crystal face of a surface of the substrate is taken as a Z crystal face, a face spacing of the Z crystal face is taken as z, a face spacing of the Z crystal face of a material constituting the thin film in a bulk state is taken as z0, a crystal face of the thin film perpendicular to the Z crystal face is taken as an X crystal face, a face spacing of the X crystal face is taken as x and a face spacing of the X crystal face of the material constituting the thin film in a bulk state is taken as x0.

Abstract: A piezoelectric switch for tunable electronic components comprises piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.

Abstract: An ultrasonic cleaning tank for use in cleaning electronic parts having a top portion and a bottom portion operably divided by a perforated dispersion plate. The cleaning tank is assembled to avoid internal projections or obstructions within the top portion to create a piston-like, laminar flow region. The dispersion plate is constructed to provide a backpressure within the bottom portion so as to promote even flow of a cleaning fluid through the perforations. The cleaning fluid flows upward past an electronic part. At the same time, an ultrasonic transducer supplies ultrasonic energy within the cleaning fluid creating cavitation such that any particulate matter is scrubbed from the electronic parts. The particulates are subsequently carried upward by the laminar flow and over a tank lip. The cleaning tank can be used in either a batch or recirculating mode.

Abstract: A piezoelectric component includes piezoelectric layers and electrode layers between at least some of the piezoelectric layers. The electrode layers define a middle segment in an interior of the piezoelectric layers and end segments located between ends of at least some of the electrode layers and an end of at least one of the piezoelectric layers. The piezoelectric layers include a first piezoelectric material at the end segments and a second piezoelectric material at the middle segment between electrode layers. The first piezoelectric material has a first expansion that is less than a second expansion of the second piezoelectric material.

Abstract: A method of producing a surface acoustic wave device includes the steps of forming a first electrode film for constituting an interdigital electrode, a wiring electrode, and an electrode pad on the piezoelectric substrate, forming an insulation film on the piezoelectric substrate so as to cover the first electrode film, patterning the insulation film so that the insulation film existing on the portion of the first electrode film onto which a second electrode film is to be laminated is removed, forming the second electrode film on the portion of the first electrode film from which the insulation film has been removed, and bonding a bump onto the second electrode film.

Abstract: A film bulk acoustic resonator, and a method for manufacturing the same. The film bulk acoustic resonator includes a substrate, a protection layer vapor-deposited on the substrate, a membrane vapor-deposited on the protection layer and at a predetermined distance from an upper side of the substrate, and a laminated resonance part vapor-deposited on the membrane. Further, the manufacturing method includes vapor-depositing a membrane on a substrate, forming protection layers on both sides of the membrane, vapor-depositing a laminated resonance part on the membrane, and forming an air gap by removing a part of the substrate disposed between the protection layers. Accordingly, the membrane can be formed in a simple structure and without stress, and the whole manufacturing process is simplified.

Abstract: A tuning-fork-type piezoelectric resonator element and a tuning-fork-type piezoelectric resonator are provided. The tuning-fork-type piezoelectric resonator element comprises a piezoelectric resonator element body including base and resonating arms extending from one end of base. A support includes a short side connected to the base and a long side extending from one end of the short side along a longitudinal direction of the piezoelectric resonator element body. A mount is provided at the tip of the long side and at the short side.

Abstract: A surface acoustic wave device includes: a piezoelectric substrate that has two or more resonators formed on a surface; and a supporting substrate that is joined to another surface of the piezoelectric substrate. In this surface acoustic wave device, at least two of the resonators have exciting portions that overlap each other in the direction of propagating surface acoustic waves, and at least a part of the piezoelectric substrate is removed or modified to have different properties between at least one pair of overlapping resonators among the resonators having the overlapping portions.

Abstract: A multilayered structure which includes insulating layers and electrode layers and can be easily arrayed. The multilayered structure is manufactured by using a substrate on which first and second groups of columnar structures are arranged in a predetermined arrangement, and includes: a first electrode layer formed by forming a film of a conducting material on the substrate or an insulating layer except for portions around the first group of columnar structures; an insulating layer formed by spraying powder of an insulating material on the first electrode layer to deposit the powder thereon; a second electrode layer formed by forming a film of a conducting material on the insulating layer except for portions around the second group of columnar structures; and interconnections formed by filing, with a conducting material, holes formed by removing the columnar structures from the substrate.

Abstract: An actuator of the present invention comprises a piezoelectric element, one end face of the piezoelectric element in a displacement direction being supported by a fixing member, a block shaped driving member attached to the other end face of the piezoelectric element in the displacement direction, and a driven member frictionally engaged with at least one end face of the driving member in a direction orthogonal to the displacement direction, the driven member being extended along the displacement direction.

Abstract: A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.

Abstract: A layered piezoelectric element includes a plurality of driving parts divided by grooves and non-driving parts formed at both ends of the array of the driving parts. The driving parts and the non-driving parts include the alternate layers of piezoelectric layers and internal electrodes. The common electrode of the driving parts is extended from the non-driving parts. The capacitance C (F) of each driving part, the number of the driving parts n, and the resistance R (?) between the non-driving parts satisfy R?8×10?6/n/C.

Abstract: A cell driving type piezoelectric/electrostrictive actuator comprises: one or a plurality of cells defined by a wall portion including side walls, a ceiling wall and a bottom wall: side walls, the ceiling wall and the bottom wall being connected to form a space as cell, at least two side walls facing each other comprising piezoelectric/electrostrictive operation portions, the piezoelectric/electrostrictive operation portions being displaced to change a volume of the cell, wherein at least one pore is disposed in the wall portion other than at least two side walls facing each other and comprising piezoelectric/electrostrictive operation portions, and wherein all inner surfaces of the wall portion defining each cell are coated with one or more layers of seamless thin films. The method for preparing the same is also disclosed.